CN104729404A - High-speed 3D industry digital microscope - Google Patents

Abstract

The invention discloses a high-speed 3D industry digital microscope and belongs to the technical field of detection equipment. The high-speed 3D industry digital microscope comprises a base, a support, an eyepiece, an objective lens, an object stage and a motor, wherein the support is installed on the base, the eyepiece is fixed on the close upper portion in the height direction of the support, the objective lens is arranged below a lens cone of the eyepiece, the object stage is fixed on the close lower portion in the height direction of the support and located below the objective lens, the motor is connected with the objective lens in a driving mode through an objective lens locating support, and the objective lens conducts up-and-down motion along the support with the rotation of the motor. The high speed 3D industry digital microscope has the advantages that functions of microcosmic 3D measurement and microcosmic high-definition data acquisition are achieved, only is position control conducted on the objective lens, but not to conduct motion control on the whole optical system, the use is convenient, and the focusing is accurate; a single objective lens can be driven by a small type linear motor to conduct up-and-down motion because of the light weight, and the motion speed is fast; meanwhile, a high shutter frame exposed digital camera is arranged to be matched with the rapid motion of the objective lens, therefore, the data acquisition speed of the whole imaging system cam be improved, and the fast imaging is achieved.

Description

High speed 3D industrial digital microscope

Technical field

The invention belongs to checkout equipment technical field, be specifically related to a kind of high speed 3D industrial digital microscope.

Background technology

At present, 3D measurement is widely used in on-line checkingi and the measurement of industrial products, such as mobile phone normal 3D size confirmation needing nearly 30 times in assembling process.Usually, in order to ensure production efficiency and On-line funchon, producing the mode that line is often taked to inspect by random samples, only 3D on-line checkingi being set at very crucial station.Except 3D data, sometimes also need to carry out body surface microdefect in industrial processes and detect and the measurement of 2D size, obtain clear, view data accurately with this.

Existing industrial 3D on-line measurement means mainly contain: one, based on the surperficial 3D DATA REASONING of line laser structured light and triangulation technique, the advantage of this technology realizes conveniently, cost is lower, and can detect on a large scale, but its shortcoming to be speed comparatively slow, normal needs arrange telecontrol equipment in addition, and precision is lower, the 3D repeatable accuracy of the universal product is at about 0.015mm, and in addition, this technology can only be measured 3D information and cannot obtain microcosmic image data simultaneously, two, the 3D based on a laser measures, this technology obtains 3D information by calculating optical path length after laser reflection, measuring accuracy is very high, usually, 0.0005mm can be reached, but this technology can only be used for the depth information measuring certain some position, cannot realize measuring, and also can only measure 3D information and microcosmic image data cannot be obtained simultaneously, three, based on the classical 3D microscope of depth from focus (focusing range finding) technology, they can while acquisition 3D data, obtain microcosmic image data clearly, classical 3D microscope realizes the focusing of different depth focal plane by changing object distance, and indirectly obtain 3D information, and the acquisition of 3D information needs dynamic to adjust the whole height of camera and camera lens, or change the distance of testee to camera lens, but due to the restriction of weight load, its sport efficiency is not high, therefore the application on site in actual industrial detects is little, and be used for laboratory sampling Detection, in addition, classical 3D microscope can not carry out large-range measuring effectively, four, the 3D of structure based grating technology measures, and this technology reconstructs 3D information by the change of fringe phase, and speed is fast also can realize large-range measuring, but lower for precision during microscopic measurement, and therefore application scenario is limited, five, (English full name is: time of fly for light-field camera and TOF, Chinese is: time leap method) camera, light-field camera does not reach the requirement of industrial precision due to 3D measuring accuracy and spatial resolution, therefore so far also not in the case of commercial Application, and TOF camera due to spatial resolution limited, cannot measure for transparent substance simultaneously, therefore also just be confined to the field such as video analysis, man-machine interaction at present.

In view of above-mentioned prior art, be necessary to be improved existing 3D measuring technique, for this reason, the applicant has done useful design, and technical scheme described below produces under this background.

Summary of the invention

The object of the present invention is to provide a kind of high speed 3D industrial digital microscope, can carry out microcosmic 3D measurement, imaging definition is high, and processing speed is fast.

The object of the invention is to reach like this, a kind of high speed 3D industrial digital microscope, comprise base, support, eyepiece, object lens and objective table, described support installing is on base, described eyepiece is fixed on the nearly top in support height direction, described object lens are arranged on immediately below eyepiece lens barrel, described objective table is fixed on the nearly bottom in support height direction and is positioned at the below of object lens, it is characterized in that: also comprise motor, described motor is driven with object lens by an object lens locating support and is connected, and object lens move up and down along support with motor rotation.

In a specific embodiment of the present invention, described microscope also comprises camera, and described camera is fixed on the top in support height direction, and is electrically connected with display and imaging system.

In another specific embodiment of the present invention, described camera is the digital camera of high shutter frame exposure.

In another specific embodiment of the present invention, described motor is linear electric motors.

In another specific embodiment of the present invention, described motor is connected with upper control computer.

Also have in a specific embodiment of the present invention, the middle position that described objective table is deviating from object lens one side surface is provided with condenser, immediately below this condenser, be provided with light source, and described light source is fixed on base.

The present invention is owing to have employed said structure, and compared with prior art, the beneficial effect had is: have the function that microcosmic 3D measures and microcosmic high-definition data obtains concurrently; Object lens are independently arranged, and only carry out position control to object lens, instead of carry out motion control to whole optical system, easy to use, focus on precisely; Independent object lens are due to lighter weight, and can be driven by small linear motor and move up and down, movement velocity is fast; The digital camera simultaneously also arranging the exposure of high shutter frame, to mate the rapid movement of object lens, can improve the data acquisition speed of whole imaging system thus, realize fast imaging.

Accompanying drawing explanation

Fig. 1 is structural representation of the present invention.

Fig. 2 is the principle schematic that data 3D rebuilds.

Fig. 3 is the principle schematic that nonlinear mapping function model f (g) is set up.

In figure: 1. base; 2. support; 3. eyepiece; 4. object lens; 5. objective table, 51. condensers; 6. motor; 7. object lens locating support; 8. camera; 9. light source.

Embodiment

Technical spirit of the present invention and beneficial effect can be fully understood in order to make the public; applicant will describe in detail the specific embodiment of the present invention below by reference to the accompanying drawings; but applicant is not the restriction to technical scheme to the description of embodiment, any changing in the form rather than substance according to the present invention's design all should be considered as protection scope of the present invention.

Refer to Fig. 1, the present invention relates to a kind of high speed 3D industrial digital microscope, comprise base 1, support 2, eyepiece 3, object lens 4 and objective table 5.Described support 2 is arranged on base 1, and described eyepiece 3 is fixed on the nearly top of support 2 short transverse, and described object lens 4 are arranged on immediately below eyepiece 3 lens barrel.Described objective table 5 is fixed on the nearly bottom of support 2 short transverse and is positioned at the below of object lens 4, the middle position that objective table 5 is deviating from object lens 4 one side surface is provided with condenser 51, immediately below this condenser 51, be provided with light source 9, described light source 9 is fixed on base 1.Described microscope also comprises motor 6, and described motor 6 is driven with object lens 4 by an object lens locating support 7 and is connected, and object lens 4 operate with motor 6 and move up and down along support 2.Owing to just driving the object lens 4 of lighter weight to move, therefore motor 6 adopts small linear motor, and just can ensure that object lens 4 complete with very fast speed and move up and down, sport efficiency is high.Motor 6 is connected with upper control computer, and described upper control computer is used for calculating view data.Support 2 is also provided with camera 8 at the top of short transverse, and described camera 8 is the digital camera of high shutter frame exposure, and it is electrically connected with display and imaging system.Camera 8 mates the rapid movement of object lens 4, can ensure that whole imaging system has good data reading speed, realize fast imaging.This microscope has the function that microcosmic 3D measures and microcosmic high-definition data obtains concurrently, and object lens 4 are separated with eyepiece 3, only carries out position control to object lens 4, instead of carries out motion control to whole optical system, uses simple, focuses on precisely.

As is known in the industry, the collection of 3D microscope be view data under a series of different focal planes, the corresponding different object distances of different focal planes.The precision that 3D rebuilds, depends primarily on the performance of motor 6 in the kinematic accuracy of object lens 4 and the present invention except software algorithm, rebuilds high-definition image again and extract 3D data message after obtaining data by software algorithm.Usually, before above-mentioned two steps, also need the correction carrying out device parameter, i.e. the estimation of the Z axis coordinate of object lens 4 and the nonlinear mapping function of actual grade coordinate.

Below, image-forming principle of the present invention is described in detail.

First, be carry out data acquisition.Object lens 4 are completed by motor 6 and once move up and down, and its max die travel distance determines the dynamic range that 3D measures, and pays close attention to N number of discrete point in the trip.Suppose motor 6 do not move before the origin of corresponding object lens 4 camera lens of motor position, the least unit of coordinate is a motion impulse and theoretic system full accuracy.When shot change, the optimum focal plane of its correspondence also can change, and therefore camera lens place depth coordinate (uses l _irepresent, i represents different focal planes sequence) difference all (h can be used by a corresponding different depth _irepresent, i represents different focal planes sequence) optimum focal plane, be in the 3D information that the object under test on this focal plane is put and be h _i.L _iabsolute figure only directly to obtain in the data fed back from motor 6, and now h _ivalue be unknown, but each h _ithe corresponding l in capital _i.Namely the estimation procedure of systematic parameter is the process obtaining nonlinear mapping function model f (g), nonlinear mapping function f (l herein _i)=h _i.For the N number of discrete point i=0 in stroke, 1 ... N-1, can expose a two field picture by external trigger mode, and the size of discrete point number N depends on the aperture time of camera 8 and the follow-up consideration to process data computation burden.The time interval between any two discrete points should be greater than the time needed for single-frame images single exposure, N is needed to open image participation calculating because follow-up 3D rebuilds, the numerical value of discrete point number N is less, calculated amount also can be less, but precision also can decline, and therefore the selection of discrete point number N is the problem that a speed and performance balance are considered simultaneously thereupon.Above-mentioned data acquisition is not traditional collection limit, limit process, but opens single-frame images data by external trigger and the disposable collection N of mode linked that cooperates with motion.The acquisition of 3D data is the focal plane sequence number first calculating each position, then compute depth information, finally synthesizes a 3D data plot.

Secondly, be carry out 3D reconstruction.To obtain the 2D image of some row different focal planes after data acquisition completes, the function that this 2D image is corresponding can be expressed as lm _i(x, y), tries to achieve 3D data 3D (x, y) to all volume coordinates (x, y).Suppose the optimum focal plane sequence number j of known current location (x, y), then have 3D (x, y)=h _j=f (l _j), namely problem is converted into and solves j, calculates obtain by following fast solver:

$j(x,y)=\underset{i}{\mathrm{supg}}\left({\mathrm{lm}}_i(x,y)\right)$

Refer to Fig. 2, illustrate the principle that data 3D rebuilds, in figure, the depth data of A, B, C 3 calculates, and needs first to estimate corresponding sequence number, wherein, and f (l _a)=h _a; F (l _b)=h _b; F (l _c=h _c).The 3D data obtained by Fig. 3 have some noises, and this is mainly owing to only considered the data under N number of discrete time, and the method generally by filtering eliminates a part of noise.3D data can regard the 2D scalar data field of a great dynamic range as, utilize bilateral filter (bilateral filtering) technology of relative maturity can carry out filtering to it.Described bilateral filter technology, the such advantage of its detailed information can be retained while restraint speckle owing to having, therefore obtain the accreditation of people and be widely used in image filtering, but that its shortcoming is arithmetic speed is slow, calculated amount large, adopts again the technology of multigrid (multi grid) to accelerate it in the present embodiment.While 3D data reconstruction, can obtain a width yet and combine the picture rich in detail data that N opens image information, this view data does not come from a certain focal plane, but one that reconstructs from multiple image focal plane information is newly schemed.

Finally, be that systematic parameter is corrected.Need twice numerical evaluation in 3D computation process, be respectively focal plane sequence number and estimate and nonlinear mapping function f (l _i)=h _icalculate, the latter needs first to learn out nonlinear mapping function model f (g) by training sample, in the present embodiment, adopts the technology based on the matching of L0 norm non-linear piecewise to obtain this nonlinear mapping function model f (g).Fig. 3 illustrates the principle that nonlinear mapping function model f (g) is set up, and why adopts the method for segmentation to be because f (g) can be regarded as a relatively simple analytical function in local as polynomial expression etc.If f (g) to be expressed as cubic polynomial f (x)=ax ³+ bx ²+ cx+d, then the estimation of f (g) is converted into the estimation to parameter a, b, c, d, specifically calculates by following formula:

$(\tilde{a},\tilde{b},\tilde{c},\tilde{d})=\underset{a,b,c,d}{\sup }[\underset{n}{\mathrm{\Σ}}{\left|\right|a{\left(l_n\right)}^3+b{\left(l_n\right)}^2+c\left(l_n\right)+d-h_n\left|\right|}_0+{\mathrm{\αa}}^2+{\mathrm{\βb}}^2+{\mathrm{\γc}}^2]$

Wherein, factor alpha, β, γ are by artificial given in advance.

Claims (6)

1. a kind of high speed 3D industrial digital microscope, comprise base (1), support (2), eyepiece (3), object lens (4) and objective table (5), described support (2) is arranged on base (1), described eyepiece (3) is fixed on the nearly top of support (2) short transverse, described object lens (4) are arranged on immediately below eyepiece (3) lens barrel, described objective table (5) is fixed on the nearly bottom of support (2) short transverse and is positioned at the below of object lens (4), it is characterized in that: also comprise motor (6), described motor (6) to be driven with object lens (4) by an object lens locating support (7) and is connected, object lens (4) move up and down along support (2) with motor (6) running.

2. high speed 3D industrial digital microscope according to claim 1, it is characterized in that described microscope also comprises camera (8), described camera (8) is fixed on the top of support (2) short transverse, and is electrically connected with display and imaging system.

3. high speed 3D industrial digital microscope according to claim 2, is characterized in that the digital camera that described camera (8) exposes for high shutter frame.

4. high speed 3D industrial digital microscope according to claim 1, is characterized in that described motor (6) is linear electric motors.

5. high speed 3D industrial digital microscope according to claim 4, is characterized in that described motor (6) is connected with upper control computer.

6. high speed 3D industrial digital microscope according to claim 1, it is characterized in that the middle position that described objective table (5) is deviating from object lens (4) side surface is provided with condenser (51), immediately below this condenser (51), be provided with light source (9), described light source (9) is fixed on base 1.