CN102337509B - Vacuum moving device and method - Google Patents
Vacuum moving device and method Download PDFInfo
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- CN102337509B CN102337509B CN201010234547.XA CN201010234547A CN102337509B CN 102337509 B CN102337509 B CN 102337509B CN 201010234547 A CN201010234547 A CN 201010234547A CN 102337509 B CN102337509 B CN 102337509B
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- 238000013461 design Methods 0.000 abstract description 10
- 230000005540 biological transmission Effects 0.000 description 6
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Abstract
The invention discloses a vacuum moving device, which is used for moving a mobile object in a vacuum cavity and comprises at least one corrugated pipe. The corrugated pipes are arranged in the vacuum cavity, the two ends of each corrugated pipe are closed, one end of each corrugated pipe is fixedly arranged in the vacuum cavity, the other end of each corrugated pipe is connected with the mobile object, each corrugated pipe is filled with a medium and is communicated with a medium source arranged outside the vacuum cavity through a pipeline, and the medium source is used for controlling each corrugated pipe to flex via independently controlling the medium pressure in each corrugated pipe. The invention also discloses a vacuum movement method using the vacuum moving device. The vacuum moving device and the method have a simple, practical and reliable design, the design difficulties and the implementation cost of the vacuum moving device can be greatly reduced. Moreover, more flexible and complex movement of the mobile object can be achieved conveniently.
Description
Technical field
The present invention relates to the mechanical movement means in a kind of vacuum, particularly relate to a kind of vacuum moving device and corresponding vacuum moving method.
Background technology
In order to make the mobile object in vacuum environment, the for example work support in a vacuum chamber, can require to move according to processing procedure, the structure of the vacuum moving device generally adopting at present as shown in Figure 1, wherein, one mobile object 1 ' is arranged in a vacuum chamber 2 ', in order to realize the controlled movement of this mobile object 1 ', one side chamber wall 21 ' of this vacuum chamber 2 ' is provided with an opening 22 ', one end of the sealing of one bellows 3 ' is connected with this mobile object 1 ', the unlimited other end is located on the peripheral region of this opening 22 ' hermetically, utilize this bellows 3 ' just to realize vacuum environment in this vacuum chamber 2 ' and the isolation between atmospheric environment, in addition, one transmission device 4 ' is arranged in this bellows 3 ' and with this mobile object 1 ' and is connected, when this transmission device 4 ' is by a drive unit (not shown), for example a stepper motor drives, thereby along arrow A ' shown in direction while moving back and forth, this mobile object 1 ' just can be similarly along arrow A under the drive of this transmission device 4 ' ' shown in direction move back and forth.In addition, because the corrugated tube wall of bellows can stretch arbitrarily or fold, therefore bellows can stretch arbitrarily, as long as this flexible its flexible limit that is no more than, bellows can, the moving back and forth in process of this mobile object, remain the good isolation between this vacuum chamber 2 ' and atmospheric environment.
But, in above-mentioned design, still exist more serious defect: one, flexible movement in order to ensure this transmission device 4 ' in this bellows 3 ', the size of this opening 22 ' must be larger, and needs be located on unlimited one end of this bellows 3 ' the peripheral region of this opening 22 ' hermetically, so, not only need original vacuum chamber structure to carry out larger modification, thereby make existing this vacuum moving device complex structure, cost higher, but also likely increase the design difficulty of other vacuum plant on this vacuum chamber 2 '; Two, this transmission device 4 ' need to put in this vacuum chamber 2 ' and can control the movement of this mobile object 1 ' from atmospheric environment, and due to the stopping of a side chamber wall 21 ' of this vacuum chamber 2 ', the move mode that will make this mobile object 1 ' to realize is comparatively limited.
Summary of the invention
The technical problem to be solved in the present invention is that vacuum moving device of the prior art design is complicated, the limited defect of cost move mode higher and that can realize in order to overcome, and provides a kind of simple and reliable and can realize mobile object flexible complicated mobile vacuum moving device and corresponding vacuum moving method in a vacuum.
The present invention solves above-mentioned technical problem by following technical proposals: a kind of vacuum moving device, for moving a mobile object at a vacuum chamber, its feature is, it comprises that at least one is located at the bellows of the closed at both ends in this vacuum chamber, one end of each bellows is all fixedly arranged in this vacuum chamber, the other end is all connected with this mobile object, in each bellows, be all filled with medium, and all by pipeline, be communicated with the medium source outside this vacuum chamber, this medium source stretches each bellows by the medium pressure controlling independently in each bellows.
Preferably, this mobile object has a pivot, and the medium pressure in each bellows and each bellows are set to the position that is connected of this mobile object: the flexible active force that this mobile object is applied of all bellowss non-vanishing but be zero with respect to the resultant moment of this pivot with joint efforts.
Preferably, this mobile object has a pivot, and the medium pressure in each bellows and each bellows are set to the position that is connected of this mobile object: making a concerted effort of the flexible active force that this mobile object is applied of all bellowss is zero but non-vanishing with respect to the resultant moment of this pivot.
Preferably, this mobile object has a pivot, and the medium pressure in each bellows and each bellows are set to the position that is connected of this mobile object: the flexible active force that this mobile object is applied of all bellowss non-vanishing and also non-vanishing with respect to the resultant moment of this pivot with joint efforts.
Preferably, this vacuum moving device also comprises a guide rail of being located in this vacuum chamber, for the movement to this mobile object, guides.
Another technical scheme of the present invention is: a kind of vacuum moving method that utilizes above-mentioned vacuum moving device to realize, its feature is, utilize this medium source to control independently medium pressure in each bellows so that each bellows stretches, and utilize the making a concerted effort and resultant moment of the flexible active force that this mobile object is applied of all bellowss, make this mobile object carry out translation and/or rotation.
Preferably, this mobile object has a pivot, and the medium pressure in each bellows and each bellows are set to the position that is connected of this mobile object: the flexible active force that this mobile object is applied of all bellowss non-vanishing but be zero with respect to the resultant moment of this pivot with joint efforts.
Preferably, this mobile object has a pivot, and the medium pressure in each bellows and each bellows are set to the position that is connected of this mobile object: making a concerted effort of the flexible active force that this mobile object is applied of all bellowss is zero but non-vanishing with respect to the resultant moment of this pivot.
Preferably, this mobile object has a pivot, and the medium pressure in each bellows and each bellows are set to the position that is connected of this mobile object: the flexible active force that this mobile object is applied of all bellowss non-vanishing and also non-vanishing with respect to the resultant moment of this pivot with joint efforts.
Preferably, this vacuum moving device also comprises a guide rail of being located in this vacuum chamber, utilizes this guide rail to guide the movement of this mobile object.
Positive progressive effect of the present invention is: simplicity of design of the present invention, practical reliable, because the present invention is without the larger modification that original vacuum chamber structure is for example designed to large scale opening and so on, but only need by pipeline, the bellows in this vacuum chamber to be communicated with the medium source outside this vacuum chamber, this can greatly reduce the design difficulty of this vacuum moving device of the present invention and realize cost.In addition, in the present invention only by the control to the medium pressure in bellows, just can realize the control of the movement to this mobile object, so on the one hand owing to having saved the structures such as original drive unit, transmission device, thereby drive cost lower, on the other hand, because being directly utilizes the bellows that is positioned at this vacuum chamber to control the movement of the mobile object that is positioned at equally this vacuum chamber, therefore drive process can not be subject to again the restriction of the chamber wall of this vacuum chamber, be conducive to realize the complicated move mode more flexibly of this mobile object.
Accompanying drawing explanation
Fig. 1 is the structural representation of an existing vacuum moving device.
Fig. 2 is the structural representation of the embodiment mono-of this vacuum moving device of the present invention.
Fig. 3 is the structural representation of the embodiment bis-of this vacuum moving device of the present invention.
Fig. 4 is the structural representation of the embodiment tri-of this vacuum moving device of the present invention.
Fig. 5 is the structural representation of the embodiment tetra-of this vacuum moving device of the present invention.
The specific embodiment
Below in conjunction with accompanying drawing, provide preferred embodiment of the present invention, to describe technical scheme of the present invention in detail.
With reference to figure 2-5, this vacuum moving device of the present invention is for moving a mobile object 2 at a vacuum chamber 1, this vacuum chamber 1 can be a for example vacuum process chamber, this mobile object 2 can be for for example one accepting for carrying workpiece the work support that processing is processed, in order for example to require at default station place, workpiece to be realized the high accuracy processing of preset angles according to processing procedure, this mobile object 2 needs in this vacuum chamber 1, to realize the move mode of various flexible complexity.
In order to realize the control of the movement to this mobile object 2, this vacuum moving device of the present invention includes at least one bellows 3 especially, and all bellowss 3 are all positioned at this vacuum chamber 1.The equal closed at both ends of each bellows 3, and in actual applications, stiff end 3a will be served as in wherein one end of each bellows 3, the other end will be served as mobile terminal 3b, and this will be elaborated hereinafter.The stiff end 3a of each bellows 3 is all fixedly arranged in this vacuum chamber 1, for example can be fixedly arranged in the random component of any position in this vacuum chamber 1, can certainly be fixedly arranged on the chamber wall of this vacuum chamber 1, the mobile terminal 3b of each bellows 3 is all connected with this mobile object 2.In addition, each bellows 3 is all communicated with the medium source (not shown) outside this vacuum chamber 1 by pipeline, thereby the inside of each bellows 3 all will be full of medium, and this medium source can also carry out independent control to the amount of the medium that is charged into each bellows 3 inside, that is to say, this medium source can carry out independent control to the medium pressure of each bellows 3 inside, wherein, this medium can be for example gas or liquid, and this medium source can be for example high-pressure air source etc.Because the tube wall of bellows is corrugated, therefore its tube wall can at random stretch or fold in the flexible limit, when this medium source is turned down the medium pressure of bellows 3 inside, just fold thereupon of its tube wall, thereby this bellows 3 is shunk, because the stiff end 3a of this bellows 3 is fixed, therefore this contractive action just can pull to this mobile object 2 along the flexible direction of this bellows 3 the stiff end 3a of this bellows 3; Similarly, when this medium source is heightened the medium pressure of bellows 3 inside, its tube wall just can stretch thereupon, thereby this bellows 3 is extended, and this elongation action will push away this mobile object 2 along the flexible direction of this bellows 3 the stiff end 3a of this bellows 3.
Known according to force analysis, the in the situation that of not considering moment only considering active force, when the flexible active force that this mobile object 2 is applied of all bellowss 3 make a concerted effort to be zero time, this mobile object 2 will keep poised state, for example remain static, and make a concerted effort when non-vanishing when this, this mobile object 2 just issues life by the effect of making a concerted effort at this and moves; The in the situation that of not considering active force only considering moment, one pivot is set on this mobile object 2 (at Two Dimensional Rotating in the situation that, this pivot will be reduced to a rotating shaft), the concrete position that is connected according to the mobile terminal 3b of each bellows 3 with this mobile object 2, when the resultant moment of the flexible active force that this mobile object 2 is applied of all bellowss 3 is zero, this mobile object 2 will keep poised state, for example remain static, and when this resultant moment is non-vanishing, this mobile object 2 just will rotate under the effect of this resultant moment.Therefore, set with the position that is connected of this mobile object 2 at the mobile terminal of each bellows 3 3b, and in the set situation in the position of the pivot of this mobile object 2 (or rotating shaft), just can be by regulating the medium pressure of each bellows 3 inside to control the expanding-contracting action of each bellows 3, thereby above-mentioned non-vanishing with joint efforts, above-mentioned resultant moment is under zero state, to realize the translation of this mobile object 2, or be zero in above-mentioned making a concerted effort, under the non-vanishing state of above-mentioned resultant moment, realize the rotation of this mobile object 2, or make a concerted effort and above-mentioned resultant moment all realizes translation and the rotation of this mobile object 2 under non-vanishing state simultaneously above-mentioned, the translation that this realizes simultaneously and rotation also just mean that this mobile object 2 can be under the Comprehensive Control of each bellows 3, realize the flexible complicated mobile of any-mode, this just provides the foundation for realizing complicated procedure for processing.
In addition, if the processing procedure carrying out in this vacuum chamber 1 is a high-precision process, the motion track of this mobile object 2 must be comparatively accurate, in this case, can in this vacuum chamber 1, design a guide rail (not shown), this mobile object 2 is moved accurately along this guide rail under the control of each bellows 3, thereby utilize the guiding function of this guide rail to realize the accurate positioning control to this mobile object 2.
As shown in Figure 2, in this embodiment, utilize a bellows 3 to realize the translation of this mobile object 2.By regulating the height of the medium pressure in this bellows 3, make this bellows 3 back and forth flexible along the direction shown in arrow A, and the stiff end 3a of this bellows 3 is fixed, therefore the mobile terminal 3b of this bellows 3 will drive this mobile object 2 to move back and forth along the direction shown in arrow A.
As shown in Figure 3, in this embodiment, utilize two bellowss 31,32 to realize the translation of this mobile object 2.By regulating the height of medium pressure of these two bellowss, 31,32 inside, make this bellows 31 along direction shown in arrow A shrink, this bellows 32 extends along the direction shown in arrow A simultaneously, or make this bellows 31 along direction shown in arrow A extend, this bellows 32 shrinks along the direction shown in arrow A simultaneously, and stiff end 31a, the 32a of this bellows 31,32 are all fixed, therefore mobile terminal 31b, the 32b of these two bellowss 31,32 will drive this mobile object 2 to move back and forth along the direction shown in arrow A.
Utilize multiple bellowss realize the translation of this mobile object 2 method and this embodiment to realize principle identical, therefore do not repeat at this.
As shown in Figure 4, in this embodiment, utilize a bellows 3 to realize the rotation of this mobile object 2, wherein, the rotating shaft O of this mobile object 2 is perpendicular to paper, and the flexible direction of this bellows 3 is not by this rotating shaft O.By regulating the height of the medium pressure in this bellows 3, make this bellows 3 back and forth flexible along the direction shown in arrow A, and the stiff end 3a of this bellows 3 is fixed, therefore the mobile terminal 3b of this bellows 3 by drive this mobile object 2 along the direction shown in arrow B around this rotating shaft O reciprocating rotary.
Embodiment 4
As shown in Figure 5, in this embodiment, utilize two bellowss 31,32 to realize the rotation of this mobile object 2, wherein, the rotating shaft O of this mobile object 2 is perpendicular to paper, and the flexible direction of these two bellowss 31,32 is not all by this rotating shaft O.By regulating the height of medium pressure of these two bellowss, 31,32 inside, these two bellowss 31,32 are all shunk along the direction shown in arrow A simultaneously, or these two bellowss 31,32 are all extended simultaneously along the direction shown in arrow A, and stiff end 31a, the 32a of this bellows 31,32 are all fixed, therefore mobile terminal 31b, the 32b of these two bellowss 31,32 by drive this mobile object 2 along the direction shown in arrow B around this rotating shaft O reciprocating rotary.
Utilize multiple bellowss realize the rotation of this mobile object 2 method and this embodiment to realize principle identical, therefore do not repeat at this.
And the translation that utilizes one or more bellowss to realize this mobile object 2 adds the various flexible complicated mobile method of rotation and the principle that realizes of above-mentioned each embodiment is also very similar, therefore do not repeat at this.
In sum, simplicity of design of the present invention, practical reliable, can greatly reduce the design difficulty of vacuum moving device and realize cost, and is conducive to realize the move mode of complexity more flexibly of this mobile object.
Although more than described the specific embodiment of the present invention, it will be understood by those of skill in the art that these only illustrate, protection scope of the present invention is limited by appended claims.Those skilled in the art is not deviating under the prerequisite of principle of the present invention and essence, can make various changes or modifications to these embodiments, but these changes and modification all fall into protection scope of the present invention.
Claims (10)
1. a vacuum moving device, for moving a mobile object at a vacuum chamber, it is characterized in that, it comprises that at least one is located at the bellows of the closed at both ends in this vacuum chamber, one end of each bellows is all fixedly arranged in this vacuum chamber, the other end is all connected with this mobile object, in each bellows, be all filled with medium and all by pipeline, be communicated with the medium source outside this vacuum chamber, the medium pressure that this medium source is controlled in each bellows independently stretches each bellows, and the install pipeline being wherein communicated with medium source is in the side of bellows.
2. vacuum moving device as claimed in claim 1, it is characterized in that, this mobile object has a pivot, and the medium pressure in each bellows and each bellows are set to the position that is connected of this mobile object: the flexible active force that this mobile object is applied of all bellowss non-vanishing but be zero with respect to the resultant moment of this pivot with joint efforts.
3. vacuum moving device as claimed in claim 1, it is characterized in that, this mobile object has a pivot, and the medium pressure in each bellows and each bellows are set to the position that is connected of this mobile object: making a concerted effort of the flexible active force that this mobile object is applied of all bellowss is zero but non-vanishing with respect to the resultant moment of this pivot.
4. vacuum moving device as claimed in claim 1, it is characterized in that, this mobile object has a pivot, and the medium pressure in each bellows and each bellows are set to the position that is connected of this mobile object: the flexible active force that this mobile object is applied of all bellowss non-vanishing and also non-vanishing with respect to the resultant moment of this pivot with joint efforts.
5. the vacuum moving device as described in any one in claim 1-4, is characterized in that, this vacuum moving device also comprises a guide rail of being located in this vacuum chamber, for the movement to this mobile object, guides.
6. a vacuum moving method that utilizes the vacuum moving device described in claim 1 to realize, it is characterized in that, utilize this medium source to control independently medium pressure in each bellows so that each bellows stretches, and utilize the making a concerted effort and resultant moment of the flexible active force that this mobile object is applied of all bellowss, make this mobile object carry out translation and/or rotation.
7. vacuum moving method as claimed in claim 6, it is characterized in that, this mobile object has a pivot, and the medium pressure in each bellows and each bellows are set to the position that is connected of this mobile object: the flexible active force that this mobile object is applied of all bellowss non-vanishing but be zero with respect to the resultant moment of this pivot with joint efforts.
8. vacuum moving method as claimed in claim 6, it is characterized in that, this mobile object has a pivot, and the medium pressure in each bellows and each bellows are set to the position that is connected of this mobile object: making a concerted effort of the flexible active force that this mobile object is applied of all bellowss is zero but non-vanishing with respect to the resultant moment of this pivot.
9. vacuum moving method as claimed in claim 6, it is characterized in that, this mobile object has a pivot, and the medium pressure in each bellows and each bellows are set to the position that is connected of this mobile object: the flexible active force that this mobile object is applied of all bellowss non-vanishing and also non-vanishing with respect to the resultant moment of this pivot with joint efforts.
10. the vacuum moving method as described in any one in claim 6-9, is characterized in that, this vacuum moving device also comprises a guide rail of being located in this vacuum chamber, utilizes this guide rail to guide the movement of this mobile object.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010234547.XA CN102337509B (en) | 2010-07-23 | 2010-07-23 | Vacuum moving device and method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201010234547.XA CN102337509B (en) | 2010-07-23 | 2010-07-23 | Vacuum moving device and method |
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| CN102337509A CN102337509A (en) | 2012-02-01 |
| CN102337509B true CN102337509B (en) | 2014-04-30 |
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| CN201010234547.XA Active CN102337509B (en) | 2010-07-23 | 2010-07-23 | Vacuum moving device and method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103510079B (en) * | 2012-06-21 | 2015-12-16 | 理想能源设备(上海)有限公司 | A kind of vacuum flush system valve member and chemical gas-phase deposition system |
| CN104614559B (en) * | 2015-01-26 | 2017-09-29 | 电子科技大学 | Object under test mobile device in a kind of vacuum system of dual U-shaped |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87205305U (en) * | 1987-11-24 | 1988-07-20 | 王守觉 | Transmission for manipulator |
| CN2281247Y (en) * | 1996-12-11 | 1998-05-13 | 中国科学院沈阳科学仪器研制中心 | Dual coupled magnet manipulator |
| CN2762970Y (en) * | 2004-11-04 | 2006-03-08 | 大连理工大学 | Transferring robot |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3484146B2 (en) * | 1999-12-22 | 2004-01-06 | 株式会社ミツトヨ | Interferometer |
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2010
- 2010-07-23 CN CN201010234547.XA patent/CN102337509B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87205305U (en) * | 1987-11-24 | 1988-07-20 | 王守觉 | Transmission for manipulator |
| CN2281247Y (en) * | 1996-12-11 | 1998-05-13 | 中国科学院沈阳科学仪器研制中心 | Dual coupled magnet manipulator |
| CN2762970Y (en) * | 2004-11-04 | 2006-03-08 | 大连理工大学 | Transferring robot |
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