CN102400971B - Electric hydaulic linear servo valve - Google Patents
Electric hydaulic linear servo valve Download PDFInfo
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- CN102400971B CN102400971B CN201110234370.8A CN201110234370A CN102400971B CN 102400971 B CN102400971 B CN 102400971B CN 201110234370 A CN201110234370 A CN 201110234370A CN 102400971 B CN102400971 B CN 102400971B
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Abstract
A kind of electric hydaulic linear servo valve, as the electromagnetic linear motor apparatus of actuating valve plunger (2), voice coil type linear motor (10A is equipped respectively at the two end part of valve plunger, 10B), moving coil (the 15A of each linear motor, 15B) directly link with the two end part of valve plunger, at the first and second voice coil type linear motor (10A, control amplifier (20) is connected to 10B), described control amplifier (20) makes two moving coil (15A, 15B) mutual synchronously excitation, so that because of the moving coil (15A of the back and forth speech with regard to moving axially and valve plunger integrally movement, excitation 15B) and the end thrust that produces plays a role in same direction relative to valve plunger (2) additivity ground.
Description
Technical field
The present invention relates to electro-hydraulic servo valve, particularly relate to linear servo valve.
Background technique
Electro-hydraulic servo valve is used for the closed-loop system controlled accurately at a high speed various Labor-saving machinery, testing apparatus etc., is used to the various uses such as positioning control, power control.
As such electro-hydraulic servo valve, general is nozzle flapper type servovalve, but, substitute by patent documentation 1 (Japanese Unexamined Patent Publication 2003-167604 publication) or non-patent literature 1 (Co., Ltd., on August 1st, 2003, VOL.42, No.8,47-50 page are published in rich, Osaka one people (Yuken Kogyo K. K.) work of her rattan, " high-speed linear servovalve ", oily pneumatics technology, daily magazine industry) are known the linear servo valve that it realizes high response speed.
The linear servo valve known by these conventional arts is made up of main part, linear motor portion, position transducer portion, by the more small-sized and linear motor Direct driver valve plunger of brute force.And, by carrying out feedback control with the combination of special control amplifier to valve plunger position, accordingly, realize the speed of response higher than nozzle flapper type servovalve.
Because such linear servo valve is compared with nozzle flapper type servovalve, the not only simple structure of valve plunger drive portion, but also the diametric clearance of valve plunger can be increased, so, with regard to the pollution of working oil, also there is high patience, as the dustiness of working oil, the level of NAS10 level can be used.
Like this, in linear servo valve in the past, the driving for valve plunger is equipped in the end side of valve plunger at the axial voice coil type linear motor producing the monomer of the thrust of twocouese.Linear motor in general linear servo valve such as shown in Figure 3, by longitudinal section E shape yoke 31, be disposed in the permanent magnet field 34 of the cylindrical shape of the inner peripheral surface of the cylindric outside yoke 32 of this yoke 31, the moving coil 35 that axially movably can be configured in the cylindrical shape in the gap between this permanent magnet field 34 and the cylindric central yoke 33 of yoke 31 is formed, form the voice coil type linear motor that moving coil 35 is moved linearly at axial twocouese by the magnetic field that is formed at the gap of outside yoke 32 and central yoke 33 by permanent magnet field 34 and the interaction of field current of flowing to moving coil 35.
In such voice coil type linear motor, by making positive and negative field current flow to moving coil, moving coil and its current direction correspondingly retreat along central yoke in axial advancement.Therefore, the forward-reverse along with this moving coil moves, and in valve body, valve plunger is driven directly and moves back and forth.In voice coil type linear motor, by combining the feedback of the plunger position undertaken by position transducer, controlling the value of field current, the position of the valve plunger directly linked with moving coil can be determined electronically.Accordingly, do not need the adjustment of the neutrality point carrying out valve plunger, can to respond with the nozzle flapper type servovalve step be in a ratio of at a high speed and frequency response realizes high-precision positioning control.
The electric hydaulic linear servo valve voice coil type linear motor of the monomer known by conventional art being equipped in the end side of valve plunger plays the characteristic of excellence as described above as the high-speed linear servovalve of small flow type, but, for the linear servo valve making large discharge, the thrust of linear motor itself is not enough.In order to improve the thrust of the linear motor of monomer itself, the structure of general voice coil type linear motor as shown in Figure 3 must be changed, increasing the permanent magnet field 34 of linear motor and the axial dimension of moving coil 35 as shown in FIG. 4 or increasing diameter.
But, if increase the axial dimension being equipped in the voice coil type linear motor of the monomer of the end side of valve plunger itself, then the total length of moving coil is elongated, and large impact is caused to the coaxality maintained in the moving range of valve plunger and moving coil and parallelism in the gap of permanent magnet field and moving coil.Therefore, in order to maintain good mobility, need the machining accuracy of height, the burden in processing assembling increases, and does not improve machining accuracy if produce, then sacrifice the problem that high response is such.In addition, if increase the diameter of voice coil type linear motor, then the erection space of linear motor becomes large, does not avoid the increase of the moving mass come due to the maximization along with linear motor movable part, sacrifices the problem of the high responsiveness of linear motor itself.
Summary of the invention
The object of the invention is to make voice coil type linear motor itself maximize, one side maintains high responsiveness, and one side makes thrust increase, and realizes the high-speed linear servovalve of large discharge type.
To achieve these goals, the feature of electric hydaulic linear servo valve of the present invention is, comprising:
Valve body 1, it has the port formed with predetermined quantity and configuration;
Valve pocket 3, it to be configured in valve body 1 and to be provided with multiple port;
Valve plunger 2, it by moving to preposition vertically in valve pocket 3, switches the opening and closing of above-mentioned multiple port and port contact each other; With
Make the electromagnetic linear motor apparatus that valve plunger 2 moves axially in valve pocket 3,
Above-mentioned electromagnetic linear motor apparatus possesses:
Be configured in the end side of valve plunger 2 the first voice coil type linear motor 10A and
Be configured in the second voice coil type linear motor 10B of another side of valve plunger 2,
First and second voice coil type linear motor 10A, 10B comprise respectively:
There is longitudinal section E shape yoke 11A, 11B of outside yoke 12A, 12B and central yoke 13A, 13B;
Be configured in permanent magnet field 14A, 14B of the inner peripheral surface of outside yoke 12A, 12B; With
Moving coil 15A, 15B of cartridge type, it is configured in outside yoke 12A, 12B and central gap between yoke 13A, 13B in the mode of being surrounded by above-mentioned permanent magnet field 14A, 14B, with regard to the back and forth speech that moves axially and the movement of above-mentioned valve plunger 2 one
First and second voice coil type linear motor 10A, 10B are connected to control amplifier 20, described control amplifier 20 makes two moving coil 15A, 15B synchronously excitation mutually, so that the end thrust produced because of the excitation of each moving coil 15A, 15B plays a role in same direction relative to above-mentioned valve plunger 2 additivity.
In addition, the feature based on the electric hydaulic linear servo valve of another favourable mode of the present invention is,
The position transducer detecting the axial displacement position of above-mentioned valve plunger 2 is electronically configured in the inside of central yoke 13A, 13B of any one party of first or second voice coil type linear motor 10A, 10B,
Above-mentioned control amplifier 20 carries out position servo control according to the testing signal convection current from this position transducer to the field current of above-mentioned all right one way or the other moving winding 15A, 15B.
Based on of the present invention other good mode electric hydaulic linear servo valve in,
Barrier film 5A, 5B that working oil is cut off from the inflow of above-mentioned valve body 1 side direction first and second voice coil type linear motor 10A, 10B side is configured respectively at the two end part of above-mentioned valve plunger 2.
In the electric hydaulic linear servo valve based on an another favourable mode of the present invention,
In above-mentioned valve body 1, above-mentioned valve pocket 3 has symmetrical port arrangement, and the port arrangement of this symmetry comprises:
Relative to the pressure oil ingress port P axially at central part;
Centered by this pressure oil ingress port P, be positioned at pair of control port A, B of its both sides;
A pair case port T, T outside two is more depended on than this pair control port A, B; With
A pair discharge port DR outside two is more depended on than this pair case port T, T, and,
Above-mentioned valve plunger 2 is corresponding with the port arrangement of above-mentioned symmetry, has relative to the configuration of axially symmetrical shoulder (ラ Application De) groove,
The space, valve body side of being separated by barrier film 5A, 5B at valve plunger 2 two end part is communicated with above-mentioned discharge port DR mutually.
In electric hydaulic linear servo valve of the present invention, because each moving coil of the first and second voice coil type linear motors is directly attached at the two end part of valve plunger, by the excitation con-trol undertaken by control amplifier, two moving coils synchronously move in same direction, so, there is no need the high responsiveness in order to be maintained as valve plunger drive system entirety and each voice coil type linear motor is maximized, mutually valve plunger is acted in same direction by making the thrust of the first and second voice coil type linear motors, the thrust of valve plunger drive system entirety can be made to double, therefore, large discharge type high-speed linear servovalve can be realized.In addition, also linear servo valve for the present invention can be used for pilot valve, form the servovalve of large discharge formula further.
Accompanying drawing explanation
Fig. 1 is the schematic sectional view of the basic concept for illustration of electric hydaulic linear servo valve for the present invention.
Fig. 2 is the general profile chart of the structure of the electric hydaulic linear servo valve of the dry-type representing an embodiment for the present invention.
Fig. 3 is the schematic sectional view of the schematic configuration of the voice coil type linear motor represented based on conventional art.
Fig. 4 is the schematic sectional view representing the example increased by the voice coil type linear motor based on conventional art.
Symbol description
1: valve body; 2: valve plunger; 3: valve pocket; 4A, 4B: plunger end set screw; 5A, 5B: barrier film; 7A, 7B: valve body end plate; 8A, 8B: by pressure ring; 9A, 9B: spline pin; 10A, 10B: voice coil type linear motor; 11A, 11B, 31:E shape yoke; 12A, 12B, 32: outside yoke; 13A, 13B, 33: central yoke; 14A, 14B, 34: permanent magnet field; 15A, 15B, 35: moving coil; 16a, 16B: moving coil bobbin; 17: position transducer through hole; 18: position transducer coil; 19: position transducer core; 20: control amplifier.
Embodiment
Comprise the valve body of port having and formed with predetermined quantity and configuration based on electric hydaulic linear servo valve of the present invention, by moving to preposition vertically in the valve pocket in this valve body, to the valve plunger that the opening and closing of multiple ports and port contact each other that are arranged on valve pocket switch, with the electric hydaulic linear servo valve of the electromagnetic linear motor apparatus making this valve plunger move axially in valve pocket, its special feature important document is, as above-mentioned electromagnetic linear motor apparatus, possesses the first voice coil type linear motor of the end side being configured in valve plunger, with the second voice coil type linear motor of another side being configured in this valve plunger, first and second voice coil type linear motors comprise the longitudinal section E shape yoke with outside yoke and central yoke respectively, be configured in the permanent magnet field of the inner peripheral surface of outside yoke, the gap between outside yoke and central yoke is configured in the mode of being surrounded by above-mentioned permanent magnet field, with regard to move axially back and forth with regard to, with the moving coil of the cartridge type of above-mentioned valve plunger one movement, first and second voice coil type linear motors are connected to control amplifier, described control amplifier makes the mutual synchronously excitation of two moving coils, so that the end thrust produced because of the excitation of each moving coil plays a role in same direction relative to above-mentioned valve plunger additivity.
In this case, preferably will detect the illustrative position sensor configuration of the axial displacement position of above-mentioned valve plunger electronically in the inside of the central yoke of any one party of the first or second voice coil type linear motor, above-mentioned control amplifier carries out position servo control according to the testing signal convection current from this position transducer to the field current of above-mentioned all right one way or the other moving winding.
Oil immersion (wet type) type that the inside that electric hydaulic linear servo valve for the present invention also can make the first and second voice coil type linear motors is full of by the working oil from valve body side, but, in order to maintain further high responsiveness, the barrier film that working oil is cut off from the inflow of above-mentioned valve body side direction first and second voice coil type linear motor-side is preferably configured respectively at the two end part of valve plunger, accordingly, the inside of making voice coil type linear motor is not by non-oil immersion (dry type) type that working oil is full of.
When such dry-type, especially the valve pocket preferably in valve body has symmetrical port arrangement, the port arrangement of the symmetry of being somebody's turn to do comprise relative to axially centered by the pressure oil ingress port (P) of central part at the pair of control port (A of its both sides, B), a pair case port (T outside two is more depended on than this pair control port, T), with a pair discharge port more leaned on than this pair case port outside two, and valve plunger also has the shoulder groove symmetrical relative to axis accordingly to be configured with the port arrangement of this symmetry, the space, valve body side of being separated by barrier film at valve plunger two end part is communicated with above-mentioned discharge port mutually.According to such balanced configuration structure, then when the moving coil of both sides becomes non-excited state, can, by the elastic restoring force of the barrier film of both sides, valve plunger be recovered to neutral position.In addition, even if such as due to the reason of side, external hydraulic loop, certain pressure is created in case port side, also because the space, valve body side at the valve plunger two end part of being separated by barrier film is respectively communicated with discharge port mutually, so, for valve plunger, cancel out each other relative to the pressure balanced deviation of axis.Therefore, when starting the excitation of moving coil, the pressure balance that there is no need for resisting deviation makes valve plunger return the bias current of the initial stage that the gives thrust of neutral position, while starting with excitation, can start without delay to control, maintains high response.
By the following explanation about the suitable mode of execution shown in Fig. 1 and Fig. 2, above-mentioned and feature and advantage in addition of the present invention more clearly can be understood.
In Fig. 1, electric hydaulic linear servo valve comprises: valve body 1, and it has the port formed with predetermined quantity and configuration; Valve plunger 2, it is by moving to preposition vertically in the valve pocket 3 in this valve body 1, switches the opening and closing of the multiple ports be arranged on valve pocket 3 and port contact each other; As the first voice coil type linear motor 10A and the second voice coil type linear motor 10B of the electromagnetic linear motor apparatus making this valve plunger 2 move axially in valve pocket 3, this the first voice coil type linear motor 10A is configured in the end side of valve plunger 2, and this second voice coil type linear motor 10B is configured in another side of valve plunger 2.
First voice coil type linear motor 10A comprises: longitudinal section E shape yoke 11A, and it has cylindric outside yoke 12A and columned central yoke 13A; Be configured in the permanent magnet field 14A of the cylindrical shape of the inner peripheral surface of outside yoke 12A; With the moving coil 15A of cylindrical shape, it is configured in the gap between the yoke 12A and central yoke 13A of outside in the mode of being surrounded by above-mentioned permanent magnet field 14A, moves with above-mentioned valve plunger 2 one with regard to the back and forth speech moved axially.
Equally, the second voice coil type linear motor 10B also comprises: longitudinal section E shape yoke 11B, and it has cylindric outside yoke 12B and columned central yoke 13B; Be configured in the permanent magnet field 14B of the inner peripheral surface of outside yoke 12B; With the moving coil 15B of cylindrical shape, it is configured in the gap between the yoke 12B and central yoke 13B of outside in the mode of being surrounded by above-mentioned permanent magnet field 14B, moves with above-mentioned valve plunger 2 one with regard to the back and forth speech moved axially.
First and second voice coil type linear motor 10A, 10B are connected to control amplifier 20 (Fig. 2), described control amplifier 20 makes the mutual synchronously excitation of two moving coils, so that the end thrust produced because of the excitation of each moving coil 15A, 15B plays a role in same direction relative to above-mentioned valve plunger 2 additivity.This control amplifier such as also can be arranged on and be different from control panel that valve body 1 and linear motor 10A, 10B arrange, but also can make valve body 1, the structure of the mounting type of unit structure that linear motor 10A, 10B are integrated.
As the first and second voice coil type linear motors, even if former state adopts the voice coil type linear motor used in small flow type high-speed linear servovalve in the past, under the state that also can maintain the high responsiveness on an equal basis in former state, make the thrust multiplication acting on valve plunger.
Like this pair voice coil type linear motor 10A, 10B are being equipped in the electric hydaulic linear servo valve at the two ends of valve plunger 2, the effect to unidirectional thrust produced along with the synchronous excitation because of moving coil 15A, 15B of two linear motors, the valve plunger 2 be directly attached between two moving coils moves axially with the thrust of multiplication.Namely, by two moving coil 15A, the synchronous excitation of 15B, with the polarity of its field current correspondingly, valve plunger 2 in valve pocket 3 by the moving coil 15A (or 15B) of a side from end side to one direction release while, by the moving coil 15B (or 15A) of the opposing party from the same direction traction of the other end side direction, if the direction reversion of field current, then valve plunger 2 by the moving coil 15A (or 15B) of a side from end side to traction in the other direction while, released from the opposite direction that the other end side direction is identical by the moving coil 15B (or 15A) of the opposing party.
Therefore, according to electric hydaulic linear servo valve for the present invention, driving for valve plunger can obtain the thrust produced by two the voice coil type linear motors being configured in these plunger two ends simultaneously, so, do not make voice coil type linear motor itself maximize, maintain high responsiveness, and make valve plunger drive thrust to increase, accordingly, the high-speed linear servovalve of large discharge shape can be realized.
This electric hydaulic linear servo valve can be set up the position transducer of the axial displacement position of electronic detection valve plunger.As position transducer, various displacement transducer can be used, but the axial displacement position of the valve plunger for detection electro-hydraulic servo valve, it is suitable that such as design of part is simple, and the differential transformer displacement transducer as non-contact type displacement transducer of responsiveness and linarity excellence.
Differential transformer displacement transducer can be made and will be configured in a coil of middle position in arrange vertically on the elongation line of valve plunger three coaxial annular coils as primary winding, using the coil of two before and after it as Secondary coil, by by the axle center hole of these coils by and to coil between apply electromagnetic induction effect the position transducer core that forms of movable core be attached at the structure of one end of valve plunger.In this case, primary winding according to the alternating signal exciting supplied from outside, axially using point consistent with the center of sensor core for the center of primary winding as zero point, the displacement of sensor core becomes the voltage difference of two Secondary coils and is output.Therefore, if this sensor core and valve plunger end are mechanically linked, then the amount of movement of valve plunger is detected from Secondary coil as the output voltage corresponding to the straight-line displacement amount of sensor core.
But, owing to there is the situation of differential transformer displacement transducer by the impact of the change of external magnetic field, so, when being provided on servovalve together with voice coil type linear motor, need to consider configuration, also can stable detection be carried out in the high magnetic fields of linear motor.If consider this point, then wish most, as the less region of the leakage magnetic flux in voice coil type linear motor, to be configured in the space of the axis central part be arranged in yoke.
Specifically, the through hole coaxial with valve plunger 2 is punched in the inside of the central yoke of any one party of the first or second voice coil type linear motor, the position transducer core that configuration and valve plunger end directly link in this through hole, at the position transducer coil of the position of the inner peripheral surface configuration detection position transducer core of through hole, form differential transformer displacement transducer, make position transducer.In this case, control amplifier can control the field current flowing to all right one way or the other moving winding according to the testing signal from position transducer, carries out servocontrol accurately to the position stability of valve plunger.
In addition, the position transducer be equipped on electric hydaulic linear servo valve for the present invention is not limited to differential transformer displacement transducer as described above, as long as can the sensor of the delayed and Friction load ground detection of straight lines displacement without excessive mensuration, various forms of sensor such as such as linear encoder, linear potentiometer etc. also can be adopted.
Electric hydaulic linear servo valve for the present invention can make the first and second voice coil type linear motor 10A, the wet type type that the inside of 10B is full of by the working oil from valve body 1 side, but, configure respectively working oil from above-mentioned valve body 1 side direction first and second voice coil type linear motor 10A at the two end part of valve plunger 2 by making, the barrier film 5A cut off is carried out in the inflow of 10B side, 5B (Fig. 2), the inside of the voice coil type linear motor of both sides is not by dry-type that working oil is full of, moving coil 15A can be realized under the environment of the fluid resistance do not produced because of working oil, the axial displacement of 15B, further high responsiveness can be maintained.
Like this, when by diaphragm configuration when the two end part of valve plunger 2, make the shoulder groove configuration of the port arrangement of valve pocket 3 and valve plunger 2 relative to axial symmetrical structure if also make, the space, valve body side of being separated by barrier film at valve plunger two end part is communicated with discharge port mutually, then when the moving coil of both sides becomes non-excited state, can, by the elastic restoring force of the barrier film of both sides, valve plunger 2 be recovered to neutral position.And, even if such as due to the reason of side, external hydraulic loop, certain pressure is created in case port side, also because the space, valve body side at the valve plunger two end part of being separated by barrier film is respectively communicated with discharge port mutually, so, for valve plunger, cancel out each other relative to the deviation of axial pressure balance.Therefore, when starting the excitation of moving coil, the pressure balance that there is no need for resisting deviation makes valve plunger return the bias current of the initial stage that the gives thrust of neutral position, can start without delay to control while excitation starts, and maintains high response.
Fig. 2 is the structure of the electric hydaulic linear servo valve of the dry-type representing an embodiment for the present invention.Electric hydaulic linear servo valve shown in basic structure with Fig. 1 is identical.That is, the linear servo valve based on the present embodiment comprises: valve body 1; Be fixed and be configured in valve body and be provided with the valve pocket 3 of multiple port (P, A, B, T); Valve plunger 2, it switches the opening and closing of above-mentioned port (P, A, B, T) and port contact each other by moving to preposition vertically in valve pocket 3; With as the electromagnetic linear motor apparatus that this valve plunger 2 is moved axially in valve pocket the first voice coil type linear motor 10A being configured in the end side of valve plunger 2, be configured in the second voice coil type linear motor 10B of another side of this valve plunger 2.
The valve pocket 3 be configured in valve body 1 that is fixed has symmetrical port arrangement, the port arrangement of this symmetry comprises relative to the pressure oil ingress port P axially at central part, at the pair of control port A of its both sides centered by this port P, B, a pair case port T outside two is more depended on than this pair control port, T, a pair discharge port DR outside two is more depended on than this pair case port, and valve plunger 2 is also corresponding with the port arrangement of this symmetry, have relative to the configuration of axially symmetrical shoulder groove, valve plunger two end part by barrier film 5A, the path of the space, valve body side that 5B separates mutually through punching in valve body 1 is communicated with above-mentioned discharge port DR.The servovalve of such valve constitution is owing to can move axially by valve plunger 2 the contact direction between opening and closing aperture and port controlling each port, so, can be used in positioning with high-speed, high precision the control object hydraulic equipment of the oil hydraulic circuit that various Labor-saving machinery, testing apparatus etc. are connected with outside control, speeds control or power controls.
First voice coil type linear motor 10A comprises: have cylindric outside yoke 12A and the longitudinal section E shape yoke 11A of columned central yoke 13A; Be configured in the permanent magnet field 14A of the cylindrical shape of the inner peripheral surface of outside yoke 12A; With the moving coil 15A of cylindrical shape, it is configured in the gap between the yoke 12A and central yoke 13A of outside in the mode of being surrounded by above-mentioned permanent magnet field 14A, moves with above-mentioned valve plunger 2 one with regard to the back and forth speech moved axially; Moving coil 15A is fixedly carried on the outer circumferential face having bottom tube-like bobbin 16A of the nonmagnetic material being directly linked to an end of valve plunger 2 by set screw 4A by one.Barrier film 5A is made up of the elastic material of the band ring-type folding line moved axially of the valve plunger 2 allowing in fact without resistance to be undertaken by two moving coil 15A, 15B.And, by set screw 4A fixing moving coil bobbin 16A, the barrier film 5A of ring-type is clamped and fixed in an end of valve plunger 2 by its inner circumference edge, the outer periphery of barrier film 5A are fixed with closed state by by pressure ring 8A relative to the end plate 7A be fixed on valve body 1.Accordingly, the space surrounding periphery, valve plunger end is separated by barrier film 5A is fluid tight from linear motor 10A side in valve body 1.The end plate 7A of valve body 1 is arranged to linear motor 10A and the outstanding abreast pin 9A of axis direction, the front end of this pin 9A is inserted into the through hole of the bottom being arranged on moving coil bobbin 16A, plays bobbin 16A, that is, the spline effect of moving coil 15A.Because disposes the spline of moving coil by implementing this pin 9A, stop the rotation around axle center of the plunger produced because of hydrokinetic effect, so, do not exist barrier film 5A be subject to because of plunger 2 from then produce the situation of torsion.Therefore, even if in order to maintain high-speed response, and the barrier film 5A be fixed between plunger 2 and valve body 1 being made thin-walled, also can not damage the durability of barrier film 5A.
Second voice coil type linear motor 10B comprises: the longitudinal section E shape yoke 11B of essence, its central yoke 13B of cylindrical shape having cylindric outside yoke 12B and punch coaxial through hole 17; Be configured in the permanent magnet field 14B of the cylindrical shape of the inner peripheral surface of outside yoke 12B; With the moving coil 15B of cylindrical shape, it is configured in the gap between the yoke 12B and central yoke 13B of outside in the mode of being surrounded by above-mentioned permanent magnet field 14B, moves with above-mentioned valve plunger 2 one with regard to the back and forth speech moved axially.This moving coil 15B is also fixedly carried on by one the outer circumferential face having bottom tube-like bobbin 16B being directly linked to the nonmagnetic material of the other end of valve plunger 2 by set screw 4B.Barrier film 5B is also made up of the elastic material of the band ring-type folding line moved axially of the valve plunger 2 allowing in fact without resistance to be undertaken by two moving coil 15A, 15B, by set screw 4B fixing moving coil bobbin 16B, the barrier film 5B of ring-type is clamped and fixed in the other end of valve plunger 2 by its inner circumference edge, the outer periphery of barrier film 5B are fixed with closed state by by pressure ring 8B relative to the end plate 7B be fixed on valve body 1, accordingly, the space surrounding periphery, valve plunger end is separated by barrier film 5B is fluid tight from linear motor 10B side in valve body 1.The end plate 7B of valve body 1 is also arranged to linear motor 10B and the outstanding abreast pin 9B of axis direction, the front end of this pin 9B is inserted into the through hole of the bottom being arranged on moving coil bobbin 16B, play bobbin 16B, namely, the spline effect of moving coil 15B, as described above, in order to maintain high-speed response, and barrier film 5B can be made thin-walled.In addition, in the present embodiment, as shown in Figure 2, illustrate implanting pin 9A, 9B on the two end plates 7A, 7B of valve body 1, and insert the situation of the through hole of two moving coil bobbin 16A, 16B, but, because both sides moving coil bobbin 16A, 16B are combined with the left and right of valve plunger 2, so with regard to the stop of moving coil, only the pin of a side also can play function certainly.
First and second voice coil type linear motor 10A, 10B are connected with control amplifier 20, this control amplifier 20 makes the mutual synchronously excitation of two moving coils, so that the end thrust produced because of the excitation of each moving coil 15A, 15B plays a role in same direction relative to valve plunger 2 additivity.This control amplifier is mounted on the top of the linear motor 10B of a side, is by realizing to the connector of valve body 1 side with the connection of peripheral control unit.
In the present embodiment, as the position transducer of the position of detection valve plunger 2, coaxially punching in the through hole 17 of the inside of the central yoke 13B in the second voice coil type linear motor 10B with valve plunger 2, insert the position transducer core 19 that configuration directly links with the end winding support screw 4B of valve plunger 2, and the position transducer coil 18 be made up of the coil of three a chain of shapes of position at the inner peripheral surface configuration detection position transducer core 19 of through hole 17, form differential transformer displacement transducer.This sensor and control amplifier 20 tie lines, control amplifier 20 can control the field current flowing to all right one way or the other moving winding 15A, 15B according to the testing signal from position transducer coil 18, carries out servocontrol to the position of valve plunger 2.
Based in the electric hydaulic linear servo valve of the present embodiment, because a pair voice coil type linear motor 10A, 10B to be equipped in the two ends of valve plunger 2, so by making moving coil 15A, 15B synchronous excitation of two linear motors, each moving coil produces thrust to same direction simultaneously, therefore, the valve plunger 2 be directly attached between two moving coils moves axially with the thrust of the linear motor being multiplied to 2 fundamental quantities.Namely, by making two moving coil 15A, 15B synchronous excitations, valve plunger 2 in valve pocket 3 in the polarity with field current correspondingly by the moving coil 15A (or 15B) of a side from end side to while a direction is released, by the moving coil 15B (or 15A) of the opposing party from the same direction traction of the other end side direction, if the polarity inversion of field current, then valve plunger 2 by the moving coil 15A (or 15B) of a side from end side to traction in the other direction while, released from the opposite direction that the other end side direction is identical by the moving coil 15B (or 15A) of the opposing party.
Therefore, according to the electric hydaulic linear servo valve about the present embodiment, due in the driving of valve plunger 2, the thrust of the multiplication produced by two voice coil type linear motors 10A, 10B being configured in these valve plunger two ends can be made to act on valve plunger 2 simultaneously, so, do not make voice coil type linear motor itself maximize, high responsiveness can be maintained, and increase valve plunger driving thrust, accordingly, the high-speed linear servovalve that can make it as large discharge type plays function.
About in the electric hydaulic linear servo valve of the present embodiment, be configured for respectively at the two end part of valve plunger 2 and the inflow of working oil from valve body 1 side direction first and second voice coil type linear motor 10A, 10B side is cut off, for realizing barrier film 5A, 5B of the axial displacement of moving coil 15A, 15B under the environment without the fluid resistance produced because of working oil, voice coil type linear motor 10A, 10B of both sides become the dry-type of high responsiveness.
In addition, make not only at the two end part of valve plunger 2 configuration barrier film, the port arrangement of valve pocket 3 and the shoulder groove of valve plunger 2 is also made to configure with regard to valve plunger is axial, relative to the pressure oil ingress port P symmetrical structure of central part, the space, valve body side of being separated by barrier film 5A, 5B at valve plunger two end part is communicated with discharge port mutually.Therefore, when moving coil 15A, 15B of both sides become non-excited state, can, by the elastic restoring force of barrier film 5A, 5B of both sides, valve plunger 2 be recovered to neutral position.In addition, even if such as due to the reason of side, external hydraulic loop, certain pressure is created in case port T side, because the space, valve body side at the valve plunger two end part of being separated respectively by barrier film 5A, 5B is communicated with discharge port DR mutually, so, for valve plunger 2, cancel out each other relative to the deviation of axial pressure balance.Therefore, when starting the excitation of moving coil 15A, 15B, the bias current applying to give initial stage thrust is not needed, this initial stage thrust is for resisting the pressure balance of deviation, make valve plunger 2 return to neutral position, can start without delay to control while excitation starts, maintain high response.In this case, the neutral position of the machinery of the valve plunger guaranteed by barrier film 5A, 5B of both sides can be corresponding with the dead-center position of the position transducer core 19 forming differential transformer displacement transducer, accordingly, the servocontrol of control amplifier 20 plunger position can also responsively be realized by height at a high speed.
Claims (2)
1. an electric hydaulic linear servo valve, described electric hydaulic linear servo valve comprises:
Valve body (1), it has the port formed with predetermined quantity and configuration;
Valve pocket (3), it to be configured in valve body (1) and to be provided with multiple port;
Valve plunger (2), it by moving to preposition vertically in valve pocket (3), switches the opening and closing of above-mentioned multiple port and port contact each other; With
The electromagnetic linear motor apparatus that valve plunger (2) is moved axially in valve pocket (3), is characterized in that,
Above-mentioned electromagnetic linear motor apparatus possesses:
Be configured in the end side of valve plunger (2) the first voice coil type linear motor (10A) and
Be configured in the second voice coil type linear motor (10B) of another side of valve plunger (2),
First and second voice coil type linear motors (10A, 10B) comprise respectively:
There is longitudinal section E shape yoke (11A, 11B) of outside yoke (12A, 12B) and central yoke (13A, 13B);
Be configured in the permanent magnet field (14A, 14B) of the inner peripheral surface in outside yoke (12A, 12B); With
The moving coil (15A, 15B) of cartridge type, it is configured in the gap between outside yoke (12A, 12B) and central yoke (13A, 13B) in the mode of being surrounded by above-mentioned permanent magnet field (14A, 14B), with regard to the back and forth speech that moves axially and the movement of above-mentioned valve plunger (2) one
First and second voice coil type linear motors (10A, 10B) are connected to control amplifier (20), described control amplifier (20) makes the mutual synchronously excitation of two moving coils (15A, 15B), so that the end thrust produced because of the excitation of each moving coil (15A, 15B) plays a role in same direction relative to above-mentioned valve plunger (2) additivity ground
The barrier film (5A, 5B) that working oil is cut off from the inflow of above-mentioned valve body (1) side direction first and second voice coil type linear motor (10A, 10B) side is configured respectively at the two end part of above-mentioned valve plunger (2),
In above-mentioned valve body (1), above-mentioned valve pocket (3) has symmetrical port arrangement, and the port arrangement of this symmetry comprises:
Relative to the pressure oil ingress port (P) axially at central part;
Centered by this pressure oil ingress port (P), be positioned at the pair of control port (A, B) of its both sides;
A pair case port (T, T) outside two is more leaned on than this pair control port (A, B); With
A pair discharge port (DR) outside two is more leaned on than this pair case port (T, T), and,
Above-mentioned valve plunger (2) is corresponding with the port arrangement of above-mentioned symmetry, has relative to the configuration of axially symmetrical shoulder groove,
The space, valve body side of being separated by barrier film (5A, 5B) at valve plunger (2) two end part is communicated with above-mentioned discharge port (DR) mutually.
2. electric hydaulic linear servo valve as claimed in claim 1, it is characterized in that, the position transducer detecting the axial displacement position of above-mentioned valve plunger (2) is electronically configured in the inside of the central yoke (13A, 13B) of any one party of the first or second voice coil type linear motor (10A, 10B)
Above-mentioned control amplifier (20) carries out position servo control according to the testing signal convection current from this position transducer to the field current of above-mentioned all right one way or the other moving winding (15A, 15B).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010-204288 | 2010-09-13 | ||
| JP2010204288A JP5462753B2 (en) | 2010-09-13 | 2010-09-13 | Electric / hydraulic linear servo valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102400971A CN102400971A (en) | 2012-04-04 |
| CN102400971B true CN102400971B (en) | 2015-09-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110234370.8A Active CN102400971B (en) | 2010-09-13 | 2011-08-16 | Electric hydaulic linear servo valve |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5462753B2 (en) |
| CN (1) | CN102400971B (en) |
| HK (1) | HK1166361A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102808985B (en) * | 2012-07-25 | 2014-08-06 | 广西大学 | Magnetic hydraulic direction control valve |
| JP5870326B1 (en) | 2015-01-22 | 2016-02-24 | サンテスト株式会社 | Voice coil motor and direct acting servo valve using the voice coil motor |
| JP6905616B1 (en) * | 2020-04-02 | 2021-07-21 | 油研工業株式会社 | Flood control equipment with position detector |
| CN113162313B (en) * | 2021-04-15 | 2023-06-23 | 浙大城市学院 | Two-dimensional motor and servo valve |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3641023A1 (en) * | 1986-12-01 | 1988-06-16 | Mainz Gmbh Feinmech Werke | Single-stage, electrohydraulic servo valve |
| CN101196200A (en) * | 2007-12-04 | 2008-06-11 | 北京工业大学 | Double-phase oppositely arranged ultra-magnetostriction self-sensing force feedback grade B servo valve and control method thereof |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61229309A (en) * | 1985-04-03 | 1986-10-13 | Teijin Seiki Co Ltd | Electromagnetic driving device |
| JPH066961B2 (en) * | 1986-04-25 | 1994-01-26 | 株式会社エスジ− | Rotary servo valve |
| JPH0463801U (en) * | 1990-10-11 | 1992-05-29 | ||
| JP2003167604A (en) * | 2001-12-04 | 2003-06-13 | Komatsu Ltd | Parameter identification device in controller of hydraulic equipment |
| JP4695856B2 (en) * | 2004-08-19 | 2011-06-08 | ピー・エス・シー株式会社 | Gas pressure control valve |
-
2010
- 2010-09-13 JP JP2010204288A patent/JP5462753B2/en active Active
-
2011
- 2011-08-16 CN CN201110234370.8A patent/CN102400971B/en active Active
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2012
- 2012-07-18 HK HK12107030.3A patent/HK1166361A1/en unknown
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3641023A1 (en) * | 1986-12-01 | 1988-06-16 | Mainz Gmbh Feinmech Werke | Single-stage, electrohydraulic servo valve |
| CN101196200A (en) * | 2007-12-04 | 2008-06-11 | 北京工业大学 | Double-phase oppositely arranged ultra-magnetostriction self-sensing force feedback grade B servo valve and control method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012057776A (en) | 2012-03-22 |
| CN102400971A (en) | 2012-04-04 |
| JP5462753B2 (en) | 2014-04-02 |
| HK1166361A1 (en) | 2012-10-26 |
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