CN104441996B - The manufacture method of liquid ink nozzle, liquid ink nozzle and printing device - Google Patents
The manufacture method of liquid ink nozzle, liquid ink nozzle and printing device Download PDFInfo
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- CN104441996B CN104441996B CN201310432877.3A CN201310432877A CN104441996B CN 104441996 B CN104441996 B CN 104441996B CN 201310432877 A CN201310432877 A CN 201310432877A CN 104441996 B CN104441996 B CN 104441996B
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Abstract
The invention provides a kind of manufacture method of liquid ink nozzle, liquid ink nozzle and printing device, wherein method comprises: mineralization pressure generation part in substrate; Mineralization pressure chamber and public chamber on the first surface of the substrate; In described pressure chamber and public chamber, the surface away from described substrate applies the first resin glue, form spray orifice glue-line; Carry out gradation exposure process to described spray orifice glue-line, form the spray orifice of taper with position corresponding with described pressure chamber on described spray orifice glue-line, along the direction away from described pressure chamber, the cross-sectional area of described spray orifice reduces gradually.The manufacture method of liquid ink nozzle provided by the invention, liquid ink nozzle and printing device can solve the poor problem of existing liquid ink nozzle accuracy of spray, to improve print speed and printing precision, the problem that the print quality adopting adhesive to cause reduces can also be avoided, and the mechanical strength of pressure chamber can be improved.
Description
Technical field
The present invention relates to printer manufacturing technology, particularly relate to a kind of manufacture method of liquid ink nozzle, liquid ink nozzle and printing device.
Background technology
Printer is a kind of conventional office equipment, and along with the progress gradually of printer technology, document processing speeds and print speed more and more come into one's own.In prior art, the liquid ink jet header structure of printer generally includes substrate, is bonded in the jet orifice plate on substrate first surface and is arranged on oscillating plate and the piezoelectric element of second surface relative with first surface in substrate.The processing method of liquid ink nozzle is generally: on the second surface of substrate, form oscillating plate and piezoelectric element, etch process is adopted to form multiple pressure chamber corresponding with piezoelectric element position on the first surface, and the public chamber corresponding with ink supply aperture, this pressure chamber and public chamber are used for storage of liquids, last bonding jet orifice plate.
But because the spray orifice in jet orifice plate in existing liquid ink nozzle is formed as cylindrical, the drop diameter of its ejection is comparatively large, and its accuracy of spray is poor, and easily occurring can affect print speed and printing precision in the non-predetermined position that ink droplet falls on the print medium.And, for existing liquid ink nozzle, in order to improve print resolution, need the quantity increasing pressure chamber, etching pressure chamber in the silicon base of identical surface areas, must reduce the thickness of pressure chamber locular wall, and the mechanical strength of substrate therefore can be caused to decline, in process, there will be substrate breakage and reduce yield rate, increasing manufacturing cost.In addition, the jet orifice plate of existing liquid ink nozzle adopts adhesive to be bonded in pressure chamber surface, very high to the requirement of technique for sticking, if once there be adhesive to flow in pressure chamber, can affect print quality.
Summary of the invention
The invention provides a kind of manufacture method of liquid ink nozzle, liquid ink nozzle and printing device, for solving the poor problem of existing liquid ink nozzle accuracy of spray, to improve print speed and printing precision.The problem that the print quality adopting adhesive to cause reduces can also be avoided, and the mechanical strength of pressure chamber can be improved.
The embodiment of the present invention provides a kind of manufacture method of liquid ink nozzle, comprising:
Mineralization pressure generation part in substrate;
Mineralization pressure chamber and public chamber on the first surface of the substrate;
In described pressure chamber and public chamber, the surface away from described substrate applies the first resin glue, form spray orifice glue-line;
Carry out gradation exposure process to described spray orifice glue-line, form the spray orifice of taper with position corresponding with described pressure chamber on described spray orifice glue-line, along the direction away from described pressure chamber, the cross-sectional area of described spray orifice reduces gradually.
The embodiment of the present invention also provides a kind of liquid ink nozzle, and described liquid ink nozzle adopts the manufacture method of liquid ink nozzle as above to make.
The embodiment of the present invention also provides a kind of printing device, comprises liquid ink nozzle as above.
The embodiment of the present invention, by providing a kind of technical scheme forming taper spray orifice, can improve the precision of injection, makes ink droplet accurately drip precalculated position on the print medium, and then improves print speed and printing precision.
And the technical scheme mineralization pressure generation part in substrate successively that the embodiment of the present invention adopts, the public chamber of mineralization pressure chamber and trapezoidal shape in substrate, wherein, the public chamber of trapezoidal shape is less than the surface area away from substrate near the surface area of substrate, form jet orifice plate and ink supply aperture respectively afterwards, can solve existing liquid ink nozzle easily causes liquid ink to be back to the problem of ink supply aperture from public chamber, improves print speed.
The technical scheme that the embodiment of the present invention provides can form integrated ink gun, and adopt positive photosensitive resin mineralization pressure chamber wall, according to the quantity needing increase pressure chamber of print resolution, and can not produce the problem of pressure chamber locular wall and the decline of substrate mechanical strength.Integrated structure it also avoid use adhesive and affects the problem of printing effect.
Accompanying drawing explanation
The flow chart of the manufacture method of the liquid ink nozzle that Fig. 1 provides for the embodiment of the present invention one;
The flow chart of pressure generating part formation method in the manufacture method of the liquid ink nozzle that Fig. 2 provides for the embodiment of the present invention one;
In the manufacture method of the liquid ink nozzle that Fig. 3 A provides for the embodiment of the present invention one, in substrate, etching forms the structural representation of groove;
In substrate, the structural representation of piezoelectric element is formed in the manufacture method of the liquid ink nozzle that Fig. 3 B provides for the embodiment of the present invention one;
The structural representation of oscillating plate is formed on the piezoelectric element in the manufacture method of the liquid ink nozzle that Fig. 3 C provides for the embodiment of the present invention one;
In substrate, the structural representation of the first glue-line is formed in the manufacture method of the liquid ink nozzle that Fig. 4 A provides for the embodiment of the present invention one;
In the manufacture method of the liquid ink nozzle that Fig. 4 B provides for the embodiment of the present invention one, the first area of the first glue-line is carried out to the structural representation of exposure-processed;
In the manufacture method of the liquid ink nozzle that Fig. 4 C provides for the embodiment of the present invention one, the structural representation that development treatment forms public chamber is carried out to the first glue-line;
In the manufacture method of the liquid ink nozzle that Fig. 4 D provides for the embodiment of the present invention one, the second area of the first glue-line is carried out to the structural representation of exposure-processed;
In the manufacture method of the liquid ink nozzle that Fig. 4 E provides for the embodiment of the present invention one, first glue-line is carried out to the structural representation of development treatment mineralization pressure chamber;
The manufacture method of the liquid ink nozzle that Fig. 4 F provides for the embodiment of the present invention one forms the structural representation of spray orifice;
The manufacture method of the liquid ink nozzle that Fig. 5 provides for the embodiment of the present invention one forms the structural representation of ink supply aperture;
The manufacture method of the liquid ink nozzle that Fig. 6 provides for the embodiment of the present invention one forms the structural representation of liquid ink nozzle;
The manufacture method of the liquid ink nozzle that Fig. 7 provides for the embodiment of the present invention one forms the structural representation of cover plate;
The manufacture method of the liquid ink nozzle that Fig. 8 provides for the embodiment of the present invention one forms the structural representation one of stepped cone spray orifice;
The manufacture method of the liquid ink nozzle that Fig. 9 provides for the embodiment of the present invention one forms the structural representation two of stepped cone spray orifice;
Form the structural representation of oscillating plate at substrate surface in the manufacture method of the liquid ink nozzle that Figure 10 provides for the embodiment of the present invention two;
Form the structural representation of piezoelectric element on oscillating plate surface in the manufacture method of the liquid ink nozzle that Figure 11 provides for the embodiment of the present invention two;
The structural representation of the liquid ink nozzle of the manufacture method formation of the liquid ink nozzle that Figure 12 provides for the embodiment of the present invention two;
In substrate, the structural representation of thin film resistive layer is formed in the manufacture method of the liquid ink nozzle that Figure 13 provides for the embodiment of the present invention three;
The manufacture method of the liquid ink nozzle that Figure 14 provides for the embodiment of the present invention three forms the structural representation of liquid ink nozzle.
Reference numeral:
1-substrate; 2-groove; 3-piezoelectric element;
4-oscillating plate; 5-first glue-line; 6-first mask;
The public chamber of 7-; 8-common cavity locular wall; 9-second mask;
10-pressure chamber; 11-pressure chamber locular wall; 12-spray orifice glue-line;
13-the 3rd mask; 14-spray orifice; 15-ink supply aperture;
16-cover plate; 17-oscillation space; 18-gap;
19-thin film resistive layer.
Detailed description of the invention
Embodiment one
The flow chart of the manufacture method of the liquid ink nozzle that Fig. 1 provides for the embodiment of the present invention one.As shown in Figure 1, the manufacture method of this liquid ink nozzle can comprise:
Step 10, in substrate mineralization pressure generation part.
Step 20, on the first surface of substrate mineralization pressure chamber and public chamber.
Step 30, apply the first resin glue in pressure chamber and public chamber away from the surface of substrate, form spray orifice glue-line.
Step 40, gradation exposure process is carried out to spray orifice glue-line, with on spray orifice glue-line with pressure chamber for position form the spray orifice of taper, along the direction away from pressure chamber, the cross-sectional area of spray orifice reduces gradually.
Above-mentioned substrate can be silicon base or substrate of glass, and the present embodiment adopts silicon base.The effect of pressure generating part is that the ink ordered about in pressure chamber sprays from spray orifice, and print on the print medium, can be the device of various ways, such as piezoelectric element, film resistor etc.The present embodiment illustrates the formation method of pressure generating part for piezoelectric element.
Concrete, can refer to Fig. 2, the flow chart of pressure generating part formation method in the manufacture method of the liquid ink nozzle that Fig. 2 provides for the embodiment of the present invention one.Mineralization pressure generation part in substrate, can comprise the steps:
Step 101, on the first surface of substrate etching formed groove.
As shown in Figure 3A, in the manufacture method of the liquid ink nozzle that Fig. 3 A provides for the embodiment of the present invention one, in substrate, etching forms the structural representation of groove, specifically can form groove 2 by the mode of dry etching or wet etching on the first surface of substrate 1, from the viewing angles of Fig. 3, the upper surface of first surface and substrate 1, form groove 2 in the below of first surface, this groove 2 is for holding piezoelectric element, and therefore the size of groove 2 can set according to the size of piezoelectric element.
Step 102, in groove, form piezoelectric element, comprise and adopt sputtering method to form lower electrode layer, piezoelectric body layer and upper electrode layer successively.
As shown in Figure 3 B, in substrate, form the structural representation of piezoelectric element in the manufacture method of liquid ink nozzle that Fig. 3 B provides for the embodiment of the present invention one.Adopt sputtering method to form lower electrode layer, piezoelectric body layer and upper electrode layer successively, form piezoelectric element 3.Wherein, lower electrode layer can be titanium (Ti) layer, platinum (Pt) layer or for multiple titanium layer superimposed layer; Piezoelectric body layer can be lead zirconate titanate (ZPT) layer; Upper electrode layer can be platinum (Pt) layer or gold (Au) layer.
Step 103, upper electrode layer surface deposition formed oscillating plate.
As shown in Figure 3 C, the structural representation of oscillating plate is formed in the manufacture method of liquid ink nozzle that Fig. 3 C provides for the embodiment of the present invention one on the piezoelectric element.Low Pressure Chemical Vapor Deposition or plasma enhanced chemical vapor deposition method specifically can be adopted to form oscillating plate 4, and the material of this oscillating plate 4 can be SiO
2, Si
3n
4or SiO
2-Si
3n
4lamination.When piezoelectric element 3 produces deformation, oscillating plate 4 produces vibration thereupon, and the ink in squeeze pressure chamber sprays from spray orifice.
Public chamber sidewall due to existing liquid ink nozzle is perpendicular to substrate surface, is therefore unfavorable for the filling of liquid ink, when ink gun produces vibration, easily causes liquid ink be back to ink supply aperture and affect print speed.
In order to solve the problems of the technologies described above, for the implementation of above-mentioned steps 20, the present embodiment proposes a kind of preferred version forming the public chamber of trapezoidal shape, can with reference to following steps:
The first surface of substrate applies the second resin glue, forms the first glue-line.
As shown in Figure 4 A, in substrate, form the structural representation of the first glue-line in the manufacture method of liquid ink nozzle that Fig. 4 A provides for the embodiment of the present invention one.This second resin glue can be positive photosensitive resin or negative photosensitive resin, and the characteristic of positive photosensitive resin for there is sex change by illumination, thus is soluble in potassium hydroxide KOH equal solvent, and the characteristic of negative photosensitive resin is for solidifying by illumination.
The present embodiment adopts positive photosensitive resin to be coated in substrate, and forms public chamber and the pressure chamber of trapezoidal shape, specifically can refer to following steps:
First, the first surface of substrate 1 applies positive photosensitive resin, specifically can adopt polymetylmethacrylate, the pressure chamber locular wall that this material is formed can be very thin, but its mechanical strength is higher, is convenient to the resolution ratio improving liquid ink nozzle.Be spin-coated on by polymetylmethacrylate on the first surface of substrate 1, form the first glue-line 5, the size of this first glue-line 5 can according to the volume settings of public chamber and pressure chamber.
Secondly, exposure-processed is carried out, to determine the size and shape of pressure chamber and public chamber to the first glue-line 5.
Then, development treatment is carried out to the first glue-line 5, be exposed in the first glue-line to remove and part, mineralization pressure chamber and the public chamber of sex change occur.
The method of above-mentioned exposure and development can adopt various ways, the first forms the first glue-line 5 on the surface of substrate 1, adopt different masks to carry out exposure-processed to region corresponding to public chamber and pressure chamber will be formed in the first glue-line 5 simultaneously, then adopt developer solution to develop.It two is according to sequencing, form public chamber and pressure chamber successively, but the order forming public chamber and pressure chamber is interchangeable.The present embodiment is first to form public chamber, then mineralization pressure chamber is example, can refer to following detailed description:
Gradation exposure process is carried out to the first area in the first glue-line, forms the public chamber of trapezoidal shape, in the public chamber of this trapezoidal shape, be less than the surface area away from substrate near the surface area of substrate.
As shown in Figure 4 B, the structural representation of exposure-processed is provided the first area of the first glue-line in the manufacture method of liquid ink nozzle that provides for the embodiment of the present invention one of Fig. 4 B.In above-mentioned steps 30, the process of first area being carried out to gradation exposure process is specifically as follows:
The first mask 6 pairs of first areas are adopted to carry out exposure-processed.Wherein, the first mask 6 is grayscale mask, and the light transmittance of this first mask 6 reduces from centre gradually to both sides, to make the part generation sex change by illumination in first area.Concrete, correspond to the intensity of illumination that the part in the middle of the first mask 6 is subject in first area comparatively strong, and the intensity of illumination be subject on the first direction, mask 6 both sides weakens gradually, to make to form reverse trapezoid shape by the region of illumination sex change in first area.
Then, adopt the first developer solution to carry out development treatment to the first glue-line, remove the part by illumination sex change, form the public chamber of trapezoidal shape.
As shown in Figure 4 C, in the manufacture method of liquid ink nozzle that Fig. 4 C provides for the embodiment of the present invention one, the structural representation that development treatment forms public chamber is carried out to the first glue-line.Potassium hydroxide (KOH) can be adopted to carry out development treatment as the first developer solution to the first glue-line 5 after exposure-processed, wherein dissolved by light-struck part, form trapezoidal public chamber 7, the part be not irradiated by light remains and forms common cavity locular wall 8.The public chamber formed is less than the surface area away from substrate near the surface area of substrate, and be also namely less than the volume away from basal region near the volume of basal region, the phenomenon that can reduce liquid ink backflow ink supply aperture occurs.
After the public chamber forming trapezoidal shape, can continue to carry out exposure-processed, mineralization pressure chamber to the second area in described first glue-line.
First, adopt the second mask 9 pairs of second areas to carry out exposure-processed, the second mask 9 can be common mask, the complete printing opacity in centre of the second mask 9, and both sides are light tight, to make the part generation sex change by illumination in first area.
As shown in Figure 4 D, the structural representation of exposure-processed is provided the second area of the first glue-line in the manufacture method of liquid ink nozzle that provides for the embodiment of the present invention one of Fig. 4 D.Exposure-processed mode can adopt mode conventional in prior art.Second mask 9 is common mask conventional in prior art, and the light transmittance of wherein corresponding with pressure chamber locular wall two side portions is lower, and approximate light tight, the light transmittance of the mid portion corresponding with pressure chamber is higher, by most of light.The mid portion of second area, there is sex change by illumination in the first glue-line, the part of its sex change can form the pressure chamber of rectangle.
Then, adopt the first developer solution to carry out development treatment to described first glue-line, remove the part by illumination sex change, mineralization pressure chamber.
As shown in Figure 4 E, the structural representation of development treatment mineralization pressure chamber is provided the first glue-line in the manufacture method of liquid ink nozzle that provides for the embodiment of the present invention one of Fig. 4 E.Adopt potassium hydroxide (KOH) as the first developer solution, development treatment is carried out to the first glue-line 5 after exposure-processed, wherein light irradiate and the part of sex change is dissolved, mineralization pressure chamber 10, the part be not irradiated by light remains mineralization pressure chamber wall 11.
The step of the public chamber of above-mentioned formation and pressure chamber can be exchanged, also can first mineralization pressure chamber, then forms public chamber.
Jet orifice plate in view of existing liquid ink nozzle is the surface utilizing adhesive to be bonded in pressure chamber, very high to the requirement of bonding process.Once adhesive flows in pressure chamber, then print quality can be affected.Therefore, on the basis of technique scheme, after the public chamber of formation and pressure chamber, above-mentioned steps 30 and step 40 can be performed, to form as one structure by jet orifice plate and public chamber and pressure chamber, solve adhesive in bonding process and enter pressure chamber and affect the problem of print quality.
Above-mentioned first resin glue can be negative photosensitive resin, for above-mentioned steps 30, and specifically can in the following way:
Surface away from substrate 1 of the public chamber 7 of pressure chamber 10 and trapezoidal shape applies negative photosensitive resin, forms spray orifice glue-line 12.The material of negative photosensitive resin can be SU8, and its characteristic is solidified after being subject to illumination.
As illustrated in figure 4f, the manufacture method of liquid ink nozzle that Fig. 4 F provides for the embodiment of the present invention one forms the structural representation of spray orifice.Above-mentioned steps 40 can realize in the following way:
Adopt the 3rd mask 13 pairs of spray orifice glue-lines 12 to carry out exposure-processed, to make spray orifice wall solidify, the 3rd mask 13 is grayscale mask, and the light transmittance of the 3rd mask 13 increases from centre gradually to both sides.Concrete, at the position printing opacity that spray orifice wall is corresponding, be gradual change form at the light transmittance of spray orifice, lower at the light transmittance at orifice center axle place, approximate light tight, increase light transmittance from central shaft gradually to surrounding.
Adopt the second developer solution to carry out development treatment to spray orifice glue-line 12, to remove part uncured in spray orifice glue-line 12, form the spray orifice of taper.Concrete, 1-methyl ether acetic acid propylene glycol ester is adopted to carry out development operation as the second developer solution, then in spray orifice glue-line 12 by partially cured formation spray orifice wall that large-area light ray irradiates, and be subject to the impact of the 3rd mask 13 light transmittance, the part not being subject to illumination forms the spray orifice of taper, also namely defines the jet orifice plate with taper spray orifice.The benefit of taper spray orifice is the precision that can improve injection, makes ink droplet accurately drip precalculated position on the print medium, and then improves print speed and printing precision.
The manufacture method of the liquid ink nozzle that Fig. 5 provides for the embodiment of the present invention one forms the structural representation of ink supply aperture.As shown in Figure 5, ink supply aperture is arranged on the below of substrate 1 by the present embodiment.
Position corresponding with public chamber on second surface relative with first surface in the substrate forms penetrating ink supply aperture.
KOH or TMAH TMAH specifically can be adopted to be etched on the base 1 by etching solution wet method, form ink supply aperture 15, through with public chamber, to be flowed in public chamber by the ink of ink supply aperture 15, and the liquid entered in public chamber is not easy to be back to ink supply aperture.
The step of above-mentioned formation jet orifice plate can be exchanged with the order of the step forming ink supply aperture, namely first can form jet orifice plate, rear formation ink supply aperture, or first form ink supply aperture, in formation jet orifice plate.
Adopt technique scheme can obtain by public chamber, multiple pressure chamber and the integrated structure of multiple spray orifice, as shown in Figure 6, the manufacture method of the liquid ink nozzle that Fig. 6 provides for the embodiment of the present invention one forms the structural representation of liquid ink nozzle.Fig. 6 is the top view of Fig. 5, and multiple pressure chamber is separated by pressure chamber locular wall, and public chamber is trapezoidal, and runs through the right side of each pressure chamber.
The manufacture method of the liquid ink nozzle that Fig. 7 provides for the embodiment of the present invention one forms the structural representation of cover plate, and as shown in Figure 7, finally bond cover plate 16 on the second surface of substrate 1, and on cover plate 16, etching has the through hole be communicated with ink supply aperture 15, for filling ink.Or also can adopt spin coating resin glue, adopt the mode of exposure imaging to form the cover plate 16 of integrative-structure.
The present embodiment passes through mineralization pressure generation part in substrate successively, the public chamber of mineralization pressure chamber and trapezoidal shape in substrate, wherein, the public chamber of trapezoidal shape is less than the surface area away from substrate near the surface area of substrate, form jet orifice plate and ink supply aperture respectively afterwards, can solve existing liquid ink nozzle easily causes liquid ink to be back to ink supply aperture from public chamber, improves print speed.
Technique scheme can form integrated ink gun, and adopts positive photosensitive resin mineralization pressure chamber wall, according to the quantity needing increase pressure chamber of print resolution, and can not produce the problem of pressure chamber locular wall and the decline of substrate mechanical strength.Integrated structure it also avoid use adhesive and affects the problem of printing effect.
In addition, additionally provide a kind of technical scheme forming taper spray orifice in technique scheme, the precision of injection can be improved, make ink droplet accurately drip precalculated position on the print medium, and then improve print speed and printing precision.
On the basis of technique scheme, in order to optimize the jeting effect of ink, one circle activity space can be set around piezoelectric element, such as: before formation cover plate, position corresponding with pressure chamber 10 on the second surface of substrate 1 forms the oscillation space 17 of piezoelectric element, to provide the space needed for piezoelectric element 3 vibration deformation.KOH or TMAH etching solution wet method specifically can be adopted to etch on the base 1, form oscillation space 17.
Gap 18 can also be formed, to provide the space needed for piezoelectric element 3 vibration deformation in the etching of the both sides of piezoelectric element 3.Specifically after formation piezoelectric element space 17, dry etching can be adopted, forms gap 18, to ensure that piezoelectric element 3 can not be subject to the constraint of substrate 1 when vibrating.
On the basis of technique scheme, in order to improve the precision that ink sprays further, spray orifice can also be set to the pyramidal structure of layering, as shown in Figure 8 and Figure 9, the manufacture method of the liquid ink nozzle that the structural representation one, Fig. 9 that the manufacture method of the liquid ink nozzle that Fig. 8 provides for the embodiment of the present invention one forms stepped cone spray orifice provides for the embodiment of the present invention one forms the structural representation two of stepped cone spray orifice.Taper spray orifice can be divided into two-layer, two-layer circular cone internal diameter is different, taper spray orifice shown in Fig. 8 is by the circular cone compared with large diameter rapidly excessively to the circular cone of less internal diameter, and the taper spray orifice shown in Fig. 9 is gently excessively to the circular cone of less internal diameter by the circular cone compared with large diameter.Specifically can be adopted the grayscale mask of negative photosensitive resin and corresponding light transmittance by technical staff respectively, through exposure imaging process implementation, spray ink droplet while fast accurate can be realized.
Embodiment two
The present embodiment is on the basis of above-described embodiment, provides the method for another kind of mineralization pressure generation part, specifically can comprise:
On the first surface of substrate 1, deposition forms oscillating plate 4.
Low Pressure Chemical Vapor Deposition or plasma enhanced chemical vapor deposition method specifically can be adopted to be formed, and the material of oscillating plate 4 can be SiO
2, Si
3n
4or SiO
2-Si
3n
4lamination.This step can refer to Figure 10, forms the structural representation of oscillating plate in the manufacture method of the liquid ink nozzle that Figure 10 provides for the embodiment of the present invention two at substrate surface.
Piezoelectric element 3 is formed away from the surface of substrate 1 in oscillating plate 4.
Sputtering method specifically can be adopted to form lower electrode layer, adopt sol-gal process to form piezoelectric body layer, adopt sputtering method to form upper electrode layer, be positioned at pressure chamber 10 to make pressure generating part.Wherein, lower electrode layer can be titanium (Ti) layer, platinum (Pt) layer or for multiple titanium layer superimposed layer; Piezoelectric body layer can be lead zirconate titanate (ZPT) layer; Upper electrode layer can be platinum (Pt) layer or gold (Au) layer.This step can refer to Figure 11, forms the structural representation of piezoelectric element in the manufacture method of the liquid ink nozzle that Figure 11 provides for the embodiment of the present invention two on oscillating plate surface.
Formation method for other parts in liquid ink nozzle can refer to the technical scheme that above-described embodiment provides, and repeats no more herein.The liquid ink jet header structure formed can refer to Figure 12, the structural representation of the liquid ink nozzle of the manufacture method formation of the liquid ink nozzle that Figure 12 provides for the embodiment of the present invention two.
Embodiment three
The present embodiment is on the basis of above-described embodiment, provides the method for another mineralization pressure generation part, specifically comprises:
On the first surface of substrate 1, deposition forms thin film resistive layer 19.
Specifically can deposit on the base 1 and form thin film resistive layer 19, the material of this thin film resistive layer 19 can be the one in tantalum aluminium alloy, nickel-cadmium, tungsten silicon nitride and titanium nitride.Can refer to Figure 13, in substrate, in the manufacture method of the liquid ink nozzle that Figure 13 provides for the embodiment of the present invention three, form the structural representation of thin film resistive layer.
Formation method for other parts in liquid ink nozzle can refer to the technical scheme that above-described embodiment provides, and repeats no more herein.The liquid ink jet header structure formed can refer to Figure 14, and the manufacture method of the liquid ink nozzle that Figure 14 provides for the embodiment of the present invention three forms the structural representation of liquid ink nozzle.
The ink jet process of employing thin film resistive layer 19 is: liquid ink enters public chamber 7 by ink supply aperture 15.Thin film resistive layer 19 is after applying pulse signal, and with the heating rate ink of 1000 DEG C/μ s, when the temperature of ink arrives about 340 DEG C, the volatile components in ink gasifies and forms bubble, and the ink droplet being positioned at spray orifice 14 place is extruded spray orifice 14 by bubble.Be reversible owing to forming the process of bubble, after removing the pulse signal to thin film resistive layer 19, bubble instantaneous cooling and vanishing, when vanishing, the strength of generation impels ink droplet to spray completely from spray orifice 14.
Further embodiment of this invention provides a kind of liquid ink nozzle, and this liquid ink nozzle adopts the method as above described in any embodiment to make.
Further embodiment of this invention provides a kind of printing device, and this printing device comprises the liquid ink nozzle that embodiment four provides.
Technique scheme passes through mineralization pressure generation part in substrate successively, the public chamber of mineralization pressure chamber and trapezoidal shape in substrate, wherein, the public chamber of trapezoidal shape is less than the surface area away from substrate near the surface area of substrate, form jet orifice plate and ink supply aperture respectively afterwards, can solve existing liquid ink nozzle easily causes liquid ink to be back to ink supply aperture from public chamber, improves print speed.
Last it is noted that above each embodiment is only in order to illustrate technical scheme of the present invention, be not intended to limit; Although with reference to foregoing embodiments to invention has been detailed description, those of ordinary skill in the art is to be understood that: it still can be modified to the technical scheme described in foregoing embodiments, or carries out equivalent replacement to wherein some or all of technical characteristic; And these amendments or replacement, do not make the essence of appropriate technical solution depart from the scope of various embodiments of the present invention technical scheme.
Claims (11)
1. a manufacture method for liquid ink nozzle, is characterized in that, comprising:
Mineralization pressure generation part in substrate;
Mineralization pressure chamber and trapezoidal public chamber on the first surface of the substrate, described trapezoidal public chamber is less than the surface area away from substrate near the surface area of substrate;
In described pressure chamber and public chamber, the surface away from described substrate applies the first resin glue, form spray orifice glue-line; Described first resin glue is negative photosensitive resin;
Carry out gradation exposure process to described spray orifice glue-line, form the spray orifice of taper with position corresponding with described pressure chamber on described spray orifice glue-line, along the direction away from described pressure chamber, the cross-sectional area of described spray orifice reduces gradually;
Carry out gradation exposure process to described spray orifice glue-line to comprise:
Adopt the 3rd mask to carry out exposure-processed to described spray orifice glue-line, described 3rd mask is grayscale mask, and the light transmittance of described 3rd mask increases from centre gradually to both sides, solidifies to make spray orifice wall;
Development treatment is carried out to described spray orifice glue-line, to remove part uncured in described spray orifice glue-line, forms the spray orifice of taper.
2. the manufacture method of liquid ink nozzle according to claim 1, is characterized in that, on the first surface of the substrate mineralization pressure chamber and public chamber, comprising:
Apply the second resin glue on the first surface of the substrate, form the first glue-line;
Adopt the first area of the first mask to described first glue-line to carry out exposure-processed, form public chamber;
The second area of the second mask to described first glue-line is adopted to carry out exposure-processed, mineralization pressure chamber.
3. the manufacture method of liquid ink nozzle according to claim 2, is characterized in that, mineralization pressure generation part in substrate, comprising:
Etching forms groove on the substrate;
In described groove, form piezoelectric element, comprise and adopt sputtering method to form lower electrode layer, piezoelectric body layer and upper electrode layer successively;
Oscillating plate is formed on the surface of described upper electrode layer.
4. the manufacture method of liquid ink nozzle according to claim 2, is characterized in that, mineralization pressure generation part in substrate, comprising:
Deposition forms oscillating plate on the first surface of the substrate;
In described oscillating plate, form piezoelectric element away from the surface of described substrate, comprise and adopt sputtering method to form lower electrode layer, sol-gal process forms piezoelectric body layer, and sputtering method forms upper electrode layer, is positioned at described pressure chamber to make described pressure generating part.
5. the manufacture method of liquid ink nozzle according to claim 2, is characterized in that, mineralization pressure generation part in substrate, comprising:
Deposition forms thin film resistive layer on the first surface of the substrate.
6. the manufacture method of liquid ink nozzle according to claim 2, is characterized in that, also comprises:
On second surface relative with described first surface in described substrate, the position corresponding with described public chamber forms penetrating ink supply aperture.
7. the manufacture method of liquid ink nozzle according to claim 3, is characterized in that, also comprises:
Position corresponding with described pressure chamber on second surface relative with described first surface in described substrate forms piezoelectric element space, to provide the space needed for the distortion of described piezoelectric element.
8. the manufacture method of liquid ink nozzle according to claim 7, is characterized in that, also comprises:
Gap is formed, to provide the space needed for the distortion of described piezoelectric element in the etching of described piezoelectric element both sides.
9. the manufacture method of the liquid ink nozzle according to any one of claim 2-8, is characterized in that, described negative photosensitive resin is negative light-sensitive glue SU8.
10. a liquid ink nozzle, is characterized in that, described liquid ink nozzle adopts the manufacture method of the liquid ink nozzle described in any one of claim 1-9 to make.
11. 1 kinds of printing devices, is characterized in that, comprise liquid ink nozzle according to claim 10.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310432877.3A CN104441996B (en) | 2013-09-22 | 2013-09-22 | The manufacture method of liquid ink nozzle, liquid ink nozzle and printing device |
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| CN101112817A (en) * | 2006-07-26 | 2008-01-30 | 国际联合科技股份有限公司 | Ink jet printing head and its producing method |
| CN103252997A (en) * | 2012-02-16 | 2013-08-21 | 珠海纳思达电子科技有限公司 | Liquid spray head and manufacturing method thereof |
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| CN101112817A (en) * | 2006-07-26 | 2008-01-30 | 国际联合科技股份有限公司 | Ink jet printing head and its producing method |
| CN103252997A (en) * | 2012-02-16 | 2013-08-21 | 珠海纳思达电子科技有限公司 | Liquid spray head and manufacturing method thereof |
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