CN103116370B - Pressure regulating device - Google Patents
Pressure regulating device Download PDFInfo
- Publication number
- CN103116370B CN103116370B CN201310000145.7A CN201310000145A CN103116370B CN 103116370 B CN103116370 B CN 103116370B CN 201310000145 A CN201310000145 A CN 201310000145A CN 103116370 B CN103116370 B CN 103116370B
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- pressure
- temperature
- chamber
- sensitive chamber
- processor
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Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/20—Control of fluid pressure characterised by the use of electric means
- G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
- G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
- G01L27/005—Apparatus for calibrating pressure sensors
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- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
- Control Of Fluid Pressure (AREA)
Abstract
The invention relates to a pressure regulating device which comprises a temperature sensing chamber, a temperature control device, a coarse pressure regulating mechanism, a processor, a touch screen, an analog-digital converter, a pressure sensor and a pressure building chamber. The pressure sensor senses the pressure in the pressure building chamber, the analog-digital converter collects output electrical signals, the processor calculates the collected electrical signals, and a real-time pressure value is obtained. The processor compares an input pressure set value and the error value of a pressure current value detected in real time, adopts a double closed-loop proportion and integral (PI) control algorithm, firstly controls the coarse pressure regulating mechanism of an inner loop to carry out coarse pressure regulation fast, and then controls the temperature control device of an outer loop, the chamber volume of the temperature sensing chamber is changed by controlling temperature, and accordingly the function of precise pressure regulation is achieved. The pressure regulating control system of the pressure regulating device is high in precision, simple in structure, low in cost and wide in applicability.
Description
Technical field
The present invention relates to industrial control field, be specifically related to a kind of employing two close cycles PI control method, the cavity volume controlling the pressure vessel of conventional thick pressure governor motion and high thermal expansion coefficient material changes, and makes the two collaborative work, achieves the minute adjustment of pressure.
Background technology
Pressure survey occupies critical role in industrial stokehold, and the performance of pressure calibration device determines the calibration accuracy of manometer, efficiency and cost.Full-automatic pressure calibration instrument is high, applied widely because of its precision, and be easy to operation, function i ntegration, the many merits such as compact, just progressively replace traditional piston gage, are widely used in the fields such as electric power, oil, petrochemical industry, metallurgy, pharmacy.
Full-automatic pressure calibration instrument, according to the difference of tested instrument, is mainly divided into air pressure tester and hydraulic pressure tester.Air pressure tester take noncorrosive gases as actuating medium, is often used for calibrating the relatively little manometer of range.Conventional air pressure tester utilizes opening/breaking and controlling to make the air inflow in pressure chamber and air output of solenoid valve, then reaches the object regulating pressure, sees Fig. 1 C.Hydraulic pressure tester, is often used for calibrating the relatively large manometer of range for actuating medium with non-electrically conductive liquids such as transformer oil, decanedioic acid fat, deionized waters.Conventional hydraulic pressure tester utilizes motor or gas push piston to move in oil cylinder, changes the volume of actuating medium in oil cylinder, then reaches the object regulating pressure, sees Figure 1A and Figure 1B.
At present, the pressure precision of making of Full-automatic pressure calibration instrument is mainly limited by the performance of pressure transducer and topworks.The machining precision of topworks, the consistance of components and parts and processing purchase cost, determine the quality of topworks's performance.
In traditional baric systerm, the response time of solenoid valve, better also wanted 5 ~ 10ms mostly at 10 ~ 30ms, and price costly, and consistance is difficult to ensure.The gas flow of the minimum switch gap of solenoid valve often determines the precision of air pressure adjustment.By reducing the pressure reduction at solenoid valve two ends to reducing the gas flow of minimum switch gap, often increasing the complicacy of system, causing the raising of cost.Reduce the latus rectum of solenoid valve, although the gas flow of minimum switch gap can be reduced, also increase regulating time simultaneously.Increase the volume making pressure cavity, then can because of vessel manufacture, the vibration of aggravation gas, also can increase regulating time.In traditional hydraulic system, for making for pressing system by motor pushing piston, the machining precision of turn-screw can affect the displacement of motor one step lower piston, then affects the resolving power of pressure regulation.And high-precision leading screw is often expensive, not easily process.The stepper motor that motor supporting with it also needs to select high resolving power, torque levels, heating less or servomotor, the cost of further raising system.What push away liquid for gas makes pressing system, then there is a difficult problem similar to baric systerm.
Summary of the invention
The problem that technology of the present invention solves is: overcome the deficiencies in the prior art, providing one utilizes the deformation of the pressure vessel of high thermal expansion coefficient material (aluminium, copper, iron etc.) to carry out the control system of pressure minute adjustment, coordinate conventional thick pressure governor motion (hydraulic jack or air-operated solenoid valve), adopt two close cycles PI control method, reduce the performance requirement to traditional regulation mechanism, simplify system architecture, reduce the components and parts cost of system and consistance impact, and improve to a certain extent and make pressure precision.
For achieving the above object, the embodiment of the present invention provides a kind of pressure adjustment assembly on the one hand, and described device comprises:
Topworks (1), it comprises temperature-sensitive chamber (3), attemperating unit (4), slightly presses governor motion (5), makes pressure chamber (10), the described cavity making pressure chamber (10) and described temperature-sensitive chamber (3) communicates, and inside cavity pressure is equal;
Control gear (2), it comprises processor (6), touch-screen (7), analog-digital converter (8), pressure transducer (9), the pressure in pressure chamber (10) is made described in described pressure transducer (9) perception, export electric signal, after analog-digital converter (8) gathers described electric signal, resolved by described processor (6), obtain real-time force value, described processor (6) is by the error amount of the pressure set points that compares user and inputted by described touch-screen (7) and pressure currency, after described error amount is compared with specification error threshold value, double-closed-loop control is carried out to described topworks (1), the pressure in pressure chamber (10) is made described in adjustment.
According to the pressure adjustment assembly described in present pre-ferred embodiments, described double-closed-loop control comprises further:
When error amount is in outside described specification error threshold interval, described processor (6) starts inner ring, controls described thick pressure governor motion (5) and slightly presses adjustment fast;
When described error amount is within described specification error threshold interval, described processor (6) starts outer shroud, control described attemperating unit (4), change the temperature of described temperature-sensitive chamber (3), to change the cavity volume of described temperature-sensitive chamber (3).
According to the pressure adjustment assembly described in present pre-ferred embodiments, described temperature-sensitive chamber is the pressure vessel of high thermal expansion coefficient of aluminum, copper or irony.
According to the pressure adjustment assembly described in present pre-ferred embodiments, institute's attemperating unit is by power resistor, Pt thermopair, heat radiator and electric power generating composition.
According to the pressure precise adjustment device described in present pre-ferred embodiments, described pressure transducer (9) is silicon piezoresistance type pressure sensor, resonance type pressure sensor, capacitance pressure transducer.According to the pressure adjustment assembly described in present pre-ferred embodiments, described analog-digital converter (8) is ∑-Δ type simulated digital quantizer.
Owing to have employed above technical characteristic, the present invention's advantage is compared with prior art:
(1) the present invention adopts pressure regulating device and the collaborative work of outer shroud attemperating unit of inner ring routine, by changing the temperature in temperature-sensitive chamber, then changes its volume, achieves high-precision pressure stability and regulates, be applicable to air pressure and hydraulic pressure two kinds of systems simultaneously;
(2) the present invention adopts two close cycles PI control method, makes slightly to press governor motion and attemperating unit collaborative work, reaches stable set pressure fast.Namely, when error amount is in outside specification error threshold interval, thick pressure governor motion rapid pressure adjusting is started; When error amount is within specification error threshold interval, starts attemperating unit and carry out accurate voltage regulating.In inside and outside two PI links, when error amount is in outside respective specification error threshold interval, governor motion is with the highest governing speed pressure regulation, once error amount enters within specification error threshold interval, then and operation parameter Self-tuning System PI control method pressure regulation.For improving the performance of closed-loop control system, shorten the response time, make to make the set pressure that pressing system reaches stable as early as possible, at inside and outside two rings, according to error amount size, the suitably coefficient of each link of adjustment PI controller, compared to common PI control method, highly shortened the response time, improve antijamming capability;
(3) structure of the present invention is simple, and attemperating unit and temperature-sensitive chamber make simple, lower to the conventional pressure regulating device manufacturing accuracy coordinated with it, coherence request, also reduces cost simultaneously, has certain marketing potentiality.
Accompanying drawing explanation
Figure 1A is the hydraulic regulator schematic diagram utilizing motor pushing piston;
Figure 1B is the hydraulic regulator schematic diagram utilizing gas push piston;
Fig. 1 C is the Pneumatic adjusting mechanism utilizing solenoid control air inflow, air output;
The structured flowchart of the pressure adjustment assembly that Fig. 2 provides for the embodiment of the present invention;
Fig. 3 is the schematic diagram of temperature-sensitive chamber of the present invention and attemperating unit thereof;
Fig. 4 is processor realization flow figure of the present invention;
Fig. 5 is parameter self-tuning PI control structure figure of the present invention.
Embodiment
Below by drawings and Examples, technical scheme of the present invention is described in further detail.
As shown in Figure 2, the embodiment of the present invention provides one and utilizes temperature to control to carry out the pressure adjustment assembly of pressure minute adjustment, and described device comprises topworks (1) and control gear (2).Topworks (1), it comprise temperature-sensitive chamber (3), attemperating unit (4), slightly press governor motion (5) and make pressure chamber (10), described making presses chamber (10) and described temperature-sensitive chamber (3) to communicate, and inside cavity pressure is equal; Control gear (2), it comprises processor (6), touch-screen (7), analog-digital converter (8), pressure transducer (9).The control gear of pressure transducer 9, analog-digital converter 8, processor 6 composition also claims control circuit, by two close cycles PI control method, control the cavity volume change in the temperature-sensitive chamber 3 of thick pressure governor motion 5 and attemperating unit 4 control, make the two collaborative work, realize stable, pressure regulation rapidly.
As shown in Figure 3, the pressure vessel of the contour expansion coefficient material of common aluminium, copper, iron can be selected in temperature-sensitive chamber of the present invention.Attemperating unit principle is simple, generally by power resistor, Pt thermopair, heat radiator and electric power generating composition.Processor controls the temperature in temperature-sensitive chamber by attemperating unit, then its cavity volume is changed: when needs raised pressure, then reduce the voltage modulated dutycycle to power resistor in attemperating unit, then the temperature of power resistor is reduced, the surface area of heat radiator can be selected larger, can be aided with radiator fan if necessary, the temperature in temperature-sensitive chamber is decreased, then the cavity volume in temperature-sensitive chamber meets cold events; When needs reduce pressure, then improve the voltage modulated dutycycle to power resistor in attemperating unit, the temperature of increased wattage resistance then, then should close as installed radiator fan additional, the temperature in temperature-sensitive chamber is increased, then the cavity volume heat in temperature-sensitive chamber expands.Because temperature-sensitive chamber presses chamber to communicate with making, then the two cavity internal pressure is equal.The cavity volume in temperature-sensitive chamber should be coordinated mutually with the whole cumulative volume making hydraulic circuit, and too little then range of regulation is less than normal, does not then have too greatly the effect of accurate voltage regulating.Also to consider the pressure regulation resolving power of thick pressure governor motion simultaneously.
As shown in Figure 4, processor 6 of the present invention receives the pressure set points of user's setting by touch-screen 7, and pressure transducer 9 sensitivity makes the pressure in pressure chamber 10, gathers, resolved obtain pressure currency by processor 6 through analog-digital converter 8.Pressure set points compares with pressure currency by processor 6, obtains error amount.When error amount is in outside specification error threshold interval, processor 6 starts thick pressure governor motion 5 rapid pressure adjusting of inner ring by the PI control method of parameter self-tuning, and the attemperating unit 4 of outer shroud does not work; When error amount is within specification error threshold interval, then realize accurate voltage regulating by the attemperating unit 4 of the PI control method startup outer shroud of parameter self-tuning, the thick pressure governor motion 5 of inner ring does not work.Circulation performs, until reach stable set pressure.
As shown in Figure 5, in the embodiment of the present invention, processor 6 adopts two close cycles parameter self-tuning PI control method to control pressure.Processor, by PI control algolithm, according to error amount size, adjusts Proportional coefficient K p and the integral coefficient Ki of PI link.Output and the error originated from input value of Kp control are proportional, are used for responding fast; Output and error amount that Ki controls be integrated into proportional relation, be used for elimination steady-state error.Namely when Error Absolute Value comparatively large (get in the present invention and be greater than 20% of inner and outer rings input value), Kp gets higher value (the present invention gets 30), Ki gets zero, now slightly presses governor motion 5 or temperature-sensitive chamber 3 rapid pressure adjusting or rapid temperature rise and drop, makes Error Absolute Value reduce as early as possible; When Error Absolute Value is median size (get in the present invention be greater than 10% of inner and outer rings input value be less than 20% of inner and outer rings input value), Kp gets medium value (the present invention gets 25), Ki gets smaller value (the present invention gets 0.0005), now slightly press governor motion 5 or temperature-sensitive chamber 3 to reduce the speed of pressure regulation or heating and cooling, prevent overshoot; When Error Absolute Value continues to reduce (the present invention get be greater than 5% of inner and outer rings input value be less than 10% of inner and outer rings input value), Kp should get smaller value (the present invention gets 5), Ki gets medium value (the present invention gets 0.02), now slowly regulates the temperature in thick pressure actuator 5 or temperature-sensitive chamber 3; When Error Absolute Value reaches minimum (the present invention gets and is less than 5% of inner ring input value), Kp should get medium value (the present invention gets 20), Ki gets maximal value (the present invention gets 0.02), now mainly fine regulate the temperature in temperature-sensitive chamber 3, reach the effect of accurate voltage regulating.Above process makes inside loop and outside loop respond rapidly, thus enables the set pressure that closed-loop system reaches stable sooner, and the method is faster than traditional PI control method response speed.
Pressure transducer 9 according to precision, performance need, can select common silicon piezoresistance type pressure sensor, resonance type pressure sensor, capacitance pressure transducer.
Consider that electric signal that pressure transducer 9 exports is generally the tiny signal of uA, mV level, and the pressure signal made in pressure chamber 10 can not suddenly change the short time, therefore recommend the ∑-Δ type simulated digital quantizer 8, such as AD7714 adopting high resolving power, high s/n ratio, high integration.
Processor 6 can select the realizations such as common digital signal processor or ARM, as: TMS320F28335 etc.
The set pressure of user's input can by touch-screen or simply button, charactron realization.
Principle of the present invention: the present invention changes by the cavity volume of the thick pressure governor motion of routine and the pressure vessel of high thermal expansion coefficient material, makes the two collaborative work, by the PI control method of two close cycles, achieves fast, stablizes the function making pressure.In topworks, reduce the requirement of the performance of the thick pressure governor motion to routine, only for slightly pressing adjustment.When error amount is within specification error threshold interval, start attemperating unit work, by changing the temperature in temperature-sensitive chamber, then changing the cavity volume in temperature-sensitive chamber, reaching the object of accurate voltage regulating.Software aspect have employed the PI control method of two close cycles, the error amount between the pressure currency read in real time by comparative pressure sensor and user's setting value, and according to its size, the parameter of Self-tuning System PI link, substantially reduces regulating time.Within the thick pressure governor motion rapid pressure adjusting to specification error threshold interval first controlling inner ring, then stop inner ring regulating, the attemperating unit controlling outer shroud carries out accurate voltage regulating fast, stably.
Above-described embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only the specific embodiment of the present invention; the protection domain be not intended to limit the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (5)
1. a pressure adjustment assembly, its characteristic is, comprising:
Topworks (1), it comprises temperature-sensitive chamber (3), attemperating unit (4), slightly presses governor motion (5), makes pressure chamber (10), the described cavity making pressure chamber (10) and described temperature-sensitive chamber (3) communicates, and inside cavity pressure is equal;
Control gear (2), it comprises processor (6), touch-screen (7), analog-digital converter (8), pressure transducer (9), the pressure in pressure chamber (10) is made described in described pressure transducer (9) perception, export electric signal, after analog-digital converter (8) gathers described electric signal, resolved by described processor (6), obtain real-time force value, described processor (6) is by the error amount of the pressure set points that compares user and inputted by described touch-screen (7) and pressure currency, after described error amount is compared with specification error threshold value, double-closed-loop control is carried out to described topworks (1), the pressure in pressure chamber (10) is made described in adjustment,
Described double-closed-loop control comprises further:
When error amount is in outside described specification error threshold interval, described processor (6) starts inner ring, controls described thick pressure governor motion (5) and slightly presses adjustment fast;
When described error amount is within described specification error threshold interval, described processor (6) starts outer shroud, control described attemperating unit (4), change the temperature of described temperature-sensitive chamber (3), to change the cavity volume of described temperature-sensitive chamber (3);
Described temperature-sensitive chamber is the pressure vessel of high thermal expansion coefficient of aluminum, copper or irony;
Described processor controls the temperature in temperature-sensitive chamber by attemperating unit, then its cavity volume is changed: when needs raised pressure, then reduce the voltage modulated dutycycle to power resistor in attemperating unit, then the temperature of power resistor is reduced, the temperature in temperature-sensitive chamber is decreased, then the cavity volume in temperature-sensitive chamber meets cold events; When needs reduce pressure, then improve the voltage modulated dutycycle to power resistor in attemperating unit, the temperature of increased wattage resistance then, makes the temperature in temperature-sensitive chamber increase, then the cavity volume heat in temperature-sensitive chamber expands; The cavity volume in temperature-sensitive chamber should be coordinated mutually with the whole cumulative volume making hydraulic circuit.
2. pressure adjustment assembly as claimed in claim 1, it is characterized in that, described attemperating unit is by power resistor, Pt thermopair, heat radiator and electric power generating composition.
3. pressure adjustment assembly as claimed in claim 1 or 2, is characterized in that, described pressure transducer (9) is silicon piezoresistance type pressure sensor, resonance type pressure sensor, capacitance pressure transducer.
4. the pressure adjustment assembly as described in any one of claim 1 or 2, is characterized in that, described analog-digital converter (8) is ∑-Δ type simulated digital quantizer (8).
5. pressure adjustment assembly as claimed in claim 3, it is characterized in that, described analog-digital converter (8) is ∑-Δ type simulated digital quantizer (8).
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310000145.7A CN103116370B (en) | 2013-01-04 | 2013-01-04 | Pressure regulating device |
| PCT/CN2013/090206 WO2014106437A1 (en) | 2013-01-04 | 2013-12-23 | Pressure adjusting device |
| CA2838390A CA2838390A1 (en) | 2013-01-04 | 2013-12-30 | Pressure adjustment apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310000145.7A CN103116370B (en) | 2013-01-04 | 2013-01-04 | Pressure regulating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103116370A CN103116370A (en) | 2013-05-22 |
| CN103116370B true CN103116370B (en) | 2015-06-03 |
Family
ID=48414779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310000145.7A Active CN103116370B (en) | 2013-01-04 | 2013-01-04 | Pressure regulating device |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN103116370B (en) |
| CA (1) | CA2838390A1 (en) |
| WO (1) | WO2014106437A1 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109596566A (en) * | 2018-10-29 | 2019-04-09 | 中国科学院合肥物质科学研究院 | A kind of gas detection absorption inside cavity temperature and pressure integrated control unit |
| CN110471469B (en) * | 2019-09-26 | 2021-03-16 | 湖南航天机电设备与特种材料研究所 | Self-adaptive temperature control method based on PI algorithm |
| CN111288296A (en) * | 2020-02-13 | 2020-06-16 | 蓝箭航天技术有限公司 | Control device and method of nitrogen replacement equipment |
| CN113220045B (en) * | 2021-05-10 | 2023-03-31 | 南京英锐创电子科技有限公司 | Air pressure control device and method |
| CN114483695A (en) * | 2022-01-30 | 2022-05-13 | 北京康斯特仪表科技股份有限公司 | Liquid pressure checking device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102103381A (en) * | 2009-12-16 | 2011-06-22 | 上海神开石油化工装备股份有限公司 | Electron pressure controller |
| CN102385397A (en) * | 2011-09-29 | 2012-03-21 | 北京振兴计量测试研究所 | High-precision pressure control system based on high-speed solenoid valve |
| CN102677024A (en) * | 2012-05-28 | 2012-09-19 | 上海华力微电子有限公司 | Cavity pressure adjustment method and cavity pressure adjustment device |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS6269034A (en) * | 1985-09-24 | 1987-03-30 | Hitachi Ltd | Temperature regulator |
| DE4103769C1 (en) * | 1991-02-08 | 1992-06-17 | Draegerwerk Ag, 2400 Luebeck, De | |
| CN2168275Y (en) * | 1992-12-30 | 1994-06-08 | 郭福玲 | Internal-pressure automatic regulating device for sealed container |
| US20050087238A1 (en) * | 2003-10-22 | 2005-04-28 | Wilson Robert E. | Compressed air control system refinements |
| JP4819581B2 (en) * | 2006-06-02 | 2011-11-24 | 富士フイルム株式会社 | Liquid storage device and image forming apparatus |
| CN201466727U (en) * | 2009-05-26 | 2010-05-12 | 长沙矿山研究院 | Deep sea pressure compensator |
| CN201886370U (en) * | 2010-12-16 | 2011-06-29 | 河南省中分仪器有限公司 | Intelligent gas flow rate and pressure controller |
| CN103092222B (en) * | 2012-12-31 | 2016-01-27 | 孙晓君 | A kind of pressure precise adjustment device |
-
2013
- 2013-01-04 CN CN201310000145.7A patent/CN103116370B/en active Active
- 2013-12-23 WO PCT/CN2013/090206 patent/WO2014106437A1/en active Application Filing
- 2013-12-30 CA CA2838390A patent/CA2838390A1/en not_active Abandoned
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102103381A (en) * | 2009-12-16 | 2011-06-22 | 上海神开石油化工装备股份有限公司 | Electron pressure controller |
| CN102385397A (en) * | 2011-09-29 | 2012-03-21 | 北京振兴计量测试研究所 | High-precision pressure control system based on high-speed solenoid valve |
| CN102677024A (en) * | 2012-05-28 | 2012-09-19 | 上海华力微电子有限公司 | Cavity pressure adjustment method and cavity pressure adjustment device |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2014106437A1 (en) | 2014-07-10 |
| CN103116370A (en) | 2013-05-22 |
| CA2838390A1 (en) | 2014-07-04 |
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Effective date of registration: 20160825 Address after: 065000 Langfang City, Hebei Province Economic and Technological Development Zone Guangyang Cheong Cheung Road No. 10 Patentee after: Watson Measurement & Control Technology (Hebei) Co., Ltd. Address before: 100191 Beijing city Haidian District North Fourth Ring Road Yingu Building No. 9 2304B Patentee before: Beijing Yingu Kexun Information Technology Co., Ltd. |