Background technology
LTCC (Low Temperature Co-fired Ceramic LTCC) technology is a kind of novel electron material and device application technology, be that the low-temperature sintered ceramics powder is made the accurate and fine and close green band of thickness, on the green band, utilize laser boring, the machinery punching, micropore slip casting, technologies such as accurate conductor paste printing are made the circuitry needed figure, and with a plurality of passive components (as low appearance value electric capacity, resistance, wave filter, impedance transducer, coupling mechanism etc.) imbed in the multilayer ceramic substrate, overlap together then, internal and external electrode can use silver respectively, copper, metals such as gold, at 900 ℃ of following sintering, make the non-interfering high-density circuit of three-dimensional space, also can be made into the three-dimensional circuit substrate of built-in passive element, can mount IC and active part on its surface, make passive/active integrated functional module, can be particularly suitable for high frequency communication assembly further with circuit miniaturization and densification.
The low sintering stupalith of can realizing that uses mainly comprises devitrified glass system, glass-ceramic compound system and amorphous glass system at present.Wherein devitrified glass system, glass+Ceramic Composite system are the emphasis of people's research in recent years, have developed (Mg, Ca) TiO
3, BaO-TiO
2System, ZnO-TiO
2System, BaO-Nd
20
3-TiO
2System, (Zr, Sn) TiO
3, (Ba, Nb) TiO
3Many LTCC material systems such as system and borosilicate system.Wherein, the subject matter that faces at present of low-k LTCC material is high-performance (low-k, low-dielectric loss, high mechanical strength) and the contradiction of sintering temperature and low.LTCC is except rational glass-ceramic formulating of recipe, and its preparation technology and glass smelting method are also very important.Traditional technology is through mixing and ball milling with frit, obtain the frit presoma, insert platinum or the ceramic crucible high-temperature fusion becomes glass metal, then with cold quenching in the cold deionized water of glass metal impouring, obtain fragments of glass, again fragments of glass are pulverized at last or added ceramic packing ball milling, drying, make LTCC porcelain powder.The cold quenching effect of this technology is inhomogeneous, the working temperature height, and labour intensity is big, the employing platinum crucible has high input, and the platinum loss that can dissociate causes LTCC porcelain powder production cost height during high temperature melting, and the employing ceramic crucible, glass can corrode ceramic crucible when founding, introduce impurity, influenced the purity of LTCC porcelain powder, consistency of product is difficult to guarantee that the ceramic crucible thermal shock performance is poor simultaneously, often be full of cracks, fragmentation, cause a large amount of crucible wastes, produce industrial waste ballast, increased product cost.
Now, ripely in the world produce and can provide several specific inductivity to mainly contain DuPont, Ferro and Heraeus three families less than 10 raw material band, the domestic tracking development that still is in, most LTCC products depend on these raw material bands of import.Along with the modularization of following electronic component and the surplus of electronic terminal product, the competition of Costco Wholesale must be fierce more, the raw material design of domestic manufacturer's original adoption directly must be difficult to satisfy the requirement of rate war from the way of external packing import, this shows, break away from the dependence to external LTCC porcelain and device, LTCC porcelain of exploitation this country and advanced process for producing have great importance for the development of CHINESE INDUSTRIES.
Summary of the invention
The present invention is intended to the deficiency at traditional technology, abandons with platinum crucible or ceramic crucible melten glass operation, and a kind of processing method of utilizing microwave plasma torch to prepare LTCC amorphous glass porcelain powder is provided.This technology cold quenching effect is even, and production cost is low, the LTCC amorphous glass porcelain powder purity height that makes.
Technical problem to be solved by this invention is achieved through the following technical solutions.
A kind of microwave plasma torch prepares the processing method of LTCC amorphous glass porcelain powder, it is characterized in that processing step is as follows:
A, batching, mixing, ball milling
With frit according to Al
2O
3, 5 ~ 50wt%; SiO
2, 0 ~ 60wt%; B
2O
33H
2O, 0 ~ 40wt%; MgO, 0 ~ 15wt%; ZrO
2, 0 ~ 15wt%; H
3PO
4, 0 ~ 25wt%; Sb
2O
3, 0 ~ 5wt%; BaO, 0 ~ 40wt%; CaO, 0 ~ 35wt%; K
2O, 0 ~ 5wt%; Na
2O, 0 ~ 5wt% weighing mixes, and adds solvent and zirconia ball, adopts wet ball grinding 20 ~ 24 hours;
Described solvent is deionized water or dehydrated alcohol.
The weight proportion of described glass raw material, solvent, zirconia ball is 1:1:1 ~ 1:2:4.
B, oven dry, granulation, sintering
After the glass raw material discharging behind the ball milling, grind to form the powder that particle diameter is 10 ~ 40 μ m in 100 ~ 120 ℃ of oven dry, add the high polymer binder aqueous solution of 5 ~ 15wt%, mix, granulation, behind binder removal, became the porcelain ball in 1 ~ 2 hour in 650 ~ 850 ℃ of sintering;
Described high polymer binder is selected from polyvinyl butyral acetal (PVB) or polyvinyl alcohol (PVA), and the concentration of its aqueous solution is 8 ~ 12wt%.
Described granulation is meant: adopt the rotating-expressing type tablets press to be a granulated into the particle of φ 1 ~ 3mm.
Described binder removal technology is meant: particle is warmed up to 250 ℃ of insulations 2 hours with the heat-up rate of 1 ℃/min, is warmed up to 500 ℃ of insulations 4 hours again.
C, microwave plasma torch fusion, cold quenching
Red-hot porcelain ball behind the sintering is packed in the charging hopper of microwave plasma torch system, and make the porcelain ball freely fall into 3000 ~ 5000 ℃ microwave plasma torch with the flow of 80 ~ 120g/min, be fused into glass metal fast and be dropped in the deionized water, obtaining particle diameter behind cold quenching is the amorphous glass porcelain of 15~500 μ m;
The homo(io)thermism of described charging hopper is at 780 ~ 850 ℃.
The temperature of described deionized water remains on below 45 ℃.
D, pulverizing, drying
After airflow milling was pulverized, again with wet ball grinding, oven dry obtained LTCC amorphous glass porcelain powder product with the amorphous glass porcelain.
Microwave plasma torch of the present invention system comprises the charging hopper, the microwave magnetron power source, circulator, tuner, the microwave reaction cavity, cold rinse bank and condensing works, it is characterized in that: the charging hopper is positioned at the upper end of device, charging hopper outlet at bottom position is provided with the mass flow controller, be coated with adiabator layer on the outside around the charging hopper, the adiabator layer place is provided with heating unit, the bottom of charging hopper is the microwave reaction cavity, the bottom of microwave reaction cavity is cold rinse bank and condensing works, be provided with temperature control unit in the cold rinse bank, be provided with gas jet in both sides, microwave reaction cavity upper end, the centre is a plasma body, one side of plasma body is the tuner that can produce waveguide, opposite side is the microwave magnetron power source that produces discharge, also is provided with infrared thermometer between microwave reaction cavity and cold rinse bank.
Compared with prior art, advantage of the present invention is as follows:
1, the present invention has abandoned the method for using platinum, ceramic crucible melten glass in the traditional technology, and platinum crucible costs an arm and a leg, the platinum loss that can dissociate during high temperature melting, cost height; And ceramic crucible at high temperature can be introduced impurity by glass corrosion, makes the purity of LTCC porcelain powder be affected thus, consistency of product is difficult to guarantee that the ceramic crucible thermal shock performance is poor simultaneously, often be full of cracks, fragmentation, cause a large amount of crucible wastes, produce industrial waste ballast, increased product cost.
2, because glass metal grain of the present invention is to be in vacant state in the microwave plasma torch melting process, does not contact any vessel, thereby fully guaranteed the purity of glass porcelain, and easy to operate.
3, also be provided with infrared thermometer between microwave reaction cavity of the present invention and the cold rinse bank,, and then regulate waveguide, perhaps control the flow and the flow velocity of Ceramic Balls and realize temperature control in order to the temperature of mensuration melten glass material.The glass cold quenching is even, and good product consistency has better economic, helps scale operation.
Embodiment
Embodiment one
A kind of microwave plasma torch prepares the processing method of LTCC amorphous glass porcelain powder, it is characterized in that processing step is as follows:
A, batching, mixing, ball milling
With raw material A l
2O
3(99%), SiO
2(99%), B
2O
33H
2O(99%), ZrO MgO(99%),
2(99%), H
3PO
4(80%) is mixed with glass raw material according to weight percentage 28.58%, 25.47%, 35.21%, 6.90%, 0.50%, 3.34% respectively, weighing is to claim quality big raw material earlier in proper order, claim that again quality is little, add deionized water and zirconia ball, glass raw material and deionized water, zirconic weight proportion are 1:1:1, adopt wet ball grinding 24 hours;
B, oven dry, granulation, sintering
After the glass raw material discharging behind the ball milling, grind to form the powder of 10 ~ 40 μ m in 100 ℃ of oven dry, polyvinyl butyral acetal (PVB) aqueous solution that adds 10wt% is as binding agent, the concentration of this aqueous solution is 10wt%, after mixing, adopt the rotating-expressing type tablets press to be a granulated into the particle of φ 2mm, behind binder removal, became the porcelain ball in 1 hour in 850 ℃ of sintering;
Described binder removal technology is meant: particle is warmed up to 250 ℃ of insulations 2 hours with the heat-up rate of 1 ℃/min, is warmed up to 500 ℃ of insulations 4 hours again;
C, microwave plasma torch fusion, cold quenching
Red-hot porcelain ball behind the sintering is packed in the charging hopper of microwave plasma torch system, the homo(io)thermism of charging hopper is at 800 ℃, and make the porcelain ball freely fall into 4500 ℃ microwave plasma torch with the flow of 80g/min, being fused into glass metal fast, to be dropped into temperature be that obtaining particle diameter behind cold quenching is the amorphous glass porcelain of 15~500 μ m in 20 ~ 50 ℃ the deionized water;
D, pulverizing, drying
After airflow milling was pulverized, again with wet ball grinding, frit, deionized water ratio were 1:1 with the amorphous glass porcelain, and the ball milling time is 12 hours.Discharging, oven dry obtain LTCC amorphous glass porcelain powder product.
1, this product detects through laser particle size analyzer, and D50 equals 1.12 μ m;
2, this product is tested behind granulation, compacting disk, binder removal, sintering, back of the body silver, and wherein the low-frequency dielectric performance adopts the Agilent4284A-LCR test, and the high-frequency dielectric performance adopts Agilent8753ES and matched clamp test:
The dielectric properties of this material are: under the 1MHz,
ε r =6.6,
Tan δ=4.8 * 10
-4Under the 3GHz,
ε r =6.5,
Tan δ=5.8 * 10
-3
Embodiment two
A kind of microwave plasma torch prepares the processing method of LTCC amorphous glass porcelain powder, it is characterized in that processing step is as follows:
A, batching, mixing, ball milling
With raw material A l
2O
3(99%), SiO
2(99%), B
2O
33H
2O(99%), ZrO MgO(99%),
2(99%), H
3PO
4(80%), Sb
2O
3(99%), BaO (99%) is mixed with glass raw material according to weight percentage 8.94%, 52.34%, 24.89%, 2.44%, 1.86%, 1.52%, 0.13%, 7.88% respectively, weighing is to claim quality big raw material earlier in proper order, claim that again quality is little, add deionized water and zirconia ball, glass raw material and dehydrated alcohol, zirconic weight proportion are 1:1:2, adopt wet ball grinding 22 hours;
B, oven dry, granulation, sintering
After the glass raw material discharging behind the ball milling, grind to form the powder of 10 ~ 40 μ m in 120 ℃ of oven dry, polyvinyl butyral acetal (PVB) aqueous solution that adds 5wt% is as binding agent, the concentration of this aqueous solution is 12wt%, after mixing, adopt the rotating-expressing type tablets press to be a granulated into the particle of φ 1mm, behind binder removal, became the porcelain ball in 1 hour in 830 ℃ of sintering;
Described binder removal technology is meant: particle is warmed up to 250 ℃ of insulations 2 hours with the heat-up rate of 1 ℃/min, is warmed up to 500 ℃ of insulations 4 hours again.
C, microwave plasma torch fusion, cold quenching
Red-hot porcelain ball behind the sintering is packed in the charging hopper of microwave plasma torch system, the homo(io)thermism of charging hopper is at 780 ℃, and make the porcelain ball freely fall into 4400 ℃ microwave plasma torch with the flow of 100g/min, being fused into glass metal fast, to be dropped into temperature be that obtaining particle diameter behind cold quenching is the amorphous glass porcelain of 15~500 μ m in 20 ~ 50 ℃ the deionized water;
D, pulverizing, drying
After airflow milling was pulverized, again with wet ball grinding, frit, deionized water ratio were 1:1 with the amorphous glass porcelain, and the ball milling time is 12 hours.Discharging, oven dry obtain LTCC amorphous glass porcelain powder product.
1, this product detects through laser particle size analyzer, and D50 equals 1.36 μ m;
2, this product is tested behind granulation, compacting disk, binder removal, sintering, back of the body silver, and wherein the low-frequency dielectric performance adopts the Agilent4284A-LCR test, and high-frequency dielectric performance 5 adopts Agilent8753ES and matched clamp test:
The dielectric properties of this material are: under the 1MHz,
ε r =5.5,
Tan δ=7.8 * 10
-4Under the 3GHz,
ε r =5.3,
Tan δ=6.2 * 10
-3
Embodiment three
A kind of microwave plasma torch prepares the processing method of LTCC amorphous glass porcelain powder, it is characterized in that processing step is as follows:
A, batching, mixing, ball milling
With chemical feedstocks BaO(99%), SiO
2(99%), B
2O
33H
2O(99%), ZrO CaO(99% MgO(99%)),
2(99%) is mixed with glass raw material according to weight percentage 8.03%, 28.56%, 17.08%, 4.94%, 22.86%, 18.53% respectively, weighing is to claim quality big raw material earlier in proper order, claim that again quality is little, add deionized water and zirconia ball, glass raw material and deionized water, zirconic weight proportion are 1:2:4, adopt wet ball grinding 20 hours;
B, oven dry, granulation, sintering
After the glass raw material discharging behind the ball milling, grind to form the powder of 10 ~ 40 μ m in 120 ℃ of oven dry, polyvinyl alcohol (PVA) aqueous solution % that adds 15wt%) as binding agent, this concentration of aqueous solution is 8wt%, after mixing, adopt the rotating-expressing type tablets press to be a granulated into the particle of φ 3mm, behind binder removal, became the porcelain ball in 1 hour in 820 ℃ of sintering;
Described binder removal technology is meant: particle is warmed up to 250 ℃ of insulations 2 hours with the heat-up rate of 1 ℃/min, is warmed up to 500 ℃ of insulations 4 hours again;
C, microwave plasma torch fusion, cold quenching
Red-hot porcelain ball behind the sintering is packed in the charging hopper of microwave plasma torch system, the homo(io)thermism of charging hopper is at 850 ℃, and make the porcelain ball freely fall into 4000 ℃ microwave plasma torch with the flow of 120g/min, being fused into glass metal fast, to be dropped into temperature be that obtaining particle diameter behind cold quenching is the amorphous glass porcelain of 15~500 μ m in 20 ~ 40 ℃ the deionized water;
D, pulverizing, drying
After airflow milling was pulverized, again with wet ball grinding, frit, deionized water ratio were 1:1 with the amorphous glass porcelain, and the ball milling time is 12 hours.Discharging, oven dry obtain LTCC amorphous glass porcelain powder product.
1, this product is through with after alpha-type aluminum oxide mixes according to weight ratio 1:1, ball milling, and oven dry is ground and is mixed the porcelain powder uniformly, and laser particle size analyzer detects, and D50 equals 1.23 μ m;
2, mix the porcelain powder and test behind granulation, compacting disk, binder removal, sintering, back of the body silver, wherein the low-frequency dielectric performance adopts the Agilent4284A-LCR test, and the high-frequency dielectric performance adopts Agilent8753ES and matched clamp test:
The dielectric properties of this material are: under the 1MHz,
ε r =8.2,
Tan δ=4.7 * 10
-4Under the 3GHz,
ε r =8.0,
Tan δ=3.6 * 10
-3