CN104677315A - 硅片表面不平整度测量方法 - Google Patents
硅片表面不平整度测量方法 Download PDFInfo
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- CN104677315A CN104677315A CN201510105532.6A CN201510105532A CN104677315A CN 104677315 A CN104677315 A CN 104677315A CN 201510105532 A CN201510105532 A CN 201510105532A CN 104677315 A CN104677315 A CN 104677315A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 54
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 53
- 239000010703 silicon Substances 0.000 title claims abstract description 53
- 238000000034 method Methods 0.000 title abstract description 14
- 235000012431 wafers Nutrition 0.000 title abstract 7
- 230000003746 surface roughness Effects 0.000 title abstract 5
- 229910052751 metal Inorganic materials 0.000 claims abstract description 19
- 239000002184 metal Substances 0.000 claims abstract description 19
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 14
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 14
- 238000005102 attenuated total reflection Methods 0.000 claims description 24
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 18
- 239000011521 glass Substances 0.000 claims description 15
- 239000004411 aluminium Substances 0.000 claims description 13
- 238000002310 reflectometry Methods 0.000 claims description 10
- 230000005284 excitation Effects 0.000 claims description 9
- 238000012360 testing method Methods 0.000 claims description 9
- 238000009826 distribution Methods 0.000 claims description 7
- 238000005516 engineering process Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 6
- 239000004568 cement Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 1
- 238000005253 cladding Methods 0.000 abstract description 3
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 238000000053 physical method Methods 0.000 abstract description 2
- 238000010521 absorption reaction Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 238000005094 computer simulation Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
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CN201510105532.6A CN104677315B (zh) | 2015-03-05 | 2015-03-05 | 硅片表面不平整度测量方法 |
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CN201510105532.6A CN104677315B (zh) | 2015-03-05 | 2015-03-05 | 硅片表面不平整度测量方法 |
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CN104677315A true CN104677315A (zh) | 2015-06-03 |
CN104677315B CN104677315B (zh) | 2018-04-17 |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105300325A (zh) * | 2015-11-11 | 2016-02-03 | 海信集团有限公司 | 一种激光光源中荧光轮的平整度检测方法和装置 |
CN106403851A (zh) * | 2016-08-31 | 2017-02-15 | 上海华力微电子有限公司 | 一种检测光刻工艺曝光前晶圆背面水平度的方法及装置 |
CN107478165A (zh) * | 2017-08-23 | 2017-12-15 | 苏州鑫河镜业有限公司 | 一种镜片表面镀膜厚度均匀度测试装置 |
WO2018153282A1 (zh) * | 2017-02-24 | 2018-08-30 | 哈尔滨工业大学 | 基于金属银增强荧光的自由曲面测量装置及其测量方法 |
CN108807204A (zh) * | 2017-05-05 | 2018-11-13 | 上海新昇半导体科技有限公司 | 晶圆平坦度测量装置及晶圆平坦度测量*** |
CN109029742A (zh) * | 2018-07-20 | 2018-12-18 | 华中科技大学 | 一种涡旋激光的检测装置及方法 |
CN112578245A (zh) * | 2020-12-09 | 2021-03-30 | 广西电网有限责任公司电力科学研究院 | 基于光学技术的gis刀闸气室故障诊断的方法及装置 |
US12005545B2 (en) | 2020-11-17 | 2024-06-11 | Changxin Memory Technologies, Inc. | Fixing device and detection system |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5321264A (en) * | 1991-07-23 | 1994-06-14 | Shin-Etsu Handotai Co., Ltd. | Method for evaluating surface state of silicon wafer |
CN1396445A (zh) * | 2002-08-22 | 2003-02-12 | 上海交通大学 | 双面金属波导测量方法及其装置 |
CN103884298A (zh) * | 2014-03-20 | 2014-06-25 | 河海大学常州校区 | 基于导模的金属表面粗糙度测量***及方法 |
CN103969220A (zh) * | 2014-05-20 | 2014-08-06 | 复旦大学 | 一种检测uv胶水固化过程动态光学特性的方法 |
CN104359412A (zh) * | 2014-10-01 | 2015-02-18 | 上海光刻电子科技有限公司 | 光刻掩模版铬膜厚度测量方法 |
-
2015
- 2015-03-05 CN CN201510105532.6A patent/CN104677315B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5321264A (en) * | 1991-07-23 | 1994-06-14 | Shin-Etsu Handotai Co., Ltd. | Method for evaluating surface state of silicon wafer |
CN1396445A (zh) * | 2002-08-22 | 2003-02-12 | 上海交通大学 | 双面金属波导测量方法及其装置 |
CN103884298A (zh) * | 2014-03-20 | 2014-06-25 | 河海大学常州校区 | 基于导模的金属表面粗糙度测量***及方法 |
CN103969220A (zh) * | 2014-05-20 | 2014-08-06 | 复旦大学 | 一种检测uv胶水固化过程动态光学特性的方法 |
CN104359412A (zh) * | 2014-10-01 | 2015-02-18 | 上海光刻电子科技有限公司 | 光刻掩模版铬膜厚度测量方法 |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105300325A (zh) * | 2015-11-11 | 2016-02-03 | 海信集团有限公司 | 一种激光光源中荧光轮的平整度检测方法和装置 |
CN105300325B (zh) * | 2015-11-11 | 2018-05-29 | 海信集团有限公司 | 一种激光光源中荧光轮的平整度检测方法和装置 |
US10132751B2 (en) | 2015-11-11 | 2018-11-20 | Hisense Co., Ltd. | Method and device for detecting flatness of a fluorescent wheel in a laser light source |
CN106403851A (zh) * | 2016-08-31 | 2017-02-15 | 上海华力微电子有限公司 | 一种检测光刻工艺曝光前晶圆背面水平度的方法及装置 |
WO2018153282A1 (zh) * | 2017-02-24 | 2018-08-30 | 哈尔滨工业大学 | 基于金属银增强荧光的自由曲面测量装置及其测量方法 |
CN108807204A (zh) * | 2017-05-05 | 2018-11-13 | 上海新昇半导体科技有限公司 | 晶圆平坦度测量装置及晶圆平坦度测量*** |
CN108807204B (zh) * | 2017-05-05 | 2020-07-07 | 上海新昇半导体科技有限公司 | 晶圆平坦度测量装置及晶圆平坦度测量*** |
CN107478165A (zh) * | 2017-08-23 | 2017-12-15 | 苏州鑫河镜业有限公司 | 一种镜片表面镀膜厚度均匀度测试装置 |
CN109029742A (zh) * | 2018-07-20 | 2018-12-18 | 华中科技大学 | 一种涡旋激光的检测装置及方法 |
US12005545B2 (en) | 2020-11-17 | 2024-06-11 | Changxin Memory Technologies, Inc. | Fixing device and detection system |
CN112578245A (zh) * | 2020-12-09 | 2021-03-30 | 广西电网有限责任公司电力科学研究院 | 基于光学技术的gis刀闸气室故障诊断的方法及装置 |
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CN104677315B (zh) | 2018-04-17 |
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