CN104713886A - Apparatus and method for inspecting fault of polarizing film - Google Patents

Apparatus and method for inspecting fault of polarizing film Download PDF

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CN104713886A
CN104713886A CN201410766749.7A CN201410766749A CN104713886A CN 104713886 A CN104713886 A CN 104713886A CN 201410766749 A CN201410766749 A CN 201410766749A CN 104713886 A CN104713886 A CN 104713886A
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defect
polarizing film
light polarizing
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test section
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许宰宁
朴宰贤
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Dongwoo Fine Chem Co Ltd
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Dongwoo Fine Chem Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/30Polarising elements
    • G02B5/3025Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G02B5/3033Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state in the form of a thin sheet or foil, e.g. Polaroid
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854Grading and classifying of flaws
    • G01N2021/888Marking defects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9511Optical elements other than lenses, e.g. mirrors

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Signal Processing (AREA)
  • Health & Medical Sciences (AREA)
  • Quality & Reliability (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

The invention provides an apparatus and a method for inspecting a fault of a polarizing film. The apparatus for inspection the fault of the polarizing film is characterized by comprising a receiver for receiving a test result for the polarizing film examined by an automatic optical inspection machine, and a detection unit for analyzing the test result and inspecting the fault of the polarizing film. The detection unit determines that the fault form of the polarizing film is at least one of bonding foreign material, joined bubbles, foreign substances, bright points, scratching, crowd of bright spots and a line based on two or more parameters selected from defect type (Defect Type), delta X (Dx), delta Y (Dy), area (Area), density (Density), size (Size), peak (Peak) and thickness.

Description

The defect detecting device of light polarizing film and method
Technical field
The present invention relates to defect detecting device and the method for light polarizing film, more specifically, relate to the check result using automatic optical checking machine, automatically detect bad system and the method for the light polarizing film of producing in real time.
Background technology
In the manufacturer producing the light polarizing film used as LCD optical material, in order to carry out the real-time inspection of produced product at high speed, make use of online (IN-LINE) automatic visual inspection system (Automated OpticalInspection System, hereinafter referred to as " automatic optical checking machine ").Usually, on-line automatic optical checking machine is at defect generating unit place, and some inking or apply bar code mark, in subsequent handling, discards an inking or the position that is applied with bar code mark, or further check it.
But, in the specific moment, when concentrating and produce above-mentioned defect continuously or when reality whether produce the defects such as fine defects not clear, due to the overload of described automatic optical checking machine and the problem of hardware performance, existing can not without implementing the such problem of mark to above-mentioned all defect generating unit with omitting.In addition, following situation is likely absorbed in: the product not implementing at defect generating unit place to mark is not recognized as defective products and is sold to client company in subsequent handling.Based on this reason, in subsequent handling, finally visually check product by overlooker, but such based in visual Inspection, there is high cost, expend the problem in man-hour.
In addition, in the prior art, the information of the defect generation rate being used only in the defects count detected in light polarizing film disk can only be obtained, therefore, existence can not consider such problem of outflow (that is, omitting the mark of the defect generating unit) possibility of defect.
On the other hand, propose a kind of failure analysis system and method (such as with reference to following patent documentation 1), it automatically extracts to be formed multiplely has the fatal bad of the semiconductor wafer of the chip of multiple storage unit respectively, but in described failure analysis system and method, only consider X, Y-direction bad Lai Pan Do good no, therefore exist and can not differentiate accurately and engage foreign matter, engage the such problem of the various defect such as bubble, foreign matter, bright spot, scratch, sociability bright spot, a line (yarn).
Prior art document
Patent documentation
Patent documentation 1: KR published patent 2000-0077024 publication
Summary of the invention
The problem that invention will solve
The present invention proposes to solve the problem, and its object is to provide the bad device and method that can automatically use the check result of automatic optical checking machine to detect the light polarizing film of producing in real time.
Other object of the present invention is to provide defect detecting device and the method for the light polarizing film that can differentiate the various defects engaging the light polarizing film such as foreign matter, joint bubble, foreign matter, bright spot, scratch, sociability bright spot, a line accurately.
For the means of dealing with problems
In order to reach above-mentioned purpose, the invention provides a kind of defect detecting device of light polarizing film, it is characterized in that, described device has: acceptance division, and it receives the check result for light polarizing film checked out by automatic optical checking machine; And test section, it analyzes described check result, detect the defect of light polarizing film, described test section according to the plural parameter in defect type (DefectType), Δ X (Dx), Δ Y (Dy), area (Area), density (Density), size (Size), peak value (Peak), thickness (Thickness), differentiate the defect form of described light polarizing film be engage foreign matter, engage bubble, foreign matter, bright spot, scratch, sociability bright spot, in a line at least any one.
In addition, in order to reach above-mentioned purpose, the invention provides a kind of defect inspection method of light polarizing film, it is characterized in that, described method comprises following steps: receive the check result to light polarizing film checked out by automatic optical checking machine; And analyze described check result, detect the defect of light polarizing film, in the step detecting described defect, according to the plural parameter in defect type (Defect Type), Δ X (Dx), Δ Y (Dy), area (Area), density (Density), size (Size), peak value (Peak), thickness (Thickness), differentiate the defect form of described light polarizing film be engage foreign matter, engage bubble, foreign matter, bright spot, scratch, sociability bright spot, in a line at least any one.
Invention effect
According to defect detecting device and the method for light polarizing film of the present invention, can automatically use the check result of automatic optical checking machine to detect the bad of the light polarizing film of producing in real time.Especially, according to defect type (DefectType), Δ X (Dx), Δ Y (Dy), area (Area), density (Density), size (Size), peak value (Peak), thickness (Thickness) etc., the defect form of light polarizing film can be determined accurately for engaging foreign matter, engaging bubble, foreign matter, bright spot, scratch, sociability bright spot, a line etc.
In addition, thereby, it is possible to cancel the bad analytic process of being undertaken by operator (operator), and defect factors can be determined at once, thereby, it is possible to the bad generation shortening light polarizing film is interval.
Accompanying drawing explanation
Fig. 1 is the structural drawing of the example that adoptable automatic optical checking machine is in the present invention shown.
Fig. 2 is the structural drawing of the defect detecting device of the light polarizing film of an embodiment of the invention.
Fig. 3 is the figure of the joint foreign bodies detection algorithm that an embodiment of the invention are shown.
Fig. 4 is the figure of the joint bubble detection algorithm that an embodiment of the invention are shown.
Fig. 5 is the figure of the foreign bodies detection algorithm that an embodiment of the invention are shown.
Fig. 6 is the figure of the bright spot detection algorithm that an embodiment of the invention are shown.
Fig. 7 is the figure of the scratch detection algorithm that an embodiment of the invention are shown.
Fig. 8 is the figure of the sociability bright spot detection algorithm that an embodiment of the invention are shown.
Fig. 9 is the figure of the line detection algorithm that an embodiment of the invention are shown.
Label declaration
100: the defect detecting device of light polarizing film
110: acceptance division
120: storage unit
130: test section
140: notification unit
Embodiment
Below, with reference to the accompanying drawings, the defect detecting device of light polarizing film of the present invention and method are described in detail.
First, in order to help to understand the present invention, schematic illustration is carried out to automatic optical checking machine.Fig. 1 is the figure that an example of light polarizing film being carried out to the automatic optical checking machine of defect inspection is shown.
The light polarizing film produced is wound into discoid preservation roundly, but such light polarizing film disk is when carrying out the inspection of defect, sends from unloading part (not shown), and by the direct of travel conveying of roller 12 towards regulation.Now, the transporting velocity of light polarizing film 10 by the perception of scrambler 11 uniform velocity sensing device, and is used to the information generating defect generating unit afterwards.
Now, described automatic optical checking machine has optical devices 20, and these optical devices 20 have at least one lighting device 21 and at least one filming apparatus 22 corresponding with it, thereby, it is possible to obtain the optical image for the light polarizing film in described conveying.
The structure of optical devices 20 and design are according to described automatic optical checking machine being used to carry out the project (i.e. kind and content) of the defect detected and different, but, usually, in automatic optical checking machine, transmission inspection, reflex, polarized light blocking inspection (so-called cross-check) etc. are carried out to light polarizing film.
Therefore, optical devices 20 are designed to, according to the defective item that will check, optionally or concurrently driving indirect illumination and the filming apparatus corresponding with it, transillumination and the filming apparatus etc. corresponding with it, obtaining the optical image for detecting various defect type thus.
And then the optical image obtained by optical devices 20 is like this transferred to image analysing computer/testing fixture 40, and image analysing computer/testing fixture 40, by analyzing the optical image of transmission, detects the various defects existed in light polarizing film.In addition, image analysing computer/testing fixture 40 generates the data (hereinafter referred to as " inspection result data ") relevant to the defect detected and preserves.
Now, the defect generating unit based on described inspection result data is transferred to Mk system 30, the marking of control portion of described Mk system 30 32 by control mark means 31, with described defect generating unit accordingly, described light polarizing film is implemented to the mark of defect.
In addition, described inspection result data is transferred to output unit 50, display device 60 etc., exports this result, this result is transferred to gerentocratic server 70 and carries out preserving and managing.
As described above, complete the light polarizing film after defect inspection and be wound portion (not shown) and again reel round and round, thus, discoidly to preserve with original.
The inspection result data of automatic optical checking machine is preserved with the document form such as database or electrical form usually.The various data such as brightness, width, length, size (area), shape (circle/linear), detecting optical group (blocking of projection/reflection/polarized light) that automatic optical checking machine generates defect are used as the check result for individual other light polarizing film disk LOT and preserve.
Now, in the transmission of described inspection result data, in order to ensure multiple user or gerentocratic accessibility, employ file transfer protocol (FTP) (FTP:file transfer protocol).The inspection result data of such transmission is stored in the storage unit in the defect detecting device of light polarizing film of the present invention, unified in order to assay format, is converted to the common form of regulation by data conversion unit.Herein, described common form is the markup language as data language, such as extend markup language (XML:Extensible Markup Language), HTML (Hypertext Markup Language) (HTML:Hypertext Markup Language) etc.Therefore, data analysis is afterwards carried out based on the XML etc. after conversion.
But, about the conversion of inspection result data as described above, preserve data mode with each production line premised on different situations by inspection machine, in order to carry out the data analysis that obtains from the inspection machine of different machine and be converted to unified common form, in contrast to this, when the preservation data mode of inspection machine is all identical, the transfer process of data can be omitted.In addition, even if when respective preservation data mode is different, also correspondingly data analysis can be carried out with respective data mode, therefore, self-evident, also can omit under these circumstances.
Below, according to Fig. 2 ~ Fig. 9, the defect detecting device of light polarizing film of the present invention and method are described.As a reference, the defect detecting device of light polarizing film of the present invention can be realized by above-mentioned image analysing computer/testing fixture 40 self or its part, or also can be realized by other device.
Fig. 2 is the structural drawing of the defect detecting device of the light polarizing film of an embodiment of the invention.With reference to Fig. 2, the defect detecting device 100 of the light polarizing film of an embodiment of the invention has acceptance division 110, storage unit 120, test section 130 and notification unit 140 etc.
First, acceptance division 110 receives the inspection result data relevant to the light polarizing film checked out by automatic optical checking machine.In addition, storage unit 120 preserve described in the inspection result data that receives.
Herein, as mentioned above, inspection result data is the data of the check result representing automatic optical checking machine, when the preferred embodiment of the present invention, comprise the information relevant to defect type (Defect Type), Δ X (Dx), Δ Y (Dy), area (Area), density (Density), size (Size), peak value (Peak), thickness (Thickness) etc.
As a reference, following table 1 shows the definition of the parameter to defect type (Defect Type), Δ X (Dx), Δ Y (Dy), area (Area), density (Density), size (Size), peak value (Peak), thickness (Thickness).
[table 1]
With reference to table 1, Δ X (Dx) represents X-axis (Width of the light polarizing film) size being identified as the region of defect, and Δ Y (Dy) represents Y-axis (long side direction of the light polarizing film) size being identified as the region of defect.Described Δ X (Dx) and Δ Y (Dy) determine as follows: setting pixel is as benchmark, the quantity of X-axis pixel such as the region being identified as defect is multiplied by X-axis spatial resolution (size of the reality of X-axis pixel), and the quantity of Y-axis pixel for the region being identified as defect is multiplied by Y-axis spatial resolution (size of the reality of Y-axis pixel).Area (Area) represents the total area being identified as defect.Equally, described area (Area) be also setting pixel as benchmark, such as, for the quantity of total pixel being identified as defect, the unit area being multiplied by the reality of pixel is determined.Density (Density) represents the region manual ratio, that is, Area × 100/ (Dx × Dy) in the quadrilateral area of the X-axis in region and the entirety of Y-axis that are identified as defect that are identified as defect.Size (Size) represents the size of defect, in an embodiment of the invention, gets the size on average estimating defect of Δ X (Dx) and Δ Y (Dy).Peak value (Peak) represents the difference between highest/lowest and mean flow rate being around identified as the brightness of the part of defect.As a reference, about described brightness, can be when showing over the display, black is scaled the digital value of 0, white is scaled the digital value of 255 and show with the value of 0 ~ 255.Thickness (Thickness) represents the thickness of defect, in an embodiment of the invention, according to Area/ (√ Dx 2+ Dy 2) estimate the thickness of defect.Defect type (Defect Type) is divided into black defect (stain), White Defects (white point), black and white defect (concavo-convex), black defect (stain) represents (secretly) defect lower than base shades (Gray), White Defects (white point) represents higher than (bright) defect of base shades (Gray), black and white defect (concavo-convex) represent comprise higher than/lower than the defect of the part of base shades (Gray).
Test section 130 analyzes described inspection result data, detects the defect of light polarizing film.To this, Fig. 3 ~ Fig. 9 shows the detection algorithm of embodiments of the present invention, below, with reference to Fig. 3 ~ Fig. 9, is described the defect inspection method of the light polarizing film of the present invention of being undertaken by described test section 130.
Fig. 3 is the figure of the joint foreign bodies detection algorithm that an embodiment of the invention are shown.
With reference to Fig. 3, in step S310, test section 130 judges whether defect type (Defect Type) is concavo-convex (black and white defect), does not skip (Skip) at defect type (Defect Type) for concavo-convex (black and white defect).When defect type (Defect Type) is for concavo-convex (black and white defect), in step s 320, test section 130 judges that whether size (Size) is as more than 300 μm, skips (Skip) when size (Size) is not more than 300 μm.And then when size (Size) is more than 300 μm, in step S330, the defect form that test section 130 is determined as this light polarizing film engages foreign matter.
Fig. 4 is the figure of the joint bubble detection algorithm that an embodiment of the invention are shown.
With reference to Fig. 4, in step S410, test section 130 judges whether defect type (Defect Type) is stain (black defect), does not skip (Skip) at defect type (Defect Type) for stain (black defect).When defect type (Defect Type) is for stain (black defect), in the step s 420, test section 130 judges whether size (Size) is more than 100 μm and is less than 540 μm, skips (Skip) when size (Size) is not more than 100 μm and is less than 540 μm.When size (Size) is more than 100 μm and is less than 540 μm, in step S430, test section 130 judges whether area (Area) is 90 μm 2above and 1140 μm 2below, be not 90 μm at area (Area) 2above and 1140 μm 2skip when following (Skip).It is 90 μm at area (Area) 2above and 1140 μm 2when following, in step S440, test section 130 judges whether Δ X (Dx) is more than 120 μm and less than 780 μm, when Δ X (Dx) be not more than 120 μm and less than 780 μm skip (Skip).When Δ X (Dx) be more than 120 μm and less than 780 μm, in step S450, test section 130 judges whether Δ Y (Dy) is less than 210 μm, skips (Skip) when Δ Y (Dy) is not below 210 μm.When Δ Y (Dy) is below 210 μm, in step S460, test section 130 judges whether thickness (Thickness) is less than 66 μm, skips (Skip) when thickness (Thickness) is not less than 66 μm.When thickness (Thickness) is less than 66 μm, in step S470, test section 130 judges whether peak value (Peak) is less than 20, skips (Skip) when peak value (Peak) is not less than 20.When peak value (Peak) is less than 20, in step S480, the defect form that test section 130 is determined as this light polarizing film engages bubble.
Fig. 5 is the figure of the foreign bodies detection algorithm that an embodiment of the invention are shown.
With reference to Fig. 5, in step S510, test section 130 judges whether defect type (Defect Type) is stain (black defect), does not skip (Skip) at defect type (Defect Type) for stain (black defect).When defect type (Defect Type) is for stain (black defect), in step S520, test section 130 judges whether size (Size) is less than 160 μm, skips (Skip) when size (Size) is not below 160 μm.When size (Size) is below 160 μm, in step S530, test section 130 judges whether area (Area) is 300 μm 2below, be not 300 μm at area (Area) 2skip when following (Skip).It is 300 μm at area (Area) 2when following, in step S540, test section 130 judges whether Δ X (Dx) is less than 150 μm, skips (Skip) when Δ X (Dx) is not below 150 μm.When Δ X (Dx) is below 150 μm, in step S550, the defect form that test section 130 is determined as this light polarizing film is foreign matter.
Fig. 6 is the figure of the bright spot detection algorithm that an embodiment of the invention are shown.
With reference to Fig. 6, in step S610, test section 130 judges whether defect type (Defect Type) is white point (White Defects), does not skip (Skip) at defect type (Defect Type) for white point (White Defects).When defect type (Defect Type) is for white point (White Defects), in step S620, test section 130 judges whether peak value (Peak) is more than 16, skips (Skip) when peak value (Peak) is not more than 16.When peak value (Peak) is more than 16, in step S630, test section 130 judges whether Δ Y (Dy) is less than 450 μm, skips (Skip) when Δ Y (Dy) is not below 450 μm.When Δ Y (Dy) is below 450 μm, in step S640, the defect form that test section 130 is determined as this light polarizing film is bright spot.
Fig. 7 is the figure of the scratch detection algorithm that an embodiment of the invention are shown.
With reference to Fig. 7, in step S710, test section 130 judges whether defect type (Defect Type) is white point (White Defects), does not skip (Skip) at defect type (Defect Type) for white point (White Defects).When defect type (Defect Type) is for white point (White Defects), in step S720, test section 130 judges whether Δ X (Dx) is less than 105 μm, skips (Skip) when Δ X (Dx) is not below 105 μm.When Δ X (Dx) is below 105 μm, in step S730, test section 130 judges whether Δ Y (Dy) is more than 150 μm, skips (Skip) when Δ Y (Dy) is not more than 150 μm.When Δ Y (Dy) is more than 150 μm, in step S740, test section 130 judges whether peak value (Peak) is less than 50, skips (Skip) when peak value (Peak) is not less than 50.When peak value (Peak) is less than 50, in step S750, the defect form that test section 130 is determined as this light polarizing film is scratch.
Fig. 8 is the figure of the sociability bright spot detection algorithm that an embodiment of the invention are shown.
With reference to Fig. 8, in step S810, test section 130 judges whether defect type (Defect Type) is white point (White Defects), does not skip (Skip) at defect type (Defect Type) for white point (White Defects).When defect type (Defect Type) is for white point (White Defects), in step S820, test section 130 judges whether the difference between Δ X (Dx) and Δ Y (Dy) is more than 45 μm, skips (Skip) the difference between Δ X (Dx) and Δ Y (Dy) is not more than 45 μm.Difference between Δ X (Dx) and Δ Y (Dy) is more than 45 μm, in step S830, test section 130 judges whether peak value (Peak) is more than 16, skips (Skip) when peak value (Peak) is not more than 16.When peak value (Peak) is more than 16, in step S840, test section 130 judges whether Δ X (Dx) is less than 420 μm, skips (Skip) when Δ X (Dx) is not below 420 μm.When Δ X (Dx) is below 420 μm, in step S850, test section 130 judges whether Δ Y (Dy) is less than 1260 μm, skips (Skip) when Δ Y (Dy) is not below 1260 μm.When Δ Y (Dy) is below 1260 μm, in step S860, test section 130 judges whether density (Density) is less than 7.5, skips (Skip) when density (Density) is not less than 7.5.When density (Density) is less than 7.5, in step S870, the defect form that test section 130 is determined as this light polarizing film is sociability bright spot.
Fig. 9 is the figure of the line detection algorithm that an embodiment of the invention are shown.
With reference to Fig. 9, in step S910, test section 130 judges whether peak value (Peak) is more than 50, skips (Skip) when peak value (Peak) is not more than 50.When peak value (Peak) is more than 50, in step S920, test section 130 judges whether density (Density) is less than 6.75, skips (Skip) when density (Density) is not less than 6.75.When density (Density) is less than 6.75, in step S930, test section 130 judges whether thickness (Thickness) is more than 42 μm, skips (Skip) when thickness (Thickness) is not more than 42 μm.When thickness (Thickness) is more than 42 μm, in step S940, test section 130 judges whether Δ X (Dx) is more than 150 μm, skips (Skip) when Δ X (Dx) is not more than 150 μm.When Δ X (Dx) is more than 150 μm, in step S950, the defect form that test section 130 is determined as this light polarizing film is a line.
On the other hand, according to the preferred embodiment of the present invention, described test section 130, when not detecting joint foreign matter, engage any one defect form in bubble, foreign matter, bright spot, scratch, sociability bright spot, a line and skip (Skip), detects to find out other defect form again.
Such as, test section 130 can not detect when carrying out joint foreign bodies detection algorithm and engages foreign matter and skip (Skip), joint bubble detection algorithm is carried out.And then, when can not detect joint bubble when carrying out joint bubble detection algorithm and skip (Skip), again carry out foreign bodies detection algorithm, various defect form is detected.
Turn back to Fig. 2, the defect form detected by described test section 130 is reported to outside via output unit (such as display, defect device for informing etc.) by notification unit 140, make to examine the operator (operator) receiving light polarizing film and can grasp defect form at once, can promptly eliminate the defect factors corresponding with it.
Above, with reference to embodiments of the present invention to invention has been detailed description, but for commonsense personnel in the technical field of the invention, so concrete technology is preferred implementation example, self-evident, and scope of the present invention is not limited thereto.Such as, in each defects detection algorithm above-mentioned, even if the separate step forming algorithm changes its order also carry out identical measuring ability, and each defects detection algorithm can change its order.
Therefore, if commonsense personnel in the technical field of the invention, then according to described content, can carry out various application and distortion within the scope of the invention, therefore, essential scope of the present invention should be defined by appending claims and equivalent thereof.

Claims (20)

1. a defect detecting device for light polarizing film, is characterized in that, the defect detecting device of this light polarizing film has:
Acceptance division, it receives the check result for light polarizing film checked out by automatic optical checking machine; And
Test section, it analyzes described check result, detects the defect of light polarizing film,
Described test section according to the plural parameter in defect type, Δ X, Δ Y, area, density, size, peak value, thickness, differentiate the defect form of described light polarizing film be engage foreign matter, engage bubble, foreign matter, bright spot, scratch, sociability bright spot, in a line at least any one.
2. the defect detecting device of light polarizing film according to claim 1, is characterized in that,
The defect detecting device of described light polarizing film also has notification unit, and this notification unit reports the defect form detected by described test section by output unit.
3. the defect detecting device of light polarizing film according to claim 1 and 2, is characterized in that,
Described test section is when defect type is concavo-convex and is of a size of more than 300 μm, and the defect form being determined as described light polarizing film engages foreign matter.
4. the defect detecting device of light polarizing film according to claim 1 and 2, is characterized in that,
Described test section defect type be stain, be of a size of more than 100 μm and be less than 540 μm, area is 90 μm 2above and 1140 μm 2below, Δ X be more than 120 μm and less than 780 μm, Δ Y is less than 210 μm, thickness is less than 66 μm and peak value is less than 20 when, the defect form being determined as described light polarizing film engages bubble.
5. the defect detecting device of light polarizing film according to claim 1 and 2, is characterized in that,
Described test section defect type be stain, be of a size of less than 160 μm, area is 300 μm 2below and Δ X is below 150 μm when, the defect form being determined as described light polarizing film is foreign matter.
6. the defect detecting device of light polarizing film according to claim 1 and 2, is characterized in that,
Described test section when defect type be white point, peak value be more than 16 and Δ Y is below 450 μm, the defect form being determined as described light polarizing film is bright spot.
7. the defect detecting device of light polarizing film according to claim 1 and 2, is characterized in that,
Described test section when defect type be white point, Δ X is less than 105 μm, Δ Y is more than 150 μm and peak value is less than 50, the defect form being determined as described light polarizing film is scratch.
8. the defect detecting device of light polarizing film according to claim 1 and 2, is characterized in that,
Described test section when defect type be white point, difference between Δ X and Δ Y is more than 45 μm, peak value is more than 16, Δ X is less than 420 μm, Δ Y is less than 1260 μm and density is less than 7.5, the defect form being determined as described light polarizing film is sociability bright spot.
9. the defect detecting device of light polarizing film according to claim 1 and 2, is characterized in that,
Described test section when peak value be more than 50, density is less than 6.75, thickness is more than 42 μm and Δ X is more than 150 μm, the defect form being determined as described light polarizing film is a line.
10. the defect detecting device of light polarizing film according to claim 1 and 2, is characterized in that,
Described test section is skipped in any one defect form that can not detect in joint foreign matter, joint bubble, foreign matter, bright spot, scratch, sociability bright spot, a line, again detect other defect form.
11. 1 kinds of light polarizing film defect inspection methods, is characterized in that, this light polarizing film defect inspection method comprises following steps:
Receive the check result for light polarizing film checked out by automatic optical checking machine; And
Analyze described check result, detect the defect of light polarizing film,
In the step detecting described defect, according to the plural parameter in defect type, Δ X, Δ Y, area, density, size, peak value, thickness, differentiate the defect form of described light polarizing film be engage foreign matter, engage bubble, foreign matter, bright spot, scratch, sociability bright spot, in a line at least any one.
12. light polarizing film defect inspection methods according to claim 11, is characterized in that,
In described light polarizing film defect inspection method, also comprise following steps: the defect form detected described in being reported by output unit.
13. light polarizing film defect inspection methods according to claim 11 or 12, is characterized in that,
In described detecting step, when defect type is concavo-convex and is of a size of more than 300 μm, the defect form being determined as described light polarizing film engages foreign matter.
14. light polarizing film defect inspection methods according to claim 11 or 12, is characterized in that,
In described detecting step, defect type be stain, be of a size of more than 100 μm and be less than 540 μm, area is 90 μm 2above and 1140 μm 2below, Δ X be more than 120 μm and less than 780 μm, Δ Y is less than 210 μm, thickness is less than 66 μm and peak value is less than 20 when, the defect form being determined as described light polarizing film engages bubble.
15. light polarizing film defect inspection methods according to claim 11 or 12, is characterized in that,
In described detecting step, defect type be stain, be of a size of less than 160 μm, area is 300 μm 2below and Δ X is below 150 μm when, the defect form being determined as described light polarizing film is foreign matter.
16. methods according to claim 11 or 12, is characterized in that,
In described detecting step, when defect type be white point, peak value be more than 16 and Δ Y is below 450 μm, the defect form being determined as described light polarizing film is bright spot.
17. light polarizing film defect inspection methods according to claim 11 or 12, is characterized in that,
In described detecting step, when defect type be white point, Δ X is less than 105 μm, Δ Y is more than 150 μm and peak value is less than 50, the defect form being determined as described light polarizing film is scratch.
18. light polarizing film defect inspection methods according to claim 11 or 12, is characterized in that,
In described detecting step, when defect type be white point, difference between Δ X and Δ Y is more than 45 μm, peak value is more than 16, Δ X is less than 420 μm, Δ Y is less than 1260 μm and density is less than 7.5, the defect form being determined as described light polarizing film is sociability bright spot.
19. light polarizing film defect inspection methods according to claim 11 or 12, is characterized in that,
In described detecting step, when peak value be more than 50, density is less than 6.75, thickness is more than 42 μm and Δ X is more than 150 μm, the defect form being determined as described light polarizing film is a line.
20. light polarizing film defect inspection methods according to claim 11 or 12, is characterized in that,
In described detecting step, when skipping in any one defect form that can not detect in joint foreign matter, joint bubble, foreign matter, bright spot, scratch, sociability bright spot, a line, again detect other defect form.
CN201410766749.7A 2013-12-17 2014-12-11 Apparatus and method for inspecting fault of polarizing film Pending CN104713886A (en)

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Publication number Priority date Publication date Assignee Title
CN107782741A (en) * 2017-10-26 2018-03-09 德清晨英电子科技有限公司 A kind of device that bubble is judged by light

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JPWO2022044390A1 (en) * 2020-08-31 2022-03-03
EP4174619A4 (en) 2020-11-06 2024-01-03 Samsung Electronics Co., Ltd. Electronic device for sensing introduction of moisture and operation method therefor

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107782741A (en) * 2017-10-26 2018-03-09 德清晨英电子科技有限公司 A kind of device that bubble is judged by light

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