CN101393142A - 检查装置及检查方法 - Google Patents

检查装置及检查方法 Download PDF

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Publication number
CN101393142A
CN101393142A CNA2008101656347A CN200810165634A CN101393142A CN 101393142 A CN101393142 A CN 101393142A CN A2008101656347 A CNA2008101656347 A CN A2008101656347A CN 200810165634 A CN200810165634 A CN 200810165634A CN 101393142 A CN101393142 A CN 101393142A
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CN
China
Prior art keywords
mentioned
unit
inspection
mounting table
mounting
Prior art date
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Pending
Application number
CNA2008101656347A
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English (en)
Chinese (zh)
Inventor
崔铉镐
金敏秀
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AJU HIGH TECH CORP
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AJU HIGH TECH CORP
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Publication date
Application filed by AJU HIGH TECH CORP filed Critical AJU HIGH TECH CORP
Publication of CN101393142A publication Critical patent/CN101393142A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/16—Inspection; Monitoring; Aligning

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CNA2008101656347A 2007-09-20 2008-09-19 检查装置及检查方法 Pending CN101393142A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020070095859 2007-09-20
KR1020070095859A KR100936903B1 (ko) 2007-09-20 2007-09-20 검사 장치 및 검사 방법

Publications (1)

Publication Number Publication Date
CN101393142A true CN101393142A (zh) 2009-03-25

Family

ID=40493542

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2008101656347A Pending CN101393142A (zh) 2007-09-20 2008-09-19 检查装置及检查方法

Country Status (3)

Country Link
JP (1) JP2009075102A (ko)
KR (1) KR100936903B1 (ko)
CN (1) CN101393142A (ko)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102954965A (zh) * 2011-08-26 2013-03-06 P&S技术有限公司 用于检查圆柱体表面的设备
CN103743749A (zh) * 2014-01-03 2014-04-23 苏州吉视电子科技有限公司 片状零件表面质量检测装置和方法
CN104990934A (zh) * 2015-07-24 2015-10-21 深圳市凌志锐科技有限公司 电路板双面检测设备
CN106767659A (zh) * 2016-12-20 2017-05-31 武汉钢铁股份有限公司 自动粗糙度测量设备
CN107490587A (zh) * 2016-06-10 2017-12-19 欧姆龙株式会社 检查装置
CN108027234A (zh) * 2015-06-24 2018-05-11 富士机械制造株式会社 基板检查机
CN109946321A (zh) * 2019-03-29 2019-06-28 广东利元亨智能装备股份有限公司 电芯柔性线路板的检测方法
CN110487795A (zh) * 2019-10-21 2019-11-22 湖南莱博赛医用机器人有限公司 具有两个载物台的细胞分析设备及控制方法
CN110720035A (zh) * 2017-06-07 2020-01-21 株式会社斯库林集团 搬送装置、搬送方法以及检查***
CN112045311A (zh) * 2020-08-10 2020-12-08 北京航天控制仪器研究所 一种叠片双面激光自动处理装置及处理方法
CN114275539A (zh) * 2020-10-01 2022-04-05 日本电产三协株式会社 搬运***

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101536644B1 (ko) * 2009-05-15 2015-07-14 (주)제이티 엘이디소자검사장치
KR100939645B1 (ko) * 2009-07-17 2010-02-03 주식회사 창성에이스산업 웨이퍼 검사장치
KR101124690B1 (ko) * 2009-12-21 2012-03-20 (주)제이티 엘이디소자검사장치
KR102007718B1 (ko) * 2017-06-13 2019-10-21 우리마이크론(주) 턴오버 방식의 디스플레이 셀 검사장치 및 그 제어방법
KR102358840B1 (ko) * 2019-02-12 2022-02-07 주식회사 크레셈 기판 통합 검사 장치
KR102081610B1 (ko) * 2019-04-17 2020-02-26 우리마이크론(주) 원장 패널 이송 장치, 디스플레이 패널 검사 장치 및 디스플레이 패널 검사 설비
WO2020213901A1 (ko) * 2019-04-17 2020-10-22 우리마이크론(주) 원장 패널 이송 장치, 디스플레이 패널 검사 장치 및 디스플레이 패널 검사 설비
KR102528838B1 (ko) * 2021-07-27 2023-05-04 주식회사 엔티에스 트랜스퍼 및 이송 시스템
KR102528839B1 (ko) * 2021-07-27 2023-05-04 주식회사 엔티에스 트랜스퍼 및 이송 시스템

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002277502A (ja) * 2001-01-12 2002-09-25 Nidec-Read Corp 基板検査装置及び基板検査方法
KR100684454B1 (ko) * 2005-04-26 2007-02-22 아주하이텍(주) 자동 광학 검사 시스템 및 방법

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102954965B (zh) * 2011-08-26 2014-12-24 P&S技术有限公司 用于检查圆柱体表面的设备
CN102954965A (zh) * 2011-08-26 2013-03-06 P&S技术有限公司 用于检查圆柱体表面的设备
CN103743749A (zh) * 2014-01-03 2014-04-23 苏州吉视电子科技有限公司 片状零件表面质量检测装置和方法
CN108027234A (zh) * 2015-06-24 2018-05-11 富士机械制造株式会社 基板检查机
CN104990934A (zh) * 2015-07-24 2015-10-21 深圳市凌志锐科技有限公司 电路板双面检测设备
CN104990934B (zh) * 2015-07-24 2018-08-07 深圳市凌志锐科技有限公司 电路板双面检测设备
CN107490587B (zh) * 2016-06-10 2021-01-15 欧姆龙株式会社 检查装置
CN107490587A (zh) * 2016-06-10 2017-12-19 欧姆龙株式会社 检查装置
US10545101B2 (en) 2016-06-10 2020-01-28 Omron Corporation Inspection apparatus
CN106767659A (zh) * 2016-12-20 2017-05-31 武汉钢铁股份有限公司 自动粗糙度测量设备
CN110720035B (zh) * 2017-06-07 2022-06-17 株式会社斯库林集团 搬送装置、搬送方法以及检查***
CN110720035A (zh) * 2017-06-07 2020-01-21 株式会社斯库林集团 搬送装置、搬送方法以及检查***
CN109946321A (zh) * 2019-03-29 2019-06-28 广东利元亨智能装备股份有限公司 电芯柔性线路板的检测方法
CN109946321B (zh) * 2019-03-29 2022-04-08 广东利元亨智能装备股份有限公司 电芯柔性线路板的检测方法
CN110487795A (zh) * 2019-10-21 2019-11-22 湖南莱博赛医用机器人有限公司 具有两个载物台的细胞分析设备及控制方法
CN112045311A (zh) * 2020-08-10 2020-12-08 北京航天控制仪器研究所 一种叠片双面激光自动处理装置及处理方法
CN114275539A (zh) * 2020-10-01 2022-04-05 日本电产三协株式会社 搬运***
CN114275539B (zh) * 2020-10-01 2023-12-19 日本电产三协株式会社 搬运***

Also Published As

Publication number Publication date
KR20090030503A (ko) 2009-03-25
JP2009075102A (ja) 2009-04-09
KR100936903B1 (ko) 2010-01-15

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Open date: 20090325