CN101277006B - 基板搬运装置和电缆配线构造 - Google Patents
基板搬运装置和电缆配线构造 Download PDFInfo
- Publication number
- CN101277006B CN101277006B CN2008100885372A CN200810088537A CN101277006B CN 101277006 B CN101277006 B CN 101277006B CN 2008100885372 A CN2008100885372 A CN 2008100885372A CN 200810088537 A CN200810088537 A CN 200810088537A CN 101277006 B CN101277006 B CN 101277006B
- Authority
- CN
- China
- Prior art keywords
- cable
- housing
- rotating parts
- flat cable
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02G—INSTALLATION OF ELECTRIC CABLES OR LINES, OR OF COMBINED OPTICAL AND ELECTRIC CABLES OR LINES
- H02G11/00—Arrangements of electric cables or lines between relatively-movable parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electric Cable Arrangement Between Relatively Moving Parts (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-080639 | 2007-03-27 | ||
JP2007080639A JP5037191B2 (ja) | 2007-03-27 | 2007-03-27 | 基板搬送装置及びケーブル配線構造 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101277006A CN101277006A (zh) | 2008-10-01 |
CN101277006B true CN101277006B (zh) | 2010-11-10 |
Family
ID=39916063
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008100885372A Expired - Fee Related CN101277006B (zh) | 2007-03-27 | 2008-03-27 | 基板搬运装置和电缆配线构造 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5037191B2 (ja) |
KR (1) | KR100978409B1 (ja) |
CN (1) | CN101277006B (ja) |
TW (1) | TWI445115B (ja) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5628509B2 (ja) * | 2009-10-21 | 2014-11-19 | 株式会社アイエイアイ | 電動プレス装置 |
JP5149942B2 (ja) * | 2010-07-21 | 2013-02-20 | ヤマハ発動機株式会社 | ヘッド駆動装置および部品実装装置 |
KR20130126602A (ko) * | 2010-10-27 | 2013-11-20 | 고어 엔터프라이즈 홀딩즈, 인코포레이티드 | 회전 가능한 어레이를 포함하는 이미징 카테터 |
JP5718134B2 (ja) * | 2011-04-11 | 2015-05-13 | ヤマハ発動機株式会社 | ロボット |
LU91826B1 (de) | 2011-06-17 | 2012-12-18 | Ipalco Bv | Vorrichtung zum Ab- und Aufwickeln einer oder mehreren Leitungen |
EP4029789A1 (en) | 2013-03-31 | 2022-07-20 | SZ DJI Technology Co., Ltd. | Payload mounting platform |
CN104515633B (zh) * | 2013-09-26 | 2016-09-07 | 纳米新能源(唐山)有限责任公司 | 摩擦电压力感应电缆 |
CN104552289A (zh) * | 2013-10-29 | 2015-04-29 | 精工爱普生株式会社 | 机器人 |
CN106044397B (zh) * | 2016-07-07 | 2018-09-21 | 诺力机械股份有限公司 | 一种盘线盒 |
JP7031958B2 (ja) * | 2016-12-27 | 2022-03-08 | 株式会社ディスコ | 伝達線カバーアセンブリ及び加工装置 |
JP6859756B2 (ja) * | 2017-03-03 | 2021-04-14 | オムロン株式会社 | 制御システム、コントローラ、制御方法、および制御プログラム |
CN107766667B (zh) * | 2017-10-27 | 2021-04-13 | 中国空间技术研究院 | 一种空间运动电缆走向设计方法 |
CN107866820A (zh) * | 2017-12-26 | 2018-04-03 | 哈尔滨思哲睿智能医疗设备有限公司 | 一种连杆结构机械臂旋转过线结构 |
JP7081311B2 (ja) * | 2018-06-04 | 2022-06-07 | 京セラドキュメントソリューションズ株式会社 | 画像形成装置 |
JP7290312B2 (ja) * | 2018-07-03 | 2023-06-13 | 株式会社アイエイアイ | アクチュエータ及びスカラロボット |
JP2020088995A (ja) * | 2018-11-21 | 2020-06-04 | ゲイツ・ユニッタ・アジア株式会社 | 回転部材間の配線構造 |
JP7016326B2 (ja) * | 2019-01-09 | 2022-02-04 | 上銀科技股▲分▼有限公司 | 連結モジュール |
US10836052B2 (en) | 2019-02-06 | 2020-11-17 | Hiwin Technologies Corp. | Connection module using in robot |
JP7022091B2 (ja) * | 2019-03-11 | 2022-02-17 | ファナック株式会社 | ロボット |
CN113905852B (zh) * | 2019-07-17 | 2023-08-25 | Abb瑞士股份有限公司 | 机器人臂连杆和机器人 |
JP2022083199A (ja) * | 2020-11-24 | 2022-06-03 | 日本電産サンキョー株式会社 | 産業用ロボット |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5316516B2 (ja) * | 1972-06-12 | 1978-06-01 | ||
JPS6113530U (ja) * | 1984-06-25 | 1986-01-27 | 三菱電線工業株式会社 | 光・電力複合ケ−ブルの巻取装置 |
JPS6146191U (ja) * | 1984-08-29 | 1986-03-27 | ぺんてる株式会社 | 多関節型ロボツトのア−ム間配線装置 |
JPS62207114A (ja) * | 1986-03-05 | 1987-09-11 | 三菱電機株式会社 | 旋回部におけるケ−ブルの配線構造 |
JPH06318045A (ja) * | 1993-05-07 | 1994-11-15 | Kokusai Electric Co Ltd | 回動表示装置 |
KR200152377Y1 (ko) * | 1996-09-30 | 1999-07-15 | 김재복 | 로보트의 이동부위 또는 회전부위용 컬케이블 |
JP3284936B2 (ja) * | 1997-08-25 | 2002-05-27 | 住友電装株式会社 | 移動用ケーブル |
JP4635301B2 (ja) * | 2000-06-28 | 2011-02-23 | シンフォニアテクノロジー株式会社 | 産業用ロボット |
-
2007
- 2007-03-27 JP JP2007080639A patent/JP5037191B2/ja not_active Expired - Fee Related
-
2008
- 2008-03-26 TW TW097110778A patent/TWI445115B/zh not_active IP Right Cessation
- 2008-03-26 KR KR1020080027985A patent/KR100978409B1/ko not_active IP Right Cessation
- 2008-03-27 CN CN2008100885372A patent/CN101277006B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP5037191B2 (ja) | 2012-09-26 |
TW200908187A (en) | 2009-02-16 |
CN101277006A (zh) | 2008-10-01 |
KR100978409B1 (ko) | 2010-08-26 |
JP2008245390A (ja) | 2008-10-09 |
KR20080087739A (ko) | 2008-10-01 |
TWI445115B (zh) | 2014-07-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101110 Termination date: 20170327 |