CN104890131A - Method for determinacy shape correction processing based on surface shape error slope - Google Patents
Method for determinacy shape correction processing based on surface shape error slope Download PDFInfo
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Abstract
The invention discloses a method for determinacy shape correction processing based on the surface shape error slope. The method comprises the first step of inputting the surface shape error slope and a height removal function of a to-be-processed optical part; the second step of converting the height removal function into a slope removal function; the third step of utilizing a deconvolution calculation method to calculate a dwell time function according to convolution relations of the slope removal function, the surface shape error slope and the dwell time function required for determinacy shape correction processing control; the fourth step of performing the determinacy shape correction processing on the surface of the to-be-processed optical part based on the calculated dwell time functions. The dwell time necessary for the processing control is calculated by directly using surface shape error slope data obtained through measurement, the surface shape error slope does not need to be converted into the surface shape error height, so that the conversion error caused by the fact that the surface shape error slope is converted to the surface shape error height is avoided, and the method is favorable for improving the determinacy in the processing process and improving processing accuracy.
Description
Technical field
The present invention relates to optical manufacturing field, be specifically related to a kind of certainty modification processing based on face shape error slope for one dimensional optical part.
Background technology
The model that current optical manufacturing method (i.e. computer-controlled certainty modification processing) is used and calculating are all based on face shape error height, are referred to as the certainty modification processing based on face shape error height in this case.Based in the certainty modification processing of face shape error height, face shape error represents with the form of height, and in-process stock removal amount (highly) equals the convolution removing function and residence time.
Face shape error slope is as a kind of new face shape error index more and more extensive use, and particularly at high-precision glancing speculum, as in X ray reflection mirror, face shape error slope instead of face shape error high evaluation index substantially.Face shape error slope ratio is used to use face shape error height to have following two obvious benefits.(1) face shape error slope ratio face shape error height more can reflect the optical property of optical surface.We know, the optical surface of same face shape error height, if error frequency is different, so optical property is also different.Face shape error height marker has lacked error frequency information, and face shape error slope exactly contains error frequency information, therefore, more desirable as metrics evaluation optical surface profile precision with face shape error slope.(2) face shape error slope more easily detects.Be limited to measurement bore and the measurement capability of common wavefront interferometer, large-sized plane, cylinder in X ray reflection mirror, the very difficult interferometer measurement of ellipsoid, common measuring method is Long travel contourgraph.The direct result that Long travel contourgraph is measured is just in time face shape error slope.Just because of above 2 reasons, face shape error slope is applied more and more extensive.
And current based in the certainty modification processing of face shape error height, the face shape error slope measuring gained must be converted to face shape error height, just can calculate the necessary residence time of process.Such conversion, due to the impact by original measurement error, will greatly increase the uncertainty of conversion errors height, this certainly will have influence on the effect of certainty optical manufacturing, affects final machining accuracy.
In sum, prior art can not adapt to and meet the new optical manufacturing demand exported for evaluation index and measurement with face shape error slope based on the certainty modification processing of face shape error height.
Summary of the invention
The technical problem to be solved in the present invention is: for the problems referred to above of prior art, a kind of direct face shape error slope data calculating processing using measurement to obtain is provided to control necessary residence time, face shape error slope is not needed to be converted to face shape error height, thus avoid the transformed error that face shape error slope is transformed into the introducing of face shape error height, be conducive to improving the certainty of process and improving the certainty modification processing based on face shape error slope of machining accuracy.
In order to solve the problems of the technologies described above, the technical solution used in the present invention is:
Based on a certainty modification processing for face shape error slope, step comprises:
1) input face shape error slope s (x) of optical element to be processed and highly remove function p (x);
2) slope removal function q (x) is converted to by highly removing function p (x);
3) meet relational expression shown in formula (1) between residence time function τ (x) needed for slope removal function q (x), face shape error slope s (x) and certainty correction of the flank shape machining control, utilize deconvolution computational methods to calculate described residence time function τ (x);
In formula (1), s (x) presentation surface shape error slope, q (x) represents that slope removes function, and τ (x) represents residence time function,
represent convolution algorithm symbol;
4) certainty correction of the flank shape processing is carried out on the surface for the treatment of processing optical part based on residence time function τ (x) calculated.
Preferably, described step 2) specifically refer to by highly remove function p (x) carry out differential obtain slope remove function q (x).
Preferably, described step 1) in input face shape error slope s (x) and highly remove function p (x) and be two-dimensional discrete data, described step 2) slope that obtains removal function q (x), described step 3) residence time function τ (x) that obtains is two-dimensional discrete data.
Preferably, described step 1) in input face shape error slope s (x) and highly remove function p (x) and be one-dimensional discrete data, described step 2) slope that obtains removal function q (x), described step 3) residence time function τ (x) that obtains is one-dimensional discrete data.
The certainty modification processing that the present invention is based on face shape error slope has following advantage: the present invention is according to face shape error slope s (x) of input optical element to be processed and highly remove function p (x), highly remove function p (x) and be converted to slope removal function q (x), function q (x) is removed according to slope, relation between face shape error slope s (x) and residence time function τ (x) utilizes deconvolution computational methods to calculate residence time function τ (x) needed for machining control, certainty correction of the flank shape processing is carried out on the surface for the treatment of processing optical part based on residence time function τ (x), face shape error slope s (x) that the present invention directly uses measurement to obtain directly calculating processing controls necessary residence time function τ (x), and do not need face shape error slope s (x) to be converted to face shape error height, thus avoid face shape error slope s (x) and be transformed into the step of face shape error height and the transformed error of introducing thereof, greatly can improve the certainty of process and improve machining accuracy.
Accompanying drawing explanation
Fig. 1 is the schematic flow sheet of embodiment of the present invention method.
Fig. 2 is face shape error slope s (x) curve of optical element to be processed in the embodiment of the present invention.
Fig. 3 is that the height inputted in the embodiment of the present invention removes function p (x) curve.
Fig. 4 is that the slope calculated in the embodiment of the present invention removes function q (x) curve.
Fig. 5 is the face shape error slope curve of optical element after processing in the embodiment of the present invention.
Fig. 6 is the face shape error degree of contrast in the embodiment of the present invention before and after optical effect correction as a comparison.
Detailed description of the invention
Optical element to be processed in the present embodiment is the silicon materials plane mirror of a block length 100mm, effective length on this minute surface is 80mm, hereafter for this optical element to be processed, the certainty modification processing that the present invention is based on face shape error slope will be further detailed.
As shown in Figure 1, the present embodiment comprises based on the step of the certainty modification processing of face shape error slope:
1) input face shape error slope s (x) of optical element to be processed and highly remove function p (x).
In the present embodiment, face shape error slope s (x) and highly removal function p (x) are given data, wherein face shape error slope s (x) obtains for adopting the measurement of slope detection instrument, in the present embodiment optical element to be processed minute surface on the result measured with slope detection instrument of face shape error slope s (x) in 80mm effective length as shown in Figure 2, root mean square (RMS) value of face shape error slope s (x) is 0.40urad.Highly remove the removal function that function p (x) is the existing certainty modification processing based on face shape error height, the technique that the present embodiment certainty modification processing specifically adopts is the ion beam processing technique of one dimension, and the height of its correspondence removes function p (x) as shown in Figure 3.
2) slope removal function q (x) is converted to by highly removing function p (x).
In the present embodiment, step 2) specifically refer to by highly remove function p (x) carry out differential (i.e. q (x)=dp (x)/dx) obtain slope remove function q (x), the slope finally obtained removal function q (x) curve as shown in Figure 4.It should be noted that, the slope that additive method can also be adopted as required to obtain highly removal function p (x) removes function q (x).
3) meet relational expression shown in formula (1) between residence time function τ (x) needed for slope removal function q (x), face shape error slope s (x) and certainty correction of the flank shape machining control, utilize deconvolution computational methods to calculate described residence time function τ (x);
In formula (1), s (x) presentation surface shape error slope, q (x) represents that slope removes function, and τ (x) represents residence time function,
represent convolution algorithm symbol; According to formula (1), be on known basis at slope removal function q (x), face shape error slope s (x), utilize deconvolution computational methods to calculate residence time function τ (x).
4) certainty correction of the flank shape processing is carried out on the surface for the treatment of processing optical part based on residence time function τ (x) calculated.
On the basis calculating residence time function τ (x), the method identical with prior art can be adopted to carry out the certainty correction of the flank shape process of the ion beam controlled based on residence time.The present embodiment is by after certainty correction of the flank shape processing, and as shown in Figure 5, the RMS value of processing shape error slope has below been reduced to 0.15urad to the testing result of optical element face shape error slope.In order to the processing effect must finding out this programme more directly perceived, we change unified for face shape error slope s (x) forward and backward for the processing shown in Fig. 2 and Fig. 5 in order to face shape error height, as shown in Figure 6, wherein before processing, the RMS value of face shape error height is 3.84nm in result display.Correlation curve see Fig. 6 is known, adopt the present embodiment based on after the certainty modification processing processing of face shape error slope, the RMS value of face shape error height has been reduced to 0.38nm, and the result of processing the like parts in this example based on face shape error further processing method is under prior art conditions general all at more than 0.5nm.As can be seen here, the present embodiment is very effective for raising machining accuracy based on the certainty modification processing of face shape error slope.
It should be noted that, step 1 in the present embodiment) in input face shape error slope s (x) and highly remove function p (x) and be one-dimensional discrete data, step 2) slope that obtains removes function q (x), step 3) residence time function τ (x) that obtains also is one-dimensional discrete data.In addition, step 1) in input face shape error slope s (x) and highly removal function p (x) also can all adopt two-dimensional discrete data as required, in the case, certainly step 2) slope that obtains removes function q (x), step 3) residence time function τ (x) that obtains also is two-dimensional discrete data.
The above is only the preferred embodiment of the present invention, protection scope of the present invention be not only confined to above-described embodiment, and all technical schemes belonged under thinking of the present invention all belong to protection scope of the present invention.It should be pointed out that for those skilled in the art, some improvements and modifications without departing from the principles of the present invention, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (4)
1., based on a certainty modification processing for face shape error slope, it is characterized in that step comprises:
1) input face shape error slope s (x) of optical element to be processed and highly remove function p (x);
2) slope removal function q (x) is converted to by highly removing function p (x);
3) meet relational expression shown in formula (1) between residence time function τ (x) needed for slope removal function q (x), face shape error slope s (x) and certainty correction of the flank shape machining control, utilize deconvolution computational methods to calculate described residence time function τ (x);
In formula (1), s (x) presentation surface shape error slope, q (x) represents that slope removes function, and τ (x) represents residence time function,
represent convolution algorithm symbol;
4) certainty correction of the flank shape processing is carried out on the surface for the treatment of processing optical part based on residence time function τ (x) calculated.
2. the certainty modification processing based on face shape error slope according to claim 1, is characterized in that, described step 2) specifically refer to by highly remove function p (x) carry out differential obtain slope remove function q (x).
3. the certainty modification processing based on face shape error slope according to claim 1 and 2, it is characterized in that: described step 1) in input face shape error slope s (x) and highly remove function p (x) and be two-dimensional discrete data, described step 2) slope that obtains removal function q (x), described step 3) residence time function τ (x) that obtains is two-dimensional discrete data.
4. the certainty modification processing based on face shape error slope according to claim 1 and 2, it is characterized in that: described step 1) in input face shape error slope s (x) and highly remove function p (x) and be one-dimensional discrete data, described step 2) slope that obtains removal function q (x), described step 3) residence time function τ (x) that obtains is one-dimensional discrete data.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106007406A (en) * | 2016-05-17 | 2016-10-12 | 中国科学院上海光学精密机械研究所 | Processing method for optical surface wave-front gradient repair and scratch passivation of meter-scale large-diameter phosphate laser neodymium glass |
| CN106671302A (en) * | 2015-11-06 | 2017-05-17 | 北京中电科电子装备有限公司 | Dicing saw parameter measurement method and device |
| CN111266937A (en) * | 2020-03-20 | 2020-06-12 | 大连理工大学 | Rocker arm type polishing device and method for full-caliber deterministic polishing of planar parts |
| CN111347294A (en) * | 2020-03-30 | 2020-06-30 | 中科院南京天文仪器有限公司 | High-gradient optical mirror surface error polishing correction processing method |
| CN114858090A (en) * | 2022-04-27 | 2022-08-05 | 西安工业大学 | Surface shape error measurement method of array structure optical element |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002052451A (en) * | 2000-08-11 | 2002-02-19 | Canon Inc | Polishing method, optical element and forming die for optical element |
| CN101274822A (en) * | 2008-03-31 | 2008-10-01 | 中国人民解放军国防科学技术大学 | Planning method for ion beam polishing path |
| CN101644915A (en) * | 2009-08-26 | 2010-02-10 | 中国人民解放军国防科学技术大学 | Computer-control polishing method based on removal function prediction model |
| JP2010173066A (en) * | 2009-01-29 | 2010-08-12 | Lawrence Livermore National Security Llc | Apparatus and method for deterministic control of surface configuration during full aperture polishing |
| JP2011189476A (en) * | 2010-03-16 | 2011-09-29 | Canon Inc | Method for polishing |
| CN102211301A (en) * | 2011-05-18 | 2011-10-12 | 浙江工业大学 | Large-plane ultra-precision automatic machining device and machining method therefore |
| CN102785170A (en) * | 2012-08-07 | 2012-11-21 | 中国科学院长春光学精密机械与物理研究所 | Device for preventing grinding head from being overturned in processing process of CCOS (Computer Controlled Optical Surfacing) |
-
2015
- 2015-05-19 CN CN201510255832.2A patent/CN104890131B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002052451A (en) * | 2000-08-11 | 2002-02-19 | Canon Inc | Polishing method, optical element and forming die for optical element |
| CN101274822A (en) * | 2008-03-31 | 2008-10-01 | 中国人民解放军国防科学技术大学 | Planning method for ion beam polishing path |
| JP2010173066A (en) * | 2009-01-29 | 2010-08-12 | Lawrence Livermore National Security Llc | Apparatus and method for deterministic control of surface configuration during full aperture polishing |
| CN101644915A (en) * | 2009-08-26 | 2010-02-10 | 中国人民解放军国防科学技术大学 | Computer-control polishing method based on removal function prediction model |
| JP2011189476A (en) * | 2010-03-16 | 2011-09-29 | Canon Inc | Method for polishing |
| CN102211301A (en) * | 2011-05-18 | 2011-10-12 | 浙江工业大学 | Large-plane ultra-precision automatic machining device and machining method therefore |
| CN102785170A (en) * | 2012-08-07 | 2012-11-21 | 中国科学院长春光学精密机械与物理研究所 | Device for preventing grinding head from being overturned in processing process of CCOS (Computer Controlled Optical Surfacing) |
Non-Patent Citations (1)
| Title |
|---|
| 樊成: "光学曲面确定性抛光的面型精度控制研究", 《中国博士学位论文全文数据库》, 15 September 2014 (2014-09-15) * |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106671302A (en) * | 2015-11-06 | 2017-05-17 | 北京中电科电子装备有限公司 | Dicing saw parameter measurement method and device |
| CN106007406A (en) * | 2016-05-17 | 2016-10-12 | 中国科学院上海光学精密机械研究所 | Processing method for optical surface wave-front gradient repair and scratch passivation of meter-scale large-diameter phosphate laser neodymium glass |
| CN106007406B (en) * | 2016-05-17 | 2019-02-01 | 中国科学院上海光学精密机械研究所 | The processing method of meter level heavy caliber phosphate laser neodymium glass optical surface wavefront gradients reparation and scratch passivation |
| CN111266937A (en) * | 2020-03-20 | 2020-06-12 | 大连理工大学 | Rocker arm type polishing device and method for full-caliber deterministic polishing of planar parts |
| CN111266937B (en) * | 2020-03-20 | 2021-09-10 | 大连理工大学 | Rocker arm type polishing device and method for full-caliber deterministic polishing of planar parts |
| CN111347294A (en) * | 2020-03-30 | 2020-06-30 | 中科院南京天文仪器有限公司 | High-gradient optical mirror surface error polishing correction processing method |
| CN111347294B (en) * | 2020-03-30 | 2021-08-10 | 中科院南京天文仪器有限公司 | High-gradient optical mirror surface error polishing correction processing method |
| CN114858090A (en) * | 2022-04-27 | 2022-08-05 | 西安工业大学 | Surface shape error measurement method of array structure optical element |
| CN114858090B (en) * | 2022-04-27 | 2023-10-03 | 西安工业大学 | Surface shape error measurement method for array structure optical element |
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