CN103910176A - Elastic O-ring - Google Patents
Elastic O-ring Download PDFInfo
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- CN103910176A CN103910176A CN201310250858.9A CN201310250858A CN103910176A CN 103910176 A CN103910176 A CN 103910176A CN 201310250858 A CN201310250858 A CN 201310250858A CN 103910176 A CN103910176 A CN 103910176A
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- Prior art keywords
- type circle
- mentioned
- elasticity
- transfer roller
- font
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors
- B65G39/10—Arrangements of rollers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
The present invention relates to an elastic O-ring and, more specifically, to an elastic O-ring installed on a roller of a device for cleaning glass during a manufacturing process of an LCD to enable users to replace the O-ring by detaching the O-ring without disassembling a shaft into which the roller is inserted; and to prevent damage to a glass panel by preventing the glass panel from slipping on the O-ring while the O-ring is being replaced.
Description
Technical field
The present invention relates to a kind of elasticity O type circle, relating in particular to an a kind of part of cleaning the device of glass in LCD fabrication is O type circle set on roller, inject even if do not decompose the roller that roller arranges, the O type circle that just can depart from O type circle and more renew, and face glass is difficult for landing from O type circle in the time changing O type circle, thereby there is the elasticity O type circle of the feature that prevents glass panel breakage.
Background technology
Substrate is applicable to various product, for example, and liquid crystal indicator (LCD), the panel display apparatus that plasma display system (PDP) is the same.
Applicable substrate on various device as above, produces final products by various semiconducter engineering, for each semiconducter engineering can turn round, transfers with transfer roller.
As an example, for transferring the transfer roller of substrate, the transfer roller of top and bottom is mutually towards being rotated conventionally, and the axle of top and bottom transfer roller rotarilys actuate by train of gears simultaneously, thereby between it, can transfer substrate while rotation.
As above on each top and bottom transfer roller, in order to provide friction force and anti-skidding when the base plate transfer, also transfer smoothly for wounded substrate not, and be provided with the O type circle being formed by the material of elastomeric material and resin series.
Above-mentioned O type circle has sealing ring shape, on each transfer roller separated by a certain interval arrange multiple.The O type circle so arranging, in the time of prolonged and repeated handover substrate, because contact substrate weares and teares, deviation occurs, and due to contact and abrasion, its friction force declines, and therefore can not normally transfer substrate.
Therefore, as mentioned above O type circle, after certain hour uses, or occurs when damaged, need to more renew.
But, because the O type circle as mentioned above has sealing ring shape, for new O type circle is set on transfer roller, need to separate after various devices and the parts etc. that are connected on transfer roller one side shaft, to the greatest extent inject O type circle and connect in end from a side of the transfer roller that separates, work loaded down with trivial details.Therefore, the O type circle required time more renewing is long, works also very loaded down with trivial details, and work efficiency reduces, and in more changing jobs, need to end whole delivery systems, can only temporarily stop the production of substrate, therefore becomes the reason that reduces production efficiency.
And, change after O type circle, parts and device that assembling has separated need to be reconnected, and binding site and coupled condition between the transfer roller of top and bottom need to be reexamined and set, therefore very loaded down with trivial details.
And, being applicable to the O type circle of transfer roller, its cross sectional shape can be circular or other shapes (for example tetragonal cross sectional shape), corresponding for the cross sectional shape with the O type circle adopting on transfer roller, is provided with O type circle connecting groove (annular groove etc.).Therefore,, in the time of the O type circle more renewing, can only adopt the O type circle of the shape corresponding with being located at O type circle connecting groove on transfer roller.For example, if possess the O type circle of round section, and the area of contact of substrate is very little, if the O type circle in the cross section (tetragonal cross section) of contrary other shapes, due to the area change of substrate contacts, therefore can stablize handover substrate.
Therefore, want to replace the O type circle of existing round section with the O type circle in the cross section of other shapes, transfer roller also needs again to change.
Fig. 1 is that the part in the washing equipment that is located at LCD top glass substrate before anterior view is the front view of feedway.Fig. 2 is that the part in the washing equipment that is located at LCD top glass substrate before side is seen is the lateral plan of feedway.
With reference to Fig. 1 and Fig. 2, on roller 12, inserting multiple transfer rollers 14 arranges, on above-mentioned each transfer roller 14, arrange under the state of O type circle 20 of elastomeric material, the glass guiding roller 16 by both sides is towards left and right glass-guiding panel 10, thereby transfers on transfer roller 20.Rotate each roller 12 by the driving of rotating band 8, transfer roller 14 is and then rotation also.
In structure as mentioned above, exist in order to change O type circle 20, need to separate the problem of changing O type circle 12 under the state of roller 12.
And, in LCD fabrication, utilize in the operation of water or pharmaceutical chemicals cleaning and etching glass panel, be inserted in the O type circle that the shabby O type circle on transfer roller need to more renew.In the work of replacing O type circle, there is the problem of face glass landing from O type circle.
Now face glass landing and glass panel breakage occurs.
Fig. 3 is the front view that former circular O type circle is located at the state of transfer roller.Fig. 4 is the part expanded view that former circular O type circle is located at the state of transfer roller.
With reference to Fig. 3 and Fig. 4, cross section is that circular O type circle 20 is located on transfer roller 14, and face glass 10 is placed on the transfer roller 14 that is provided with circular O type circle 20.
Cross section is in the past that circular O type circle 20 is the same very narrow areas of point with the contact surface of face glass 10.Therefore exist face glass 10 to be easy to from the problem of circular O type circle 20 landings.
Fig. 5 is the front view that former tetragonal O type circle is located at the state of transfer roller.Fig. 6 is the part expanded view that former tetragonal O type circle is located at the state of transfer roller.
With reference to Fig. 5 and Fig. 6, former cross section is that the face that contacts with face glass 10 of dimetric O type circle 21 is wider than circular O type circle 20.Although but contact surface is wider than circular O type circle 20, contact condition is still insignificant.
Especially, making large-scale LCD(Liquid Crystal Display), PDP(Plasma Display Panel), the face glass that uses when LED display panel etc., easily slight curving, thus the interval 22 between face glass 10 and tetragonal O type circle 21 easily be there is as shown in Figure 4.Now the contact surface between face glass 10 and tetragonal O type circle 21 reduces more, easily landing and breakage from O type circle 21 of face glass 10 while changing O type circle.
Summary of the invention
The present invention works out in order to solve problem described above, it is a kind of more simple and easy for making to be located at the work that arranges of the O type circle on transfer roller that its object is to provide, improve structure for possessing separation unit and elastic force, and in the time changing shabby O type circle, face glass is difficult for from being located at the O type circle landing transfer roller, thereby prevents the elasticity O type circle of glass panel breakage.
For achieving the above object, according to O type circle of the present invention, its inject clean and the washing equipment of etching glass panel in for transferring the transfer roller on roller that is located at of above-mentioned face glass, it is characterized in that,
Above-mentioned O type circle is designed to circle in order to be attached on above-mentioned transfer roller, above-mentioned O type circle inside is made up of the spring portion of the metallic material (iron and steel and/or spring steel) that possesses circular elastic force,
The outside face of above-mentioned spring portion is all held by the epidermis portion of flexible material,
And the connection at a place that comprises above-mentioned O type circle is disconnected the separation unit forming, when will separating above-mentioned O type circle or reset above-mentioned O type circle on above-mentioned transfer roller, can restore in original circular permissible range and pull open above-mentioned separation unit at above-mentioned O type circle, separate or reset
Be characterised in that, above-mentioned epidermis portion's compound rubber or silica gel are made.
Be characterised in that the standby T font structure towards two side-prominent alar parts of the sectional tool of above-mentioned elasticity O type circle.
Be characterised in that, the cross section of above-mentioned elasticity O type circle is the T font that possesses the alar part side-prominent towards two, and is provided with the concavo-convex jog forming at the external diameter surface of above-mentioned elasticity O type circle.
Be characterised in that, above-mentioned epidermis portion, be divided into the inside portion that is attached to above-mentioned spring portion inner surface and the outside portion that is attached to above-mentioned spring portion outer surface be made into half-formed after, be attached to respectively the finally moulding altogether of above-mentioned spring portion.
Accompanying drawing explanation
Fig. 1 is that the part in the washing equipment that is located at LCD top glass substrate before anterior view is the front view of feedway.
Fig. 2 is that the part in the washing equipment that is located at LCD top glass substrate before side is seen is the lateral plan of feedway.
Fig. 3 is the front view that former circular O type circle is located at the state of transfer roller.
Fig. 4 is the part expanded view that former circular O type circle is located at the state of transfer roller.
Fig. 5 is the front view that former tetragonal O type circle is located at the state of transfer roller.
Fig. 6 is the part expanded view that former tetragonal O type circle is located at the state of transfer roller.
Fig. 7 a～c is respectively that explanation is made according to the figure of the first step operation of elasticity O type circle of the present invention.
Fig. 8 a～c is respectively that explanation is made according to the figure of the second step operation of elasticity O type circle of the present invention.
Fig. 9 a～c is respectively that explanation is made according to the figure of the third step operation of elasticity O type circle of the present invention.
Figure 10 a～c is respectively that explanation is made according to the figure of the 4th step process of elasticity O type circle of the present invention.
Figure 11 is shown on the roller being located on LCD device for cleaning to change according to the figure of the method for elasticity O type circle of the present invention.
Figure 12 is the front view that anterior view T font elasticity O type circle according to the present invention is located at the state of transfer roller.
Figure 13 a～c is respectively according to planar view, cutaway view and the front view of T font elasticity O type circle of the present invention.
Figure 14 is the part expanded view that T font elasticity O type circle according to the present invention is located at the state of transfer roller.
Figure 15 a～d is to be respectively external diameter surface, planar view, cutaway view and the front view of the check formula elasticity O type circle of T font according to the variation of T font elasticity O type circle of the present invention.
The check formula elasticity O type circle that Figure 16 is is T font according to the variation of T font elasticity O type circle of the present invention is located at the part expanded view of the state of transfer roller.
It is external diameter surface and the cross section of an embodiment of the check formula of T font that Figure 17 illustrates according to the variation of T font elasticity O type circle of the present invention.
Reference numeral
10: face glass 12: roller
14: transfer roller 16: glass guiding roller
20: circular O type circle 21: tetragonal O type circle
30: inside portion 40: spring portion
50: outside portion 52: alar part
54: jog 200: elasticity O type circle
31,41,51,201,212: separation unit
The specific embodiment
Fig. 7 a～c is that explanation is made according to the figure of the first step operation of elasticity O type circle of the present invention.
With reference to Fig. 7 a～c, as making according to the first step operation of elasticity O type circle of the present invention, illustrate the process that coordinates silica gel or rubber (viton) and be produced on the inside portion that the inner surface of metallic material spring portion 40 adheres to.
Inside portion 30 of the present invention is compound rubber or silica gel, utilizes mould (not shown) to carry out half-formed at the temperature of 25 ℃ to 120 ℃.Omit the above-mentioned half-formed rear operation of utilizing baking box (Oven) to toast (operations of removal organic matter etc.).
With reference to Fig. 7 b～c, the cross section of inside portion 30 has " recessed " font.Adhere to the spring portion 40 of the elastic force with metallic material at the position of the depression of " recessed " font.
Inside portion 30 of the present invention does not connect into a circle, and has the separation unit 31 that a part is separated.
Fig. 8 a～c is that explanation is made according to the figure of the second step operation of elasticity O type circle of the present invention.
With reference to Fig. 8 a～c, as making according to the second step operation of elasticity O type circle of the present invention, illustrate the making that possesses the elastic force of metallic material and the spring portion 40 of recuperability.
Use iron to make according to spring of the present invention portion 40 as raw MAT'L, be the spring wire of a circular linearly extended metallic material by cross section on the tetragonal mould that possesses rectangular shape, possesses oblong cross section thereby be made into.According to the tetragonal shape in the right angle of the sectional tool of spring of the present invention portion 40 standby long 1mm-5mm, wide 0.5mm-2mm.
Make the cross section of blocking towards length direction and vertical direction and all have after the oblong of user's Len req, as shown in Figure 8 a, bending is made into circle.According to the diameter of spring of the present invention portion 40, can change according to the diameter of the transfer roller 14 that elasticity O type circle is set.
Bending is made into the spring portion 40 of above-mentioned circle, suddenly cool heat 20-27 hour at 800 ℃ of-1300 ℃ of temperature after, thereby possesses the required elastic force of user and recuperability.
Comprise according to spring of the present invention portion 40 separation unit 41 that a part is separated, also restore original shape even if user pulls open above-mentioned separation unit 41.
The cross section that Fig. 8 b～c illustrates spring portion 40 has rectangular.
Fig. 9 a～c is that explanation is made according to the figure of the third step operation of elasticity O type circle of the present invention.
With reference to Fig. 9 a～c, as making according to the third step operation of elasticity O type circle of the present invention, illustrate and coordinate silica gel or rubber and be produced on the metallic material spring 40(of portion iron and steel and/or spring steel) the operation of the half-formed outside portion 50 adhered to of outer surface.
The coupling of materials silica gel of outside portion 50 of the present invention or rubber (viton) form, and it is half-formed at 25 ℃ of-120 ℃ of temperature, to utilize mould to carry out.
Outside portion 50 of the present invention does not connect into a circle, and has the separation unit 51 that a part is separated.
With reference to Fig. 9 b～c, spring portion 40 is attached to behind the position of depression of " recessed " font of inside portion 30, covers its top and forms oblong.
In the present invention by after half-formed to inside portion 30 and outside portion 50, being attached to the reason that spring portion 40 carries out final molding is again, to just the spring portion 40 of metallic material be injected by one-shot forming to the tram of the epidermis portion that is equivalent to inside portion 30 and outside portion 50, very difficult.
Attempt in mould, insert spring portion by one-shot forming and inject the modes such as rubber, be produced on the elasticity O type circle that inserts the state of spring portion in epidermis, will be unstable in the position of the spring portion of epidermis portion inside, and cause the problem that disqualification rate increases.
And, also can consider the position of fixing spring portion 40 in mould, and under the state of fixing spring portion 40, in mould, inject the method for rubber etc., if but profit moulding in this way, in spring portion 40, for the part of fixed position, the epidermis portion that can not be made up of materials such as rubber is held.
Therefore in the present invention behind half-formed inside portion and outside portion, be attached to spring portion, and then carry out final molding.
Figure 10 a～c is that explanation is made according to the figure of the 4th step process of elasticity O type circle of the present invention.
With reference to Figure 10 a, elasticity O type circle 200 according to the present invention is centered by spring portion 40 as shown in Figure 10 a, as shown in Fig. 7 a～c, adhere to and coordinate silica gel or rubber and half-formed inside portion 30 at the medial surface of spring portion 40, simultaneously as shown in Fig. 9 a～c, adhere to and coordinate silica gel or rubber and under the state of half-formed outside portion 50 at spring of the present invention portion 40 lateral surfaces, inject again mould, and under the pressure condition of the temperature of 130 ℃-260 ℃ and 100-200kg/cm2, extrusion forming 5-25 minute.
And, after moulding, utilize baking box (Oven) to remove organic matter and cigarette (fume) completely.The condition of baking box (Oven) is set as 150 ℃-280 ℃, and activity time is set as 4-46 hour.
With reference to Figure 10 b～c, can see the method for adhering to inside portion 30 and outside portion 50 centered by spring portion 40.Finish completely after moulding, inside portion 30 is formed on outside portion 50 the epidermis portion being connected completely that inside comprises spring portion 40., spring portion 40 is the appearance of metal wire rod, being all engaged the soft epidermis that silica gel or rubber forms is that inside portion 30 and outside portion 50 hold.
In the operation of the cleaning in LCD fabrication and/or etching glass panel, use strong acid pharmaceutical chemicals and the water such as hydrofluoric acid, phosphoric acid, nitric acid as cleansing fluid, clean face glass.If the metal O type circle arranging on the washing equipment using in this cleaning and/or etching work procedure, it is a part only, the spring portion of metal is exposed, will in cleaning and/or etching work procedure, easily corrode due to above-mentioned pharmaceutical chemicals, and cause the problem that can not use for a long time elasticity O type circle.
The O type circle using on matting manufacturing line in LCD fabrication at present should use more than 1 year, if the spring portion 40 of metallic material not exclusively seals, just causes the problem that need to frequently stop cleaning product line for the frequent O of replacing type circle.This just produces and brings heavy losses LCD.
Therefore the O type circle using on washing equipment in the present invention, spring portion 40 appearances of metallic material are all that inside portion 30 holds completely with outside portion 50 by the epidermis portion of flexible material, thereby can there is not the problem of the metal partial corrosion of elasticity O type circle, possess on washing equipment and to use " elasticity O type circle " parts for a long time and without the effect that showing of changing.
Elasticity O type circle 200 according to the present invention also not exclusively connects into the shape of sealing, and comprises the separation unit 210 that a part is separated.
Figure 11 is shown on the roller being located on LCD device for cleaning to change according to the figure of the method for elasticity O type circle of the present invention.
With reference to Figure 11, illustrate the separation unit 201 of slightly pulling open according to elasticity O type circle 200 of the present invention, the shape of new elasticity O type circle 200 is set in the groove of transfer roller 14 that is inserted with roller 12.
User is pulling open slightly according under the state of the separation unit 201 of elasticity O type circle 200 of the present invention, even if do not separate transfer roller 14 on roller 12, also can carry out more changing jobs of elasticity O type circle 200 to transfer roller 14.
Once insert elasticity O type circle 200 of the present invention on transfer roller 14, just due to the recuperability of spring portion 40, the separation unit 201 of therefore pulling open returns to former state, thereby the interval of separation unit 201 dwindles to greatest extent.
Figure 12 is the front view that anterior view T font elasticity O type circle according to the present invention is located at the state of transfer roller.
With reference to Figure 12, be T font according to the cross sectional shape of elasticity O type circle of the present invention, thereby along with the bending of face glass 10, the alar part 52 of T font elasticity O type circle is also bending, thereby increases to greatest extent the area contacting with face glass 10.
Therefore be located at the face glass of placing 10 of set T font elasticity O type circle on the transfer roller 15 of roller 12 both sides above, because alar part 52 prevents landing, thereby can prevent from occurring in face glass 10 way that and then transfer roller 14 is transferred damaged.
Figure 13 a～c is according to planar view, cutaway view and the front view of T font elasticity O type circle of the present invention.
With reference to Figure 13 a～c, according to T font elasticity O type circle of the present invention, be provided with therein and possess the elastic force of metallic material and the spring portion 40 of recuperability, hold spring portion 40 at inside portion 30 and the combination of outside portion 40 of its outside T font.
Now, as the inside portion 30 of T font and the material of the combination of outside portion 40, preferentially use viton (Vition, Kalrez), silica gel.
And the size of alar part 52 is preferably long 1-3mm, wide 1-3mm.
In T font elasticity O type circle of the present invention, be equivalent to the separation unit 212 at the dialysis position of elasticity O type circle, be not designed to leave the space at small interval as the separation unit 201 of Figure 11, and while being provided in a side of on transfer roller 14 completely without the complete fully enclosed shape of the part of separating.
Figure 14 is the part expanded view that T font elasticity O type circle according to the present invention is located at the state of transfer roller.
With reference to Figure 14, according to being provided with interval 14 between the bottom surface of alar part 52 of T font elasticity O type circle of the present invention and the end of transfer roller 14, thereby alar part 52 can decurvation.
Therefore, when large-scale face glass 10 is bending on T font elasticity O type circle, alar part 52 is also bending, thereby the area that T font elasticity O type circle contacts with face glass 10 can not reduce.
Figure 15 a～d is to be external diameter surface, planar view, cutaway view and the front view of the check formula elasticity O type circle of T font according to the variation of T font elasticity O type circle of the present invention.
With reference to Figure 15 a～d, be the external diameter surface of the check formula elasticity O type circle of T font according to the variation of T font elasticity O type circle of the present invention, be provided with multiple outstanding concavo-convex 54.
As T font elasticity O type circle according to the present invention, be provided with two side-prominent alar parts 52, and be provided with interval 14 between alar part 52 bottom surfaces and transfer roller 14 ends, so that the structure of alar part 52 decurvations is also identical.
Being designed to cross section according to the check formula elasticity O type circle of T font of the present invention is T font, and the upper face at elasticity O type circle is provided with numerous concavo-convex 54 of chessboard shape, therefore along with 10 bendings of large-scale face glass, the alar part 52 of T font elasticity O type circle is also bending, and can increase to greatest extent by numerous concavo-convex 54 the area contacting with face glass 10.
Under said structure, be located at and on the transfer roller 14 of roller 12 both sides, insert the face glass 10 that the check formula O type circle of the T font arranging is placed above, contact more firm because alar part 52 and jog 54 make face glass 10 with elasticity O type circle, thereby prevent face glass 10 landing from elasticity O type circle, prevent from occurring in face glass 10 way that and then transfer roller 14 is transferred damaged.
In the check formula O type circle of T font of the present invention, be equivalent to the separation unit 212 at elasticity O type circle dialysis position, be not designed to separate the space at small interval as the separation unit 201 of Figure 11, and have while being located on transfer roller 14 completely without the part of separating and complete fully enclosed shape.
The check formula elasticity O type circle that Figure 16 is is T font according to the variation of T font elasticity O type circle of the present invention is located at the part expanded view of the state of transfer roller.
With reference to Figure 16, it is the check formula elasticity O type circle of T font according to the variation of T font elasticity O type circle of the present invention, in large-scale face glass 10 way that and then transfer roller 14 is transferred, if T font two flank section 52 are also bending when face glass 10 is bending, thereby increase to greatest extent the area contacting with face glass 10, and improve to greatest extent and prevent the effect of face glass 10 from the landing of elasticity O type circle by jog 54.
It is external diameter surface and the cross section of an embodiment of T font check formula elasticity O type circle that Figure 17 illustrates according to the variation of T font elasticity O type circle of the present invention.
With reference to Figure 17, the size of alar part 52 is preferably long 1-3mm, wide 1-3mm, and check is preferably long 0.1-0.5mm, wide 0.1-0.5mm, high 0.1-0.3mm.
And, preferentially use viton (Vition, Kalrez), silica gel as material.
According to elasticity O type circle of the present invention, in LCD fabrication, utilize in the operation of water or pharmaceutical chemicals cleaning and/or etching glass panel, when being located at O type circle on transfer roller when shabby, for the O type circle more renewing, without disassembling the parts or the device that are combined in base plate transfer roller one side, just can make it hold transfer roller periphery by simple and easy replacing elasticity O type circle.
Therefore, can shorten and change O type circle required time, thereby and the simple and easy cost saving that more changes jobs, and can reduce to greatest extent the time that stops machine operation for replacing work, thereby improve the production efficiency of product.
And, due to the various parts and the device that are combined in without decomposition on transfer roller, thereby fundamentally eliminate the assembling tolerance likely occurring while re-assemblying, after there is no need to re-assembly, reset, and prevent that the mistake running or the production efficiency that occur due to assembling tolerance are low.
And, while changing shabby O type circle, the O type circle on increase reeve transfer roller and the area of contact of face glass, thus prevent that face glass from departing from and breakage from O type circle, has the effect showing.
As above, in order to illustrate principle of the present invention, illustrate and illustrated preferential embodiment, but the present invention is not limited to the structure and the effect that in diagram in accompanying drawing and specification sheets, illustrate.This area worker understands in the thought and scope that do not exceed additional claims, can carry out various change and modification for the present invention.
Claims (4)
1. an elasticity O type circle, its inject clean and the washing equipment of etching glass panel in for transferring the transfer roller on roller that is located at of above-mentioned face glass, it is characterized in that,
Above-mentioned O type circle is in order to be attached on above-mentioned transfer roller and be designed to circle, and above-mentioned O type circle inside is made up of the spring portion of the metallic material that possesses circular elastic force,
The outside face of above-mentioned spring portion is all held by the epidermis portion of flexible material,
And the connection at a place that comprises above-mentioned O type circle is disconnected the separation unit forming, when will separating above-mentioned O type circle or reset above-mentioned O type circle on above-mentioned transfer roller, can restore in original circular permissible range and pull open above-mentioned separation unit at above-mentioned O type circle, separate or reset.
2. elasticity O type circle according to claim 1, is characterized in that,
The standby T font structure towards two side-prominent alar parts of the sectional tool of above-mentioned elasticity O type circle.
3. elasticity O type circle according to claim 1, is characterized in that,
The cross section of above-mentioned elasticity O type circle is the T font that possesses the alar part side-prominent towards two, and is provided with the concavo-convex jog forming at the external diameter surface of above-mentioned elasticity O type circle.
4. elasticity O type circle according to claim 1, is characterized in that,
Above-mentioned epidermis portion, be divided into the inside portion that is attached to above-mentioned spring portion inner surface and the outside portion that is attached to above-mentioned spring portion outer surface, compound rubber or silica gel at the temperature between 25 ℃ to 120 ℃, be made into half-formed after, adhere under the state of above-mentioned half-formed inside portion and outside portion in above-mentioned spring portion, at the temperature compacted under of 130 ℃ to 260 ℃.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020130001770A KR101380163B1 (en) | 2013-01-07 | 2013-01-07 | Elastic o-ring |
| KR10-2013-0001770 | 2013-01-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103910176A true CN103910176A (en) | 2014-07-09 |
| CN103910176B CN103910176B (en) | 2016-06-22 |
Family
ID=50656232
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310250858.9A Expired - Fee Related CN103910176B (en) | 2013-01-07 | 2013-06-21 | Resilient, elastomeric |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101380163B1 (en) |
| CN (1) | CN103910176B (en) |
| TW (1) | TWI543293B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109887877A (en) * | 2019-01-02 | 2019-06-14 | 长江存储科技有限责任公司 | A kind of wafer fixed station and wafer bonding equipment |
| WO2020042391A1 (en) * | 2018-08-27 | 2020-03-05 | 惠科股份有限公司 | O-ring and transmission device |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101979791B1 (en) | 2017-11-27 | 2019-05-17 | 평화오일씰공업 주식회사 | Universal O-ring with elastic body |
| KR20190081929A (en) | 2017-12-29 | 2019-07-09 | 평화오일씰공업주식회사 | Multi-purpose rubber elastic ring with built-in coil spring and Seal having the rubber elastic ring |
| KR102562636B1 (en) * | 2021-06-18 | 2023-08-02 | 황석환 | Largre size O-ring |
| TWI806602B (en) * | 2022-05-11 | 2023-06-21 | 優鋼機械股份有限公司 | Elastic element and hand tool |
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| CN1814523A (en) * | 2004-12-22 | 2006-08-09 | 芝浦机械电子株式会社 | Transmission shaft,Roller brush shaft and apparatus for processing substrate |
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| KR101226295B1 (en) * | 2012-04-04 | 2013-01-24 | 이재규 | Elastic o-ring installed in glass cleaning apparatus and method for making it |
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2013
- 2013-01-07 KR KR1020130001770A patent/KR101380163B1/en active IP Right Grant
- 2013-06-21 CN CN201310250858.9A patent/CN103910176B/en not_active Expired - Fee Related
- 2013-07-03 TW TW102123737A patent/TWI543293B/en not_active IP Right Cessation
Patent Citations (6)
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| JP2003097715A (en) * | 2001-09-27 | 2003-04-03 | Hitoshi Watanabe | Producing method of composite structure o-ring |
| KR100509646B1 (en) * | 2002-08-07 | 2005-08-23 | 김창용 | O-Ring having cover sheet |
| CN1814523A (en) * | 2004-12-22 | 2006-08-09 | 芝浦机械电子株式会社 | Transmission shaft,Roller brush shaft and apparatus for processing substrate |
| CN2804006Y (en) * | 2005-06-17 | 2006-08-09 | 上海高罗输送装备有限公司 | Cylinder of belt conveyer with detachable wrapped rubber |
| CN101840156A (en) * | 2009-03-19 | 2010-09-22 | 住友精密工业株式会社 | Substrate board treatment |
| KR20110111693A (en) * | 2010-04-05 | 2011-10-12 | 이병칠 | A o-ring of feed roller |
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| WO2020042391A1 (en) * | 2018-08-27 | 2020-03-05 | 惠科股份有限公司 | O-ring and transmission device |
| CN109887877A (en) * | 2019-01-02 | 2019-06-14 | 长江存储科技有限责任公司 | A kind of wafer fixed station and wafer bonding equipment |
| CN109887877B (en) * | 2019-01-02 | 2021-09-14 | 长江存储科技有限责任公司 | Wafer fixing table and wafer bonding equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103910176B (en) | 2016-06-22 |
| TW201428875A (en) | 2014-07-16 |
| KR101380163B1 (en) | 2014-04-02 |
| TWI543293B (en) | 2016-07-21 |
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