CN104597715B - The pullable level(l)ing device of litho machine mating interface module - Google Patents
The pullable level(l)ing device of litho machine mating interface module Download PDFInfo
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- CN104597715B CN104597715B CN201310528876.9A CN201310528876A CN104597715B CN 104597715 B CN104597715 B CN 104597715B CN 201310528876 A CN201310528876 A CN 201310528876A CN 104597715 B CN104597715 B CN 104597715B
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Abstract
The invention belongs to semiconductor production field, specifically a kind of pullable level(l)ing device of litho machine mating interface module, litho machine mating interface module is arranged on foundation platform, and between coating developing machine and litho machine; Pullable level(l)ing device comprises rolling castor, web joint, leveling jackscrew and module welded plate, module welded plate is arranged on the bottom surface of described litho machine mating interface module, web joint is connected with module welded plate by leveling jackscrew, web joint is provided with rotatable rolling castor, and rolling castor drops on foundation platform; Litho machine mating interface module is adjusted to parallel with foundation platform by leveling jackscrew, and the position of web joint after the adjustment of litho machine mating interface module and between module welded plate is fixed.The present invention to any pull playback of litho machine mating interface module, can not need the level readjusting module, is convenient to safeguard, has saved maintenance time, time saving and energy saving.
Description
Technical field
The invention belongs to semiconductor production field, specifically a kind of pullable level(l)ing device of litho machine mating interface module.
Background technology
In semiconductor automation production run, after wafer gluing, need photo-etching machine exposal; Return after exposed on coating developing machine and develop, to obtain required figure.Wherein, have a litho machine mating interface module between coating developing machine and litho machine, this litho machine mating interface module plays the effect of transmitting wafer between coating developing machine and litho machine.The feature of litho machine mating interface module is pullable, coating developing machine and litho machine need to carry out to rebuild and periodic maintenance time, convenient operation.Litho machine mating interface module will adjust base angle slide block before pull in the past, and roller is landed, then pulled out litho machine mating interface module and safeguard; After completing maintenance, make litho machine mating interface module resets, must rise after level readjusted by ground glue and could use, its process is more loaded down with trivial details consuming time.
Summary of the invention
Need to carry out horizontal adjustment to solve litho machine mating interface module and cause the loaded down with trivial details problem consuming time of operating process before pull and before resetting, the object of the present invention is to provide a kind of pullable level(l)ing device of litho machine mating interface module.This level(l)ing device only needs Primary regulation can carry out pull or reset to litho machine mating interface module, without the need to adjusting in maintenance process afterwards again.
The object of the invention is to be achieved through the following technical solutions:
A pullable level(l)ing device for litho machine mating interface module, described litho machine mating interface module is arranged on foundation platform, and between coating developing machine and litho machine; Described pullable level(l)ing device comprises rolling castor, web joint, leveling jackscrew and module welded plate, wherein module welded plate is arranged on the bottom surface of described litho machine mating interface module, described web joint is connected with module welded plate by leveling jackscrew, web joint is provided with rotatable rolling castor, and described rolling castor drops on described foundation platform; Described litho machine mating interface module is adjusted to parallel with described foundation platform by leveling jackscrew, the position of described web joint after the adjustment of litho machine mating interface module and between module welded plate is fixed.
Wherein: the bottom frame corner of described litho machine mating interface module is separately installed with described pullable level(l)ing device; Every limit of described module welded plate is respectively equipped with the baffle plate preventing module welded plate and web joint from relatively rotating; The inside surface of described baffle plate has the groove at accommodating web joint edge; Leveling jackscrew between described web joint and module welded plate is three, distribution triangular in shape, and web joint is after the adjustment of litho machine mating interface module and fixed by set bolt between module welded plate; Described set bolt is three, distribution triangular in shape, these leg-of-mutton three summits with form leg-of-mutton three peaks cross by leveling jackscrew and arrange; The rotating direction of described rolling castor is parallel with the pull of litho machine mating interface module or reset direction.
Advantage of the present invention and good effect are:
1. the present invention makes litho machine mating interface module parallel with foundation platform by adjustment leveling jackscrew, only once need adjust installation can carry out pull reset to litho machine mating interface module, in the process of coating developing machine and litho machine, do not need the level readjusting litho machine mating interface module, be convenient to safeguard, decrease unnecessary job step and (as: extract the whereabouts castor work before litho machine mating interface module out, horizontal adjustment work etc. after litho machine mating interface module homing), effectively can save manpower, enhance productivity, reduce maintenance time, thus raising enterprise profit.
2. the present invention is provided with the baffle plate preventing module welded plate 5 and web joint from relatively rotating respectively on every limit of module welded plate, more effectively firm rolling castor.
3. leveling jackscrew of the present invention and set bolt rationally distributed, adjustment litho machine mating interface module of being more convenient for is parallel with foundation platform.
Accompanying drawing explanation
Fig. 1 is structural front view of the present invention;
Fig. 2 is perspective view of the present invention;
Fig. 3 is the in running order structural representation of the present invention;
Wherein: 1 is litho machine mating interface module, 2 is rolling castor, and 3 is web joint, and 4 is leveling jackscrew, and 5 is module welded plate, and 6 is set bolt, and 7 is foundation platform, and 8 is coating developing machine, and 9 is litho machine, and 10 is baffle plate.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
As shown in Figure 3, litho machine mating interface module 1 is arranged on foundation platform 7, and between coating developing machine 8 and litho machine 9.Pullable level(l)ing device of the present invention is separately installed with in the bottom frame corner of litho machine mating interface module 1.
As shown in Figure 1 and Figure 2, the pullable level(l)ing device of the present invention comprises rolling castor 2, web joint 3, leveling jackscrew 4, module welded plate 5 and set bolt 6, module welded plate 5 is welded with respectively in the corner of litho machine mating interface module 1 bottom frame, web joint 3 is connected with module welded plate 5 by leveling jackscrew 4, web joint 3 is provided with rotatable rolling castor 2, and the rotating direction of this rolling castor 2 is parallel with the pull of litho machine mating interface module 1 or reset direction; Rolling castor 2 drops on foundation platform 7, for supporting litho machine mating interface module 1.Web joint of the present invention 3 and module welded plate 5 are square, in the middle of four limits of module welded plate 5, form the baffle plate 10 preventing module welded plate 5 and web joint 3 from relatively rotating respectively to downward-extension, more effectively firm rolling castor 2; The inside surface of every block baffle plate 10 has the groove at edge, accommodating web joint 3 four limit.
Leveling jackscrew 4 between web joint 3 and module welded plate 5 is three, the centre being distributed in square connecting plate 3 and module welded plate 5 triangular in shape; Litho machine mating interface module 1 is adjusted to parallel with foundation platform 7 by leveling jackscrew 4, web joint 3 is fixed by set bolt 6 after litho machine mating interface module 1 adjusts and between module welded plate 5.Set bolt 6 is also three, distribution triangular in shape, these leg-of-mutton three summits with form leg-of-mutton three peaks cross by leveling jackscrew 4 and arrange, namely the leg-of-mutton summit formed by three set bolts 6 and by leveling jackscrew 4 formed leg-of-mutton two summits point-blank and interval arrange, two other summit leg-of-mutton formed by three set bolts 6 and by leveling jackscrew 4 formed a leg-of-mutton summit point-blank and interval arrange, these two straight lines are parallel to each other.
Principle of work of the present invention is:
Leveling jackscrew 4 on adjustment litho machine mating interface module 1 bottom frame four pin in each level(l)ing device, makes litho machine mating interface module 1 parallel with foundation platform 7; Then fix between web joint 3 and module welded plate 5 with set bolt 6.Rolling castor 2 in each level(l)ing device drops on foundation platform 7, supports litho machine mating interface module 1.Once adjust installation and can carry out pull reset, without the need to adjusting again in maintenance process afterwards to litho machine mating interface module 1.
Claims (6)
1. a pullable level(l)ing device for litho machine mating interface module, described litho machine mating interface module is arranged on foundation platform, and between coating developing machine and litho machine; It is characterized in that: described pullable level(l)ing device comprises rolling castor (2), web joint (3), leveling jackscrew (4) and module welded plate (5), wherein module welded plate (5) is arranged on the bottom surface of described litho machine mating interface module (1), described web joint (3) is connected with module welded plate (5) by leveling jackscrew (4), web joint (3) is provided with rotatable rolling castor (2), and described rolling castor (2) is dropped on described foundation platform (7); Described litho machine mating interface module (1) is adjusted to parallel with described foundation platform (7) by leveling jackscrew (4), the position of described web joint (3) after litho machine mating interface module (1) adjustment and between module welded plate (5) is fixed;
The bottom frame corner of described litho machine mating interface module (1) is separately installed with described pullable level(l)ing device.
2. by the pullable level(l)ing device of litho machine mating interface module described in claim 1, it is characterized in that: every limit of described module welded plate (5) is respectively equipped with the baffle plate (10) preventing module welded plate (5) and web joint (3) from relatively rotating.
3., by the pullable level(l)ing device of litho machine mating interface module described in claim 2, it is characterized in that: the inside surface of described baffle plate (10) has the groove at accommodating web joint (3) edge.
4. by the pullable level(l)ing device of litho machine mating interface module described in claim 1, it is characterized in that: the leveling jackscrew (4) between described web joint (3) and module welded plate (5) is three, distribution triangular in shape, web joint (3) is fixed by set bolt (6) after litho machine mating interface module (1) adjustment and between module welded plate (5).
5. by the pullable level(l)ing device of litho machine mating interface module described in claim 4, it is characterized in that: described set bolt (6) is three, distribution triangular in shape, these leg-of-mutton three summits with form leg-of-mutton three peaks cross by leveling jackscrew (4) and arrange.
6., by the pullable level(l)ing device of litho machine mating interface module described in claim 1, it is characterized in that: the rotating direction of described rolling castor (2) is parallel with the pull of litho machine mating interface module (1) or reset direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310528876.9A CN104597715B (en) | 2013-10-30 | 2013-10-30 | The pullable level(l)ing device of litho machine mating interface module |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310528876.9A CN104597715B (en) | 2013-10-30 | 2013-10-30 | The pullable level(l)ing device of litho machine mating interface module |
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| Publication Number | Publication Date |
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| CN104597715A CN104597715A (en) | 2015-05-06 |
| CN104597715B true CN104597715B (en) | 2016-04-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310528876.9A Active CN104597715B (en) | 2013-10-30 | 2013-10-30 | The pullable level(l)ing device of litho machine mating interface module |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6377812B1 (en) * | 2017-06-23 | 2018-08-22 | レノボ・シンガポール・プライベート・リミテッド | Docking device and electronic device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102043351A (en) * | 2009-10-12 | 2011-05-04 | 上海微电子装备有限公司 | Leveling and focusing mechanism and mask platform with same |
| CN103295943A (en) * | 2012-02-27 | 2013-09-11 | 日新离子机器株式会社 | Base plate transmitting device and semiconductor manufacture device using same |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5741926B2 (en) * | 2011-05-13 | 2015-07-01 | 株式会社ニコン | Object exchange system, exposure apparatus, flat panel display production method, device production method, and object exchange method |
| JP2013210432A (en) * | 2012-03-30 | 2013-10-10 | Topcon Corp | Workpiece holding device of carrying arm, workpiece fixing device of work stage, work installation device, and projection exposure device |
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2013
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102043351A (en) * | 2009-10-12 | 2011-05-04 | 上海微电子装备有限公司 | Leveling and focusing mechanism and mask platform with same |
| CN103295943A (en) * | 2012-02-27 | 2013-09-11 | 日新离子机器株式会社 | Base plate transmitting device and semiconductor manufacture device using same |
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| CN104597715A (en) | 2015-05-06 |
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Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |