CN102589809A - Portable leak detector calibration system and method - Google Patents
Portable leak detector calibration system and method Download PDFInfo
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- CN102589809A CN102589809A CN2012100248347A CN201210024834A CN102589809A CN 102589809 A CN102589809 A CN 102589809A CN 2012100248347 A CN2012100248347 A CN 2012100248347A CN 201210024834 A CN201210024834 A CN 201210024834A CN 102589809 A CN102589809 A CN 102589809A
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Abstract
The invention relates to a portable leak detector calibration system and a method, belonging to the field of measurement technologies. The calibration system comprises a first valve 1, a second valve 3, a third valve 4, a fourth valve 6, a fifth valve 8, a sixth valve 10, a seventh valve 11, an eighth valve 12, a ninth valve 14, a tenth valve 15, an eleventh valve 17, a twelfth valve 19, a first vacuum gauge 2, a second vacuum gauge 18, a third vacuum gauge 22, a 1L pressure stabilizing chamber 5, a molecular pump 7, a mechanical pump 9, a 1L volume-metered chamber 13, a 0.1L volume-metered chamber 16, a positive pressure leak 20 and a thermostatic chamber 21. The system has the characteristics of simple structure, high accuracy, little weight, small volume, portability and the like, and is used for calibrating the operating mode of a suction gun of a leak detector on site or in a laboratory; and with the adoption of the system, the development cost is lowered, the calibration efficiency is increased, and the calibration can be achieved on site or on line, so that the calibration environment can be basically the same as a service environment, and the calibration accuracy is improved.
Description
Technical field
The present invention relates to a kind of portable leak locator calibration system and method, be specifically related to a kind of laboratory, scene and on-line calibration, test macro and method that is used for leak locator, belong to field of measuring technique.
Background technology
Leak detection technology is significant in research and production such as space flight, surface, microelectronics, sun power, photoelectron; Along with scientific-technical progress and development; Not only need accurately calibrate leak locator; And need scene or on-line calibration test in many application, and make calibration condition and service condition basic identical like this, not only improved the precision of leaking calibration; And avoided because the system of quitting work is sent to the economic loss and the time waste of laboratory calibration, therefore the urgent demand of on-the-spot or online leak locator calibration testing has been proposed in scientific research, the manufacturing.
Document " Pressure Leak Calibration Apparatus "; " vacuum science and technological journal " the 21st volume, the 1st phase of calendar year 2001, the 55th～59 page ", introduced the PRESSURE LEAK CALIBRATION method, system only is used to calibrate positive pressure leak hole; accurately known leak rate can not be provided; and complicated huge, cost is expensive, only is adapted at laboratory calibration usefulness, can not satisfy the calibration requirements of on-the-spot leak locator.
Therefore; Characteristics such as that the system of this patent development has is simple in structure, precision is high, weight is little, volume is little, portable are used for on-the-spot or online leak locator calibration testing, and system's general assembly (TW) is less than 50 kilograms; Overall dimension is less than 50mm * 30mm * 60mm, and calibration range is 10
-6～10
-2Pam
3/ s, combined standard uncertainty have satisfied the on-the-spot or online accurate calibration requirements of present most field to leak locator suction gun mode of operation less than 10%.
Summary of the invention
The objective of the invention is in order to overcome the defective of above-mentioned prior art,, propose a kind of portable leak locator calibration system and method to the field calibration demand of leak locator suction gun mode of operation.
The objective of the invention is to realize through following technical scheme.
A kind of portable leak locator calibration system of the present invention; Its external unit is a leak locator to be measured, comprising: first valve 1, second valve 3, the 3rd valve 4, the 4th valve 6, the 5th valve 8, the 6th valve 10, the 7th valve 11, the 8th valve 12, the 9th valve 14, the tenth valve the 15, the 11 valve the 17, the 12 valve 19, first vacuum gauge 2, second vacuum gauge 18, the 3rd vacuum gauge 22,1L pressure stabilizing chamber 5, molecular pump 7, mechanical pump 9,1L constant volume chamber 13,0.1L constant volume chamber 16, positive pressure leak hole 20 and constant temperature oven 21;
Above-mentioned second vacuum gauge 18 and the 3rd vacuum gauge 22 are electric capacity rule; Second valve 3, the 6th valve 10, the 7th valve 11, the 8th valve 12, the 9th valve 14, the tenth valve the 15, the 11 valve the 17, the 12 valve 19 are ball valve; The 4th valve 6 is an angle valve, and the 3rd valve 4 is a micrometering valve;
One end of first valve 1 is connected with source of the gas; The other end is connected with pressure stabilizing chamber 5 with second valve 3, the 3rd valve 4; The other end of second valve 3 is connected with first vacuum gauge 2; The other end of pressure stabilizing chamber 5 is connected with the 4th valve 6; The bleeding point of molecular pump 7 is connected with the 4th valve 6, the 6th valve 10, and the exhausr port of molecular pump 7 is connected with the 5th valve 8, and the other end of the 5th valve 8 is connected with mechanical pump 9; The other end of the other end of the 6th valve 10 and the 3rd valve 4, the 7th valve 11, the 8th valve 12, the tenth valve 15 are connected; The other end of the 7th valve 11 is connected with second vacuum gauge 18, the 3rd vacuum gauge 22, and the other end of the 8th valve 12 links to each other with an end of 1L constant volume chamber 13, and the other end of 1L constant volume chamber 13 is connected with the 9th valve 14; The other end of the tenth valve 15 links to each other with an end of 0.1L constant volume chamber 16; 0.1L the other end the 11 valve 17 of constant volume chamber 16 connects, the other end of the other end of the 9th valve 14, the other end of the 11 valve 17, second vacuum gauge 18 and an end of the 12 valve 19 connect through four-way, and the other end of the 12 valve 19 is connected with the inlet of positive pressure leak hole 20; The 7th valve 11, the 8th valve 12, the 9th valve 14, the tenth valve the 15, the 11 valve the 17, the 12 valve 19, second vacuum gauge 18, the 3rd vacuum gauge 22,1L constant volume chamber 13,0.1L constant volume chamber 16, positive pressure leak hole 20 are placed in the constant temperature oven 21, and leak locator to be measured links to each other with the outlet of positive pressure leak hole 20;
Preferably, it is characterized in that characteristics such as that system has is simple in structure, precision is high, measurement range is wide, weight little (less than 50 kilograms), volume are little, portable can be used for on-the-spot and leak locator is calibrated in the laboratory under the suction gun mode of operation.The variation that system adopts high precision differential pressure type capacitor thin film rule 18 (full scale is 100Torr) to measure the constant volume chamber pressure; Adopt constant temperature oven to reduce the influence of temperature fluctuation to measuring accuracy; Change the leakage leak rate that provides known through regulating the small opening inlet pressure, can realize 10 like this
-6～10
-2Pam
3The calibration of/s scope.
A kind of portable leak locator calibration system of the present invention to the step that leak locator carries out scene or laboratory calibration is:
S1, will provide the positive pressure leak hole 20 of standard leak rate to be installed on the 12 valve 19, and inspection installs sealing, the suction gun of leak locator is aimed at the outlet of positive pressure leak hole 20;
S2, open mechanical pump 9, second valve 3, the 3rd valve 4, the 4th valve 6, the 5th valve 8, the 6th valve 10, the 7th valve 11, the 8th valve 12, the 9th valve 14, the tenth valve the 15, the 11 valve the 17, the 12 valve 19 successively; Pressure stabilizing chamber 5 and valve pipe are bled; Open first vacuum gauge 2,, start molecular pump 7 when first vacuum gauge, 2 gaging pressures during less than 20Pa; Start constant temperature oven 21, open leak locator;
S3, open second vacuum gauge 18, the 3rd vacuum gauge 22, vacuum tightness is less than 1 * 10 in pipeline
-1During Pa, second vacuum gauge 18, the 3rd vacuum gauge 22 are returned to zero;
S4, close the 3rd valve 4, the 4th valve 6, the 6th valve the 10, the 12 valve 19; Open first valve 1 and in pressure stabilizing chamber 5, introduce the gas of air pressure greater than a standard atmospheric pressure; Gaseous tension adopts first vacuum gauge 2 to measure in the pressure stabilizing chamber, and valve-off 1 then;
If the calibration range that S5 sets is 10
-4～10
-2Pam
3/ s, choosing volume is the constant volume chamber 13 of 1L, closes the tenth valve the 15, the 11 valve 17; Introduce the gas of air pressure through the 3rd valve 4, close the 3rd valve 4 then, when identical and second vacuum gauge, 18 indicated values are zero when second vacuum gauge, 18 pressure at two ends greater than a standard atmospheric pressure; Close the 7th valve 11, the 8th valve 12; Open the 12 valve 19 then, in the 8th valve 12 is long-pending to positive pressure leak hole 20 these segment bodies, during the gaseous tension steady change, write down current time t
1With second vacuum gauge, 18 indicated value P
1, wait until time t
2The time, writing time t
2With second vacuum gauge, 18 indicated value P
2, then the malleation leak rate of standard does
V wherein
0Be the volume that the 8th valve 12 arrives between the positive pressure leak hole 20, write down the indicated value Q of leak locator during this period
L
If S6 is calibrated scope 10
-6～10
-4Pam
3/ s, choosing volume is the constant volume chamber 16 of 0.1L, closes the 8th valve 12, the 9th valve 14; Introduce the gas of air pressure through the 3rd valve 4, close the 3rd valve 4 then, when identical and second vacuum gauge, 18 indicated values are zero when second vacuum gauge, 18 pressure at two ends greater than a standard atmospheric pressure; Close the 7th valve 11, the tenth valve 15; Open the 12 valve 19 then, in the tenth valve 15 is long-pending to positive pressure leak hole 20 these segment bodies, during the gaseous tension steady change, write down current time t
1With second vacuum gauge, 18 indicated value P
1, wait until time t
2The time, writing time t
2With second vacuum gauge, 18 indicated value P
2, then the malleation leak rate of standard does
V wherein
0Be the volume that the tenth valve 15 arrives between the positive pressure leak hole 20, write down the indicated value Q of leak locator during this period
L
S7, through standard malleation leak rate Q
sWith leak locator indicated value Q
LRadiometer calculate calibration factor
Preferably, in the operation of the outlet of the suction gun of leak locator being aimed at positive pressure leak hole 20 in said step S1, the probe gas that flows out from small opening will all suck suction gun, guarantees that simultaneously the positive pressure leak hole top hole pressure is a standard atmospheric pressure;
Preferably, first vacuum gauge 2 is the compound vacuum gauge of gamut in said step S2, and its measurement range will cover 10
-3～2.5 * 10
5Pa;
Preferably; In said step S3, need stablize more than 4 hours before second vacuum gauge 18,22 zeroings of the 3rd vacuum gauge; Wherein second vacuum gauge 18 is that full scale is the differential pressure type capacitor thin film rule of 100Torr; Its measuring accuracy is that 0.2%, the three vacuum gauge 22 less than full scale is that full scale is the absolute pressure formula capacitor thin film rule of 5000Torr, and its measuring accuracy is less than 0.2% of full scale;
Preferably, the gas of in said step S4, in pressure stabilizing chamber 5, introducing adopts 99.999% high-purity gas;
Preferably, volume V in said step S5, S6
0Be known;
Preferably, Q in said step S5, S6
L, Q
SMean value at least six measurements;
Preferably, Q in said step S5, S6
sCombined standard uncertainty is less than 10%.
Beneficial effect
The present invention is a kind of portable leak locator calibration system and method; That system has is simple in structure, precision is high, weight is little, volume is little, characteristics such as portable; Be used for the calibration of scene or laboratory leak locator suction gun mode of operation, system not only reduces development cost, has improved the efficient of calibration; And can on-the-spot or online completion calibrate; This makes calibration environment and environment for use basic identical, has improved calibration accuracy, has solved in scientific research, enterprise production, the foreign trade demand to leak locator high precision, scene or laboratory calibration.
Description of drawings
Fig. 1 is the principle schematic of a kind of portable leak locator calibration system of the present invention.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is further specified.
A kind of portable leak locator calibration system; Its external unit is a leak locator to be measured; As shown in Figure 1, comprising: first valve 1, second valve 3, the 3rd valve 4, the 4th valve 6, the 5th valve 8, the 6th valve 10, the 7th valve 11, the 8th valve 12, the 9th valve 14, the tenth valve the 15, the 11 valve the 17, the 12 valve 19, first vacuum gauge 2, second vacuum gauge 18, the 3rd vacuum gauge 22,1L pressure stabilizing chamber 5, molecular pump 7, mechanical pump 9,1L constant volume chamber 13,0.1L constant volume chamber 16, positive pressure leak hole 20 and constant temperature oven 21;
Above-mentioned second vacuum gauge 18 and the 3rd vacuum gauge 22 are electric capacity rule; Second valve 3, the 6th valve 10, the 7th valve 11, the 8th valve 12, the 9th valve 14, the tenth valve the 15, the 11 valve the 17, the 12 valve 19 are ball valve; The 4th valve 6 is an angle valve, and the 3rd valve 4 is a micrometering valve;
One end of first valve 1 is connected with source of the gas; The other end is connected with pressure stabilizing chamber 5 with second valve 3, the 3rd valve 4; The other end of second valve 3 is connected with first vacuum gauge 2; The other end of pressure stabilizing chamber 5 is connected with the 4th valve 6; The bleeding point of molecular pump 7 is connected with the 4th valve 6, the 6th valve 10, and the exhausr port of molecular pump 7 is connected with the 5th valve 8, and the other end of the 5th valve 8 is connected with mechanical pump 9; The other end of the other end of the 6th valve 10 and the 3rd valve 4, the 7th valve 11, the 8th valve 12, the tenth valve 15 are connected; The other end of the 7th valve 11 is connected with second vacuum gauge 18, the 3rd vacuum gauge 22, and the other end of the 8th valve 12 links to each other with an end of 1L constant volume chamber 13, and the other end of 1L constant volume chamber 13 is connected with the 9th valve 14; The other end of the tenth valve 15 links to each other with an end of 0.1L constant volume chamber 16; 0.1L the other end the 11 valve 17 of constant volume chamber 16 connects, the other end of the other end of the 9th valve 14, the other end of the 11 valve 17, second vacuum gauge 18 and an end of the 12 valve 19 connect through four-way, and the other end of the 12 valve 19 is connected with the inlet of positive pressure leak hole 20; The 7th valve 11, the 8th valve 12, the 9th valve 14, the tenth valve the 15, the 11 valve the 17, the 12 valve 19, second vacuum gauge 18, the 3rd vacuum gauge 22,1L constant volume chamber 13,0.1L constant volume chamber 16, positive pressure leak hole 20 are placed in the constant temperature oven 21, and leak locator to be measured links to each other with the outlet of positive pressure leak hole 20;
Preferably, it is characterized in that characteristics such as that system has is simple in structure, precision is high, measurement range is wide, weight little (less than 50 kilograms), volume are little, portable can be used for on-the-spot and leak locator is calibrated in the laboratory under the suction gun mode of operation.The variation that system adopts high precision differential pressure type capacitor thin film rule 18 (full scale is 100Torr) to measure the constant volume chamber pressure; Adopt constant temperature oven to reduce the influence of temperature fluctuation to measuring accuracy; Change the leakage leak rate that provides known through regulating the small opening inlet pressure, can realize 10 like this
-6～10
-2Pam
3The calibration of/s scope.
With above-mentioned portable leak locator calibration system be to the step that leak locator carries out scene or laboratory calibration:
S1, will provide the positive pressure leak hole 20 of standard leak rate to be installed on the 12 valve 19, and inspection installs sealing, the suction gun of leak locator is aimed at the outlet of positive pressure leak hole 20;
S2, open mechanical pump 9, second valve 3, the 3rd valve 4, the 4th valve 6, the 5th valve 8, the 6th valve 10, the 7th valve 11, the 8th valve 12, the 9th valve 14, the tenth valve the 15, the 11 valve the 17, the 12 valve 19 successively; Pressure stabilizing chamber 5 and valve pipe are bled; Open first vacuum gauge 2,, start molecular pump 7 when first vacuum gauge, 2 gaging pressures during less than 20Pa; Start constant temperature oven 21, open leak locator;
S3, open second vacuum gauge 18, the 3rd vacuum gauge 22, vacuum tightness is less than 1 * 10 in pipeline
-1During Pa, second vacuum gauge 18, the 3rd vacuum gauge 22 are returned to zero;
S4, close the 3rd valve 4, the 4th valve 6, the 6th valve the 10, the 12 valve 19; Open first valve 1 and in pressure stabilizing chamber 5, introduce the gas of air pressure greater than a standard atmospheric pressure; Gaseous tension adopts first vacuum gauge 2 to measure in the pressure stabilizing chamber, and valve-off 1 then;
If the calibration range that S5 sets is 10
-4～10
-2Pam
3/ s, choosing volume is the constant volume chamber 13 of 1L, closes the tenth valve the 15, the 11 valve 17; Introduce the gas of air pressure through the 3rd valve 4, close the 3rd valve 4 then, when identical and second vacuum gauge, 18 indicated values are zero when second vacuum gauge, 18 pressure at two ends greater than a standard atmospheric pressure; Close the 7th valve 11, the 8th valve 12; Open the 12 valve 19 then, in the 8th valve 12 is long-pending to positive pressure leak hole 20 these segment bodies, during the gaseous tension steady change, write down current time t
1With second vacuum gauge, 18 indicated value P
1, wait until time t
2The time, writing time t
2With second vacuum gauge, 18 indicated value P
2, then the malleation leak rate of standard does
V wherein
0Be the volume that the 8th valve 12 arrives between the positive pressure leak hole 20, write down the indicated value Q of leak locator during this period
L
If S6 is calibrated scope 10
-6～10
-4Pam
3/ s, choosing volume is the constant volume chamber 16 of 0.1L, closes the 8th valve 12, the 9th valve 14; Introduce the gas of air pressure through the 3rd valve 4, close the 3rd valve 4 then, when identical and second vacuum gauge, 18 indicated values are zero when second vacuum gauge, 18 pressure at two ends greater than a standard atmospheric pressure; Close the 7th valve 11, the tenth valve 15; Open the 12 valve 19 then, in the tenth valve 15 is long-pending to positive pressure leak hole 20 these segment bodies, during the gaseous tension steady change, write down current time t
1With second vacuum gauge, 18 indicated value P
1, wait until time t
2The time, writing time t
2With second vacuum gauge, 18 indicated value P
2, then the malleation leak rate of standard does
V wherein
0Be the volume that the tenth valve 15 arrives between the positive pressure leak hole 20, write down the indicated value Q of leak locator during this period
L
S7, through standard malleation leak rate Q
sWith leak locator indicated value Q
LRadiometer calculate calibration factor
Preferably, in the operation of the outlet of the suction gun of leak locator being aimed at positive pressure leak hole 20 in said step S1, the probe gas that flows out from small opening will all suck suction gun, and the positive pressure leak hole top hole pressure is a standard atmospheric pressure simultaneously;
Preferably, first vacuum gauge 2 is the compound vacuum gauge of gamut in said step S2, and its measurement range will cover 10
-3～2.5 * 10
5Pa;
Preferably; In said step S3, need stablize more than 4 hours before second vacuum gauge 18,22 zeroings of the 3rd vacuum gauge; Wherein second vacuum gauge 18 is that full scale is the differential pressure type capacitor thin film rule of 100Torr; Its measuring accuracy is that 0.2%, the three vacuum gauge 22 less than full scale is that full scale is the absolute pressure formula capacitor thin film rule of 5000Torr, and its measuring accuracy is less than 0.2% of full scale;
Preferably, the gas of in said step S4, in pressure stabilizing chamber 5, introducing adopts 99.999% high-purity gas;
Preferably, volume V in said step S5, S6
0Be known;
Preferably, Q in said step S5, S6
L, Q
SMean value at least six measurements;
Preferably, Q in said step S5, S6
sCombined standard uncertainty is less than 10%.
Embodiment
Above-mentioned portable leak locator calibration system is carried out scene or laboratory calibration to leak locator, the steps include:
S1, will provide the positive pressure leak hole 20 of standard leak rate to be installed on the 12 valve 19, and inspection installs sealing, the suction gun of leak locator is aimed at the outlet of positive pressure leak hole 20;
S2, open mechanical pump 9, second valve 3, the 3rd valve 4, the 4th valve 6, the 5th valve 8, the 6th valve 10, the 7th valve 11, the 8th valve 12, the 9th valve 14, the tenth valve the 15, the 11 valve the 17, the 12 valve 19 successively; Pressure stabilizing chamber 5 and valve pipe are bled; Open first vacuum gauge 2,, start molecular pump 7 when first vacuum gauge, 2 gaging pressures during less than 20Pa; Start constant temperature oven 21, open leak locator;
S3, open second vacuum gauge 18, the 3rd vacuum gauge 22, vacuum tightness is less than 1 * 10 in pipeline
-1During Pa, second vacuum gauge 18, the 3rd vacuum gauge 22 are returned to zero;
S4, close the 3rd valve 4, the 4th valve 6, the 6th valve the 10, the 12 valve 19, open first valve 1 and in pressure stabilizing chamber 5, introduce 3.5 * 10
5High-purity helium (99.999%) of Pa pressure, helium pressure adopts first vacuum gauge 2 to measure in the pressure stabilizing chamber, and valve-off 1 then;
If the calibration range that S5 sets is 10
-4～10
-2Pam
3/ s, choosing volume is the constant volume chamber 13 of 1L, closes the tenth valve the 15, the 11 valve 17; Introduce the gas of air pressure through the 3rd valve 4, close the 3rd valve 4 then, when identical and second vacuum gauge, 18 indicated values are zero when second vacuum gauge, 18 pressure at two ends greater than a standard atmospheric pressure; Close the 7th valve 11, the 8th valve 12; Open the 12 valve 19 then, in the 8th valve 12 is long-pending to positive pressure leak hole 20 these segment bodies, during the gaseous tension steady change, write down current time t
1Be 0 second and second vacuum gauge, 18 indicated value P
1Be 0Pa, after 120 seconds, writing time t
2Be 120 seconds and second vacuum gauge, 18 indicated value P
2For (1450Pa), then the malleation leak rate of standard does
V wherein
0Be the 8th valve 12 to the volume between the positive pressure leak hole 20 (measured value is 1.256L), write down the indicated value Q of leak locator during this period
LBe 1.32 * 10
-2Pam
3/ s, then
If S6 is calibrated scope 10
-6～10
-4Pam
3/ s, choosing volume is the constant volume chamber 16 of 0.1L, closes the 8th valve 12, the 9th valve 14, introducing air pressure through the 3rd valve 4 is 2.0 * 10
5The gas of Pa; Close the 3rd valve 4 then; When identical and second vacuum gauge, 18 indicated values are zero when second vacuum gauge, 18 pressure at two ends, close the 7th valve 11, the tenth valve 15, open the 12 valve 19 then; In the tenth valve 15 is long-pending to positive pressure leak hole 20 these segment bodies, during the gaseous tension steady change, write down current time t
1Be 0 second and second vacuum gauge, 18 indicated value P
1Be 0Pa, after 300 seconds, writing time t
2Be 300 seconds and second vacuum gauge, 18 indicated value P
2Be 56Pa, then the malleation leak rate of standard does
V wherein
0Be the tenth valve 15 to the volume between the positive pressure leak hole 20 (measured value is 0.114L), write down the indicated value Q of leak locator during this period
L=1.90 * 10
-2Pam
3/ s, then
S7, the average calibration factor S=1.14 that is calibrated within the specific limits at last.
The above is preferred embodiment of the present invention, and the present invention should not be confined to the disclosed content of this embodiment and accompanying drawing.Everyly do not break away from the equivalence of accomplishing under the disclosed spirit of the present invention or revise, all fall into the scope of the present invention's protection.
Claims (6)
1. portable leak locator calibration system; Its external unit is a leak locator to be measured, it is characterized in that calibration system comprises: first valve (1), second valve (3), the 3rd valve (4), the 4th valve (6), the 5th valve (8), the 6th valve (10), the 7th valve (11), the 8th valve (12), the 9th valve (14), the tenth valve (15), the 11 valve (17), the 12 valve (19), first vacuum gauge (2), second vacuum gauge (18), the 3rd vacuum gauge (22), 1L pressure stabilizing chamber (5), molecular pump (7), mechanical pump (9), 1L constant volume chamber (13), 0.1L constant volume chamber (16), positive pressure leak hole (20) and constant temperature oven (21);
Above-mentioned second vacuum gauge (18) and the 3rd vacuum gauge (22) are electric capacity rule; Second valve (3), the 6th valve (10), the 7th valve (11), the 8th valve (12), the 9th valve (14), the tenth valve (15), the 11 valve (17), the 12 valve (19) are ball valve; The 4th valve (6) is an angle valve, and the 3rd valve (4) is a micrometering valve;
One end of first valve (1) is connected with source of the gas; The other end with second valve (3), (5 are connected the 3rd valve (4) with pressure stabilizing chamber; The other end of second valve (3) is connected with first vacuum gauge (2); The other end of pressure stabilizing chamber (5) is connected with the 4th valve (6); The bleeding point of molecular pump (7) is connected with the 4th valve (6), the 6th valve (10); The exhausr port of molecular pump (7) is connected with the 5th valve (8); The other end of the 5th valve (8) is connected with mechanical pump (9), and the other end of the 6th valve (10) is connected with the other end of the 3rd valve (4), the 7th valve (11), the 8th valve (12), the tenth valve (15), and the other end of the 7th valve (11) is connected with second vacuum gauge (18), the 3rd vacuum gauge (22); The other end of the 8th valve (12) links to each other with an end of 1L constant volume chamber (13); The other end of 1L constant volume chamber (13) is connected with the 9th valve (14), and the other end of the tenth valve (15) links to each other with an end of 0.1L constant volume chamber (16), and the other end the 11 valve (17) of 0.1L constant volume chamber (16) connects; The other end of the other end of the 9th valve (14), the other end of the 11 valve (17), second vacuum gauge (18) and an end of the 12 valve (19) connect through four-way; The other end of the 12 valve (19) is connected with the inlet of positive pressure leak hole (20), and the 7th valve (11), the 8th valve (12), the 9th valve (14), the tenth valve (15), the 11 valve (17), the 12 valve (19), second vacuum gauge (18), the 3rd vacuum gauge (22), 1L constant volume chamber (13), 0.1L constant volume chamber (16), positive pressure leak hole (20) are placed in the constant temperature oven (21), and leak locator to be measured links to each other with the outlet of positive pressure leak hole (20).
2. a kind of portable leak locator calibration system according to claim 1 is characterized in that this system to the step that leak locator carries out scene or laboratory calibration is:
S1, will provide the positive pressure leak hole (20) of standard leak rate to be installed on the 12 valve (19), and inspection installs sealing, the suction gun of leak locator is aimed at the outlet of positive pressure leak hole (20);
S2, open mechanical pump (9), second valve (3), the 3rd valve (4), the 4th valve (6), the 5th valve (8), the 6th valve (10), the 7th valve (11), the 8th valve (12), the 9th valve (14), the tenth valve (15), the 11 valve (17), the 12 valve (19) successively; Pressure stabilizing chamber (5) and valve pipe are bled; Open first vacuum gauge (2),, start molecular pump (7) when first vacuum gauge (2) gaging pressure during less than 20Pa; Start constant temperature oven (21), open leak locator;
S3, open second vacuum gauge (18), the 3rd vacuum gauge (22), vacuum tightness is less than 1 * 10 in pipeline
-1During Pa, second vacuum gauge (18), the 3rd vacuum gauge (22) are returned to zero;
S4, close the 3rd valve (4), the 4th valve (6), the 6th valve (10, the 12 valve (19; Open first valve (1) and in pressure stabilizing chamber (5), introduce the gas of air pressure greater than a standard atmospheric pressure; Gaseous tension adopts first vacuum gauge (2) to measure in the pressure stabilizing chamber, and valve-off 1 then;
If the calibration range that S5 sets is 10
-4～10
-2Pam
3/ s; Choosing volume is the constant volume chamber (13) of 1L, closes the tenth valve (15), the 11 valve (17), introduces the gas of air pressure greater than a standard atmospheric pressure through the 3rd valve (4); Close the 3rd valve (4) then; When identical and second vacuum gauge (18) indicated value is zero when second vacuum gauge (18) pressure at two ends, close the 7th valve (11), the 8th valve (12), open the 12 valve (19) then; In the 8th valve (12) is long-pending to this segment body of positive pressure leak hole (20), during the gaseous tension steady change, write down current time t1 and second vacuum gauge (18) indicated value P
1, wait until time t
2The time, writing time t
2With second vacuum gauge (18) indicated value P
2, then the malleation leak rate of standard does
V wherein
0Be that the 8th valve (12) arrives the volume between the positive pressure leak hole (20), write down the indicated value Q of leak locator during this period
L
If S6 is calibrated scope 10
-6～10
-4Pam
3/ s; Choosing volume is the constant volume chamber (16) of 0.1L, closes the 8th valve (12), the 9th valve (14), introduces the gas of air pressure greater than a standard atmospheric pressure through the 3rd valve (4); Close the 3rd valve (4) then; When identical and second vacuum gauge (18) indicated value is zero when second vacuum gauge (18) pressure at two ends, close the 7th valve (11), the tenth valve (15), open the 12 valve (19) then; In the tenth valve (15) is long-pending to this segment body of positive pressure leak hole (20), during the gaseous tension steady change, write down current time t
1With second vacuum gauge (18) indicated value P
1, wait until time t
2The time, writing time t
2With second vacuum gauge (18) indicated value P
2, then the malleation leak rate of standard does
V wherein
0Be that the tenth valve (15) arrives the volume between the positive pressure leak hole (20), write down the indicated value Q of leak locator during this period
L
S7, through standard malleation leak rate Q
sWith leak locator indicated value Q
LRadiometer calculate calibration factor
3. a kind of portable leak locator calibration system according to claim 2; It is characterized in that; In the operation of the outlet of the suction gun of leak locator being aimed at positive pressure leak hole (20) among the said step S1; The probe gas that flows out from small opening will all suck suction gun, guarantees that simultaneously the positive pressure leak hole top hole pressure is a standard atmospheric pressure.
4. a kind of portable leak locator calibration system according to claim 2 is characterized in that first vacuum gauge (2) is the compound vacuum gauge of gamut among the said step S2, and its measurement range will cover 10
-3～2.5 * 10
5Pa.
5. a kind of portable leak locator calibration system according to claim 2; It is characterized in that; Need stablize more than 4 hours before second vacuum gauge (18), the 3rd vacuum gauge (22) zeroing among the said step S3, wherein second vacuum gauge (18) is that full scale is the differential pressure type capacitor thin film rule of 100Torr, and its measuring accuracy is less than 0.2% of full scale; The 3rd vacuum gauge (22) is that full scale is the absolute pressure formula capacitor thin film rule of 5000Torr, and its measuring accuracy is less than 0.2% of full scale.
6. a kind of portable leak locator calibration system according to claim 2 is characterized in that, the gas of in pressure stabilizing chamber (5), introducing among the said step S4 adopts 99.999% high-purity gas.
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| CN104236813A (en) * | 2014-09-04 | 2014-12-24 | 兰州空间技术物理研究所 | Positive pressure leakage hole calibration device and method based on static accumulation attenuation comparison method |
| CN105136389A (en) * | 2015-07-21 | 2015-12-09 | 兰州空间技术物理研究所 | 10-9Pa magnitude vacuum partial pressure calibration device and calibration coefficient acquisition method |
| CN108593216A (en) * | 2018-03-27 | 2018-09-28 | 兰州空间技术物理研究所 | A kind of portable dynamic compares Pressure Leak Calibration Apparatus and method |
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| CN111896191A (en) * | 2020-06-15 | 2020-11-06 | 成都飞机工业（集团）有限责任公司 | On-site calibration method and auxiliary calibration equipment for integral oil tank leakage detection equipment |
| CN112557606A (en) * | 2021-02-28 | 2021-03-26 | 中国工程物理研究院核物理与化学研究所 | Auxiliary device special for measuring performance parameters of gas detector |
| CN114623979A (en) * | 2021-04-06 | 2022-06-14 | 上海东贝真空设备有限公司 | Constant-volume positive-pressure leak hole calibration device and test method thereof |
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| CN103133869A (en) * | 2013-02-05 | 2013-06-05 | 核工业理化工程研究院 | Corrosion-resistant draining hole device capable of being adjusted continuously and calibrated on line in real time |
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| CN111896191B (en) * | 2020-06-15 | 2021-11-30 | 成都飞机工业（集团）有限责任公司 | On-site calibration method and auxiliary calibration equipment for integral oil tank leakage detection equipment |
| CN112557606A (en) * | 2021-02-28 | 2021-03-26 | 中国工程物理研究院核物理与化学研究所 | Auxiliary device special for measuring performance parameters of gas detector |
| CN114623979A (en) * | 2021-04-06 | 2022-06-14 | 上海东贝真空设备有限公司 | Constant-volume positive-pressure leak hole calibration device and test method thereof |
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