CA2644218A1 - Revetements a couche mince ameliores, elements electro-optiques et ensembles comprenant ces elements - Google Patents

Revetements a couche mince ameliores, elements electro-optiques et ensembles comprenant ces elements Download PDF

Info

Publication number: CA2644218A1
Authority: CA; Canada
Prior art keywords: layer; reflectance; ito; electro; chrome
Prior art date: 2006-03-03
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

CA002644218A

Other languages

English (en)

Other versions

CA2644218C (fr

Inventor

William L. Tonar

John S. Anderson

Jeffrey A. Forgette

George A. Neuman

Gary J. Dozeman

David J. Cammenga

Henrt A. Luten

G. Bruce Poe

Nelson F. Brummel

Lansen M. Perron

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Gentex Corp

Original Assignee

Individual

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2006-03-03

Filing date

2007-03-02

Publication date

2007-09-07

2007-03-02 Application filed by Individual filed Critical Individual

2007-09-07 Publication of CA2644218A1 publication Critical patent/CA2644218A1/fr

2014-12-02 Application granted granted Critical

2014-12-02 Publication of CA2644218C publication Critical patent/CA2644218C/fr

Status Active legal-status Critical Current

2027-03-02 Anticipated expiration legal-status Critical

Links

239000010409 thin film Substances 0.000 title abstract description 37
230000000712 assembly Effects 0.000 title abstract description 11
238000000429 assembly Methods 0.000 title abstract description 11
238000009501 film coating Methods 0.000 title abstract description 4
238000002834 transmittance Methods 0.000 claims abstract description 159
239000000463 material Substances 0.000 claims description 257
VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 155
239000000758 substrate Substances 0.000 claims description 113
230000003746 surface roughness Effects 0.000 claims description 43
AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 25
238000000992 sputter etching Methods 0.000 claims description 20
239000010410 layer Substances 0.000 description 518
238000000576 coating method Methods 0.000 description 258
229910052751 metal Inorganic materials 0.000 description 184
239000002184 metal Substances 0.000 description 184
239000011248 coating agent Substances 0.000 description 176
239000011521 glass Substances 0.000 description 160
GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 108
238000000034 method Methods 0.000 description 89
229910052760 oxygen Inorganic materials 0.000 description 83
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 81
239000001301 oxygen Substances 0.000 description 81
150000002739 metals Chemical class 0.000 description 75
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 71
229910052709 silver Inorganic materials 0.000 description 65
BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 62
239000004332 silver Substances 0.000 description 61
229910052707 ruthenium Inorganic materials 0.000 description 60
238000002310 reflectometry Methods 0.000 description 56
KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 55
230000008569 process Effects 0.000 description 55
239000011651 chromium Substances 0.000 description 52
230000003287 optical effect Effects 0.000 description 50
230000008901 benefit Effects 0.000 description 43
238000004544 sputter deposition Methods 0.000 description 43
229910045601 alloy Inorganic materials 0.000 description 41
239000000956 alloy Substances 0.000 description 41
230000000694 effects Effects 0.000 description 40
229910052786 argon Inorganic materials 0.000 description 38
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 32
239000007789 gas Substances 0.000 description 32
238000010521 absorption reaction Methods 0.000 description 31
150000002500 ions Chemical class 0.000 description 30
230000005540 biological transmission Effects 0.000 description 29
238000013461 design Methods 0.000 description 29
238000010884 ion-beam technique Methods 0.000 description 29
230000006870 function Effects 0.000 description 28
230000003595 spectral effect Effects 0.000 description 28
230000002829 reductive effect Effects 0.000 description 26
229910001316 Ag alloy Inorganic materials 0.000 description 25
239000004020 conductor Substances 0.000 description 24
235000010215 titanium dioxide Nutrition 0.000 description 24
238000004519 manufacturing process Methods 0.000 description 23
239000004593 Epoxy Substances 0.000 description 22
239000010948 rhodium Substances 0.000 description 22
239000000523 sample Substances 0.000 description 21
KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 19
230000008859 change Effects 0.000 description 19
229910052703 rhodium Inorganic materials 0.000 description 19
238000013459 approach Methods 0.000 description 18
239000010931 gold Substances 0.000 description 17
BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 17
230000007704 transition Effects 0.000 description 17
238000012217 deletion Methods 0.000 description 16
230000037430 deletion Effects 0.000 description 16
MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 16
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
229910052737 gold Inorganic materials 0.000 description 15
229910052759 nickel Inorganic materials 0.000 description 15
238000000926 separation method Methods 0.000 description 15
229910052710 silicon Inorganic materials 0.000 description 15
239000010703 silicon Substances 0.000 description 15
238000000151 deposition Methods 0.000 description 14
239000012530 fluid Substances 0.000 description 14
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 14
229910052743 krypton Inorganic materials 0.000 description 14
DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 14
239000000203 mixture Substances 0.000 description 14
238000012360 testing method Methods 0.000 description 14
230000001419 dependent effect Effects 0.000 description 12
230000008021 deposition Effects 0.000 description 12
230000006872 improvement Effects 0.000 description 12
239000004065 semiconductor Substances 0.000 description 12
230000007423 decrease Effects 0.000 description 11
230000003247 decreasing effect Effects 0.000 description 11
230000009467 reduction Effects 0.000 description 11
ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 10
238000010276 construction Methods 0.000 description 10
238000005259 measurement Methods 0.000 description 10
239000011733 molybdenum Substances 0.000 description 10
239000004408 titanium dioxide Substances 0.000 description 10
229960005196 titanium dioxide Drugs 0.000 description 10
230000000875 corresponding effect Effects 0.000 description 9
238000005516 engineering process Methods 0.000 description 9
-1 fluorinated alkyl saline Chemical compound 0.000 description 9
229910052750 molybdenum Inorganic materials 0.000 description 9
229910052763 palladium Inorganic materials 0.000 description 9
238000012545 processing Methods 0.000 description 9
239000011800 void material Substances 0.000 description 9
XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 8
238000005452 bending Methods 0.000 description 8
230000001276 controlling effect Effects 0.000 description 8
239000010949 copper Substances 0.000 description 8
238000005137 deposition process Methods 0.000 description 8
238000002474 experimental method Methods 0.000 description 8
229910052697 platinum Inorganic materials 0.000 description 8
229910052782 aluminium Inorganic materials 0.000 description 7
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
229910052804 chromium Inorganic materials 0.000 description 7
230000007797 corrosion Effects 0.000 description 7
238000005260 corrosion Methods 0.000 description 7
229910044991 metal oxide Inorganic materials 0.000 description 7
150000004706 metal oxides Chemical group 0.000 description 7
230000002441 reversible effect Effects 0.000 description 7
229910001020 Au alloy Inorganic materials 0.000 description 6
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
229910052802 copper Inorganic materials 0.000 description 6
239000003353 gold alloy Substances 0.000 description 6
PQTCMBYFWMFIGM-UHFFFAOYSA-N gold silver Chemical compound [Ag].[Au] PQTCMBYFWMFIGM-UHFFFAOYSA-N 0.000 description 6
238000009499 grossing Methods 0.000 description 6
229910052741 iridium Inorganic materials 0.000 description 6
GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 6
229910052754 neon Inorganic materials 0.000 description 6
GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 6
239000012071 phase Substances 0.000 description 6
230000000704 physical effect Effects 0.000 description 6
239000002356 single layer Substances 0.000 description 6
239000007787 solid Substances 0.000 description 6
239000002344 surface layer Substances 0.000 description 6
238000004458 analytical method Methods 0.000 description 5
230000009286 beneficial effect Effects 0.000 description 5
239000010408 film Substances 0.000 description 5
238000007689 inspection Methods 0.000 description 5
238000002955 isolation Methods 0.000 description 5
230000007246 mechanism Effects 0.000 description 5
230000007935 neutral effect Effects 0.000 description 5
239000003605 opacifier Substances 0.000 description 5
238000004891 communication Methods 0.000 description 4
238000010348 incorporation Methods 0.000 description 4
229910052738 indium Inorganic materials 0.000 description 4
APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
230000000670 limiting effect Effects 0.000 description 4
230000000873 masking effect Effects 0.000 description 4
229910001120 nichrome Inorganic materials 0.000 description 4
238000009877 rendering Methods 0.000 description 4
238000001228 spectrum Methods 0.000 description 4
XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 4
WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
229910052721 tungsten Inorganic materials 0.000 description 4
239000010937 tungsten Substances 0.000 description 4
238000001429 visible spectrum Methods 0.000 description 4
238000003466 welding Methods 0.000 description 4
239000011787 zinc oxide Substances 0.000 description 4
241000047703 Nonion Species 0.000 description 3
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
239000000853 adhesive Substances 0.000 description 3
230000001070 adhesive effect Effects 0.000 description 3
230000004888 barrier function Effects 0.000 description 3
230000015572 biosynthetic process Effects 0.000 description 3
230000000903 blocking effect Effects 0.000 description 3
VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 3
239000003086 colorant Substances 0.000 description 3
238000004040 coloring Methods 0.000 description 3
230000001010 compromised effect Effects 0.000 description 3
238000001723 curing Methods 0.000 description 3
239000003989 dielectric material Substances 0.000 description 3
230000008030 elimination Effects 0.000 description 3
238000003379 elimination reaction Methods 0.000 description 3
230000007613 environmental effect Effects 0.000 description 3
238000005530 etching Methods 0.000 description 3
239000011888 foil Substances 0.000 description 3
239000002346 layers by function Substances 0.000 description 3
238000003801 milling Methods 0.000 description 3
150000004767 nitrides Chemical class 0.000 description 3
229910052762 osmium Inorganic materials 0.000 description 3
SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 3
229920000642 polymer Polymers 0.000 description 3
229910000679 solder Inorganic materials 0.000 description 3
239000010935 stainless steel Substances 0.000 description 3
229910001220 stainless steel Inorganic materials 0.000 description 3
229910052715 tantalum Inorganic materials 0.000 description 3
GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
239000010936 titanium Substances 0.000 description 3
238000012546 transfer Methods 0.000 description 3
229960001296 zinc oxide Drugs 0.000 description 3
AZUYLZMQTIKGSC-UHFFFAOYSA-N 1-[6-[4-(5-chloro-6-methyl-1H-indazol-4-yl)-5-methyl-3-(1-methylindazol-5-yl)pyrazol-1-yl]-2-azaspiro[3.3]heptan-2-yl]prop-2-en-1-one Chemical compound ClC=1C(=C2C=NNC2=CC=1C)C=1C(=NN(C=1C)C1CC2(CN(C2)C(C=C)=O)C1)C=1C=C2C=NN(C2=CC=1)C AZUYLZMQTIKGSC-UHFFFAOYSA-N 0.000 description 2
229910000838 Al alloy Inorganic materials 0.000 description 2
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
108091006149 Electron carriers Proteins 0.000 description 2
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
229910000676 Si alloy Inorganic materials 0.000 description 2
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
229910000577 Silicon-germanium Inorganic materials 0.000 description 2
238000003491 array Methods 0.000 description 2
230000033228 biological regulation Effects 0.000 description 2
229910052793 cadmium Inorganic materials 0.000 description 2
BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 2
238000004364 calculation method Methods 0.000 description 2
229910017052 cobalt Inorganic materials 0.000 description 2
239000010941 cobalt Substances 0.000 description 2
GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
230000002596 correlated effect Effects 0.000 description 2
239000002537 cosmetic Substances 0.000 description 2
230000009977 dual effect Effects 0.000 description 2
239000000975 dye Substances 0.000 description 2
239000007772 electrode material Substances 0.000 description 2
238000000572 ellipsometry Methods 0.000 description 2
230000004438 eyesight Effects 0.000 description 2
230000004907 flux Effects 0.000 description 2
239000000499 gel Substances 0.000 description 2
230000004313 glare Effects 0.000 description 2
239000003292 glue Substances 0.000 description 2
230000002209 hydrophobic effect Effects 0.000 description 2
239000012212 insulator Substances 0.000 description 2
230000003993 interaction Effects 0.000 description 2
238000000869 ion-assisted deposition Methods 0.000 description 2
238000000608 laser ablation Methods 0.000 description 2
230000033001 locomotion Effects 0.000 description 2
229910052756 noble gas Inorganic materials 0.000 description 2
239000000382 optic material Substances 0.000 description 2
238000000059 patterning Methods 0.000 description 2
230000000135 prohibitive effect Effects 0.000 description 2
230000001681 protective effect Effects 0.000 description 2
238000000985 reflectance spectrum Methods 0.000 description 2
229910052702 rhenium Inorganic materials 0.000 description 2
WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 2
239000000565 sealant Substances 0.000 description 2
241000894007 species Species 0.000 description 2
238000000391 spectroscopic ellipsometry Methods 0.000 description 2
238000013179 statistical model Methods 0.000 description 2
239000000126 substance Substances 0.000 description 2
239000013589 supplement Substances 0.000 description 2
230000000153 supplemental effect Effects 0.000 description 2
229910052719 titanium Inorganic materials 0.000 description 2
230000000007 visual effect Effects 0.000 description 2
229910052724 xenon Inorganic materials 0.000 description 2
FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 2
229910000599 Cr alloy Inorganic materials 0.000 description 1
229910019923 CrOx Inorganic materials 0.000 description 1
229910000881 Cu alloy Inorganic materials 0.000 description 1
MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
229910005542 GaSb Inorganic materials 0.000 description 1
229910001218 Gallium arsenide Inorganic materials 0.000 description 1
229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
230000005355 Hall effect Effects 0.000 description 1
229910004262 HgTe Inorganic materials 0.000 description 1
240000002329 Inga feuillei Species 0.000 description 1
FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
229910001182 Mo alloy Inorganic materials 0.000 description 1
101000831256 Oryza sativa subsp. japonica Cysteine proteinase inhibitor 1 Proteins 0.000 description 1
229910001252 Pd alloy Inorganic materials 0.000 description 1
229910001128 Sn alloy Inorganic materials 0.000 description 1
ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
238000003848 UV Light-Curing Methods 0.000 description 1
HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
239000005083 Zinc sulfide Substances 0.000 description 1
QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
AWXLLPFZAKTUCQ-UHFFFAOYSA-N [Sn].[W] Chemical compound [Sn].[W] AWXLLPFZAKTUCQ-UHFFFAOYSA-N 0.000 description 1
239000006096 absorbing agent Substances 0.000 description 1
238000000862 absorption spectrum Methods 0.000 description 1
NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
239000000654 additive Substances 0.000 description 1
230000002411 adverse Effects 0.000 description 1
230000003466 anti-cipated effect Effects 0.000 description 1
IXMPXTJYLZVFBW-UHFFFAOYSA-N argon neon Chemical compound [Ne].[Ne].[Ar] IXMPXTJYLZVFBW-UHFFFAOYSA-N 0.000 description 1
239000012298 atmosphere Substances 0.000 description 1
238000004630 atomic force microscopy Methods 0.000 description 1
230000002238 attenuated effect Effects 0.000 description 1
230000003190 augmentative effect Effects 0.000 description 1
238000006664 bond formation reaction Methods 0.000 description 1
239000013590 bulk material Substances 0.000 description 1
239000000969 carrier Substances 0.000 description 1
230000015556 catabolic process Effects 0.000 description 1
239000000919 ceramic Substances 0.000 description 1
238000012512 characterization method Methods 0.000 description 1
238000006243 chemical reaction Methods 0.000 description 1
229910000423 chromium oxide Inorganic materials 0.000 description 1
230000000295 complement effect Effects 0.000 description 1
239000002131 composite material Substances 0.000 description 1
239000000470 constituent Substances 0.000 description 1
238000001816 cooling Methods 0.000 description 1
230000001186 cumulative effect Effects 0.000 description 1
230000001351 cycling effect Effects 0.000 description 1
230000007547 defect Effects 0.000 description 1
238000006731 degradation reaction Methods 0.000 description 1
230000001627 detrimental effect Effects 0.000 description 1
238000010586 diagram Methods 0.000 description 1
229910003460 diamond Inorganic materials 0.000 description 1
239000010432 diamond Substances 0.000 description 1
238000009792 diffusion process Methods 0.000 description 1
230000003292 diminished effect Effects 0.000 description 1
229910001882 dioxygen Inorganic materials 0.000 description 1
238000009826 distribution Methods 0.000 description 1
239000002355 dual-layer Substances 0.000 description 1
230000005518 electrochemistry Effects 0.000 description 1
239000003256 environmental substance Substances 0.000 description 1
238000011156 evaluation Methods 0.000 description 1
230000001747 exhibiting effect Effects 0.000 description 1
230000008713 feedback mechanism Effects 0.000 description 1
238000011049 filling Methods 0.000 description 1
239000012467 final product Substances 0.000 description 1
150000002222 fluorine compounds Chemical class 0.000 description 1
239000006260 foam Substances 0.000 description 1
238000009432 framing Methods 0.000 description 1
210000003128 head Anatomy 0.000 description 1
238000005286 illumination Methods 0.000 description 1
WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
238000002329 infrared spectrum Methods 0.000 description 1
230000000977 initiatory effect Effects 0.000 description 1
239000000976 ink Substances 0.000 description 1
238000003780 insertion Methods 0.000 description 1
230000037431 insertion Effects 0.000 description 1
239000011810 insulating material Substances 0.000 description 1
239000011229 interlayer Substances 0.000 description 1
238000005468 ion implantation Methods 0.000 description 1
229910052742 iron Inorganic materials 0.000 description 1
238000003475 lamination Methods 0.000 description 1
238000010329 laser etching Methods 0.000 description 1
230000031700 light absorption Effects 0.000 description 1
229910052749 magnesium Inorganic materials 0.000 description 1
239000011777 magnesium Substances 0.000 description 1
238000001755 magnetron sputter deposition Methods 0.000 description 1
239000011159 matrix material Substances 0.000 description 1
238000000691 measurement method Methods 0.000 description 1
238000001465 metallisation Methods 0.000 description 1
230000008450 motivation Effects 0.000 description 1
238000006386 neutralization reaction Methods 0.000 description 1
230000003472 neutralizing effect Effects 0.000 description 1
229910052757 nitrogen Inorganic materials 0.000 description 1
150000002835 noble gases Chemical class 0.000 description 1
239000000615 nonconductor Substances 0.000 description 1
230000006911 nucleation Effects 0.000 description 1
238000010899 nucleation Methods 0.000 description 1
230000003647 oxidation Effects 0.000 description 1
238000007254 oxidation reaction Methods 0.000 description 1
238000004806 packaging method and process Methods 0.000 description 1
239000003973 paint Substances 0.000 description 1
SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
238000009304 pastoral farming Methods 0.000 description 1
238000003909 pattern recognition Methods 0.000 description 1
230000008447 perception Effects 0.000 description 1
230000002093 peripheral effect Effects 0.000 description 1
238000005240 physical vapour deposition Methods 0.000 description 1
239000004033 plastic Substances 0.000 description 1
229920003023 plastic Polymers 0.000 description 1
229920001296 polysiloxane Polymers 0.000 description 1
238000012805 post-processing Methods 0.000 description 1
238000003672 processing method Methods 0.000 description 1
238000005086 pumping Methods 0.000 description 1
230000009257 reactivity Effects 0.000 description 1
230000004044 response Effects 0.000 description 1
230000000717 retained effect Effects 0.000 description 1
FTIMWVSQXCWTAW-UHFFFAOYSA-N ruthenium Chemical compound [Ru].[Ru] FTIMWVSQXCWTAW-UHFFFAOYSA-N 0.000 description 1
238000005488 sandblasting Methods 0.000 description 1
238000001878 scanning electron micrograph Methods 0.000 description 1
238000012216 screening Methods 0.000 description 1
230000011664 signaling Effects 0.000 description 1
HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
229910010271 silicon carbide Inorganic materials 0.000 description 1
235000012239 silicon dioxide Nutrition 0.000 description 1
239000000377 silicon dioxide Substances 0.000 description 1
239000010944 silver (metal) Substances 0.000 description 1
239000005361 soda-lime glass Substances 0.000 description 1
239000011780 sodium chloride Substances 0.000 description 1
239000007790 solid phase Substances 0.000 description 1
238000002798 spectrophotometry method Methods 0.000 description 1
230000000087 stabilizing effect Effects 0.000 description 1
238000007619 statistical method Methods 0.000 description 1
238000005728 strengthening Methods 0.000 description 1
230000001629 suppression Effects 0.000 description 1
238000010301 surface-oxidation reaction Methods 0.000 description 1
229910002058 ternary alloy Inorganic materials 0.000 description 1
230000008719 thickening Effects 0.000 description 1
229910052718 tin Inorganic materials 0.000 description 1
229910001887 tin oxide Inorganic materials 0.000 description 1
239000012780 transparent material Substances 0.000 description 1
238000009827 uniform distribution Methods 0.000 description 1
238000001771 vacuum deposition Methods 0.000 description 1
229910052720 vanadium Inorganic materials 0.000 description 1
LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
229910052725 zinc Inorganic materials 0.000 description 1
239000011701 zinc Substances 0.000 description 1
229910052984 zinc sulfide Inorganic materials 0.000 description 1
DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
229910052726 zirconium Inorganic materials 0.000 description 1

Classifications

- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/153—Constructional details
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60R—VEHICLES, VEHICLE FITTINGS, OR VEHICLE PARTS, NOT OTHERWISE PROVIDED FOR
- B60R1/00—Optical viewing arrangements; Real-time viewing arrangements for drivers or passengers using optical image capturing systems, e.g. cameras or video systems specially adapted for use in or on vehicles
- B60R1/02—Rear-view mirror arrangements
- B60R1/08—Rear-view mirror arrangements involving special optical features, e.g. avoiding blind spots, e.g. convex mirrors; Side-by-side associations of rear-view and other mirrors
- B60R1/083—Anti-glare mirrors, e.g. "day-night" mirrors
- B60R1/088—Anti-glare mirrors, e.g. "day-night" mirrors using a cell of electrically changeable optical characteristic, e.g. liquid-crystal or electrochromic mirrors
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B9/00—Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
- E06B9/24—Screens or other constructions affording protection against light, especially against sunshine; Similar screens for privacy or appearance; Slat blinds
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/153—Constructional details
- G02F1/155—Electrodes
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/163—Operation of electrochromic cells, e.g. electrodeposition cells; Circuit arrangements therefor
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/48—Flattening arrangements

Landscapes

Physics & Mathematics (AREA)
Nonlinear Science (AREA)
Engineering & Computer Science (AREA)
Optics & Photonics (AREA)
General Physics & Mathematics (AREA)
Chemical & Material Sciences (AREA)
Crystallography & Structural Chemistry (AREA)
Multimedia (AREA)
Mechanical Engineering (AREA)
Structural Engineering (AREA)
Architecture (AREA)
Civil Engineering (AREA)
Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Optical Elements Other Than Lenses (AREA)
Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)

CA2644218A 2006-03-03 2007-03-02 Revetements a couche mince ameliores, elements electro-optiques et ensembles comprenant ces elements Active CA2644218C (fr)

Applications Claiming Priority (9)

Application Number	Priority Date	Filing Date	Title
US77936906P	2006-03-03	2006-03-03
US60/779,369		2006-03-03
US81092106P	2006-06-05	2006-06-05
US60/810,921		2006-06-05
US87347406P	2006-12-07	2006-12-07
US60/873,474		2006-12-07
US88868607P	2007-02-07	2007-02-07
US60/888,686		2007-02-07
PCT/US2007/005494 WO2007100921A2 (fr)	2006-03-03	2007-03-02	Improved thin-film coatings, electro-optic elements and assemblies incorporating these elements

Publications (2)

Publication Number	Publication Date
CA2644218A1 true CA2644218A1 (fr)	2007-09-07
CA2644218C CA2644218C (fr)	2014-12-02

Family

ID=38459692

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA2644218A Active CA2644218C (fr)	2006-03-03	2007-03-02	Revetements a couche mince ameliores, elements electro-optiques et ensembles comprenant ces elements

Country Status (7)

Country	Link
EP (1)	EP2035886A4 (fr)
JP (2)	JP5570730B2 (fr)
KR (2)	KR101278371B1 (fr)
CN (2)	CN103838050B (fr)
CA (1)	CA2644218C (fr)
MX (1)	MX2008011009A (fr)
WO (1)	WO2007100921A2 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP3200951A4 (fr) *	2014-10-03	2017-10-25	Gentex Corporation	Ablation laser de seconde surface
US10185198B2 (en)	2015-06-19	2019-01-22	Gentex Corporation	Second surface laser ablation
US11009760B2 (en)	2017-05-05	2021-05-18	Gentex Corporation	Interleaving laser ablation
US11130195B2 (en)	2014-07-29	2021-09-28	Gentex Corporation	Laser ablation with reduced visual effects

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US7310177B2 (en)	2002-09-20	2007-12-18	Donnelly Corporation	Electro-optic reflective element assembly
US7274501B2 (en)	2002-09-20	2007-09-25	Donnelly Corporation	Mirror reflective element assembly
US8514476B2 (en)	2008-06-25	2013-08-20	View, Inc.	Multi-pane dynamic window and method for making same
US7719751B2 (en) *	2008-09-17	2010-05-18	Soladigm, Inc.	Electrical contact technique for electrochromic windows
US10156762B2 (en)	2009-03-31	2018-12-18	View, Inc.	Counter electrode for electrochromic devices
US9664974B2 (en)	2009-03-31	2017-05-30	View, Inc.	Fabrication of low defectivity electrochromic devices
US8582193B2 (en)	2010-04-30	2013-11-12	View, Inc.	Electrochromic devices
US12043890B2 (en)	2009-03-31	2024-07-23	View, Inc.	Electrochromic devices
US10429712B2 (en)	2012-04-20	2019-10-01	View, Inc.	Angled bus bar
US20130222877A1 (en)	2012-02-28	2013-08-29	Sage Electrochromics, Inc.	Multi-zone electrochromic devices
US11635666B2 (en)	2012-03-13	2023-04-25	View, Inc	Methods of controlling multi-zone tintable windows
US9341912B2 (en)	2012-03-13	2016-05-17	View, Inc.	Multi-zone EC windows
EP2920394B1 (fr) *	2012-11-13	2020-05-27	View, Inc.	Fenêtres électrochromes à zones multiples
US9398270B2 (en)	2012-12-04	2016-07-19	Gentex Corporation	Imaging system and method for detecting a bright city condition
WO2014205014A1 (fr)	2013-06-18	2014-12-24	View, Inc.	Dispositifs électrochromiques sur des formes non rectangulaires
US11891327B2 (en)	2014-05-02	2024-02-06	View, Inc.	Fabrication of low defectivity electrochromic devices
EP3224670B1 (fr)	2014-11-26	2023-04-12	View, Inc.	Contre-électrode pour dispositifs électrochromiques
US10101583B2 (en) *	2015-06-16	2018-10-16	Gentex Corporation	Heads up display system
EP3335073A4 (fr)	2015-08-14	2018-08-29	Gentex Corporation	Système d'affichage tête haute
JP2017110979A (ja) *	2015-12-15	2017-06-22	株式会社ミツトヨ	測定器
JP6789371B2 (ja) *	2016-07-19	2020-11-25	ジェンテックスコーポレイション	電気光学素子のための電気接続
JP6738679B2 (ja) *	2016-07-25	2020-08-12	スタンレー電気株式会社	電気化学装置
US10399498B2 (en)	2016-12-19	2019-09-03	Gentex Corporation	Electrical connections for electro-optic elements
US11500258B2 (en) *	2016-12-22	2022-11-15	Sage Electrochromics, Inc.	Apparatus including an electrochromic device configured to maintain a continuously graded transmission state
WO2019003941A1 (fr) *	2017-06-29	2019-01-03	豊田合成株式会社	Produit décoratif
US11409179B2 (en)	2018-08-03	2022-08-09	Sage Electrochromics, Inc.	Apparatus to maintain a continuously graded transmission state
CN109696784A (zh) *	2019-03-06	2019-04-30	信利光电股份有限公司	一种电致变色后视镜及交通工具
CN110109312A (zh) *	2019-05-06	2019-08-09	爱卓智能科技(上海)有限公司	一种用于汽车电致变色内后视镜上的导电膜
TWI783282B (zh) *	2020-10-23	2022-11-11	欣興電子股份有限公司	具有顯示功能的後視鏡
CN111443545A (zh) *	2020-05-12	2020-07-24	深圳市光羿科技有限公司	一种边缘密封导电基体与电致变色器件
CN115769136A (zh) *	2020-07-09	2023-03-07	株式会社Lg化学	光学装置
KR20220074082A (ko) *	2020-11-27	2022-06-03	엘지이노텍 주식회사	조명 장치 및 이를 포함하는 램프
CN113426707A (zh) *	2021-06-10	2021-09-24	云南永昌硅业股份有限公司	一种有效提高硅金属回收率的硅渣色选方法及装置
CN113414123A (zh) *	2021-06-10	2021-09-21	云南永昌硅业股份有限公司	一种提高工业硅冶炼原料质量的脉石英色选方法及装置
US20240083359A1 (en) *	2022-09-09	2024-03-14	Gentex Corporation	Rearview assembly

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2690536B1 (fr) *	1992-04-28	1994-06-17	Saint Gobain Vitrage Int	Vitrage electrochrome.
US5668663A (en) *	1994-05-05	1997-09-16	Donnelly Corporation	Electrochromic mirrors and devices
DE69630829T2 (de) *	1995-02-02	2004-09-23	Teijin Ltd.	Transparentes leitfähiges Flächenmaterial
EP0728618A3 (fr) *	1995-02-22	1996-11-06	Gentex Corp	Rétroviseur anti-éblouissant pour véhicules automobiles
EP0791503A3 (fr) *	1995-03-02	1997-09-10	Gentex Corporation	Rétroviseur pour véhicules
US6700692B2 (en) *	1997-04-02	2004-03-02	Gentex Corporation	Electrochromic rearview mirror assembly incorporating a display/signal light
US5818625A (en) *	1997-04-02	1998-10-06	Gentex Corporation	Electrochromic rearview mirror incorporating a third surface metal reflector
US6356376B1 (en) *	1997-04-02	2002-03-12	Gentex Corporation	Electrochromic rearview mirror incorporating a third surface metal reflector and a display/signal light
JP3474106B2 (ja)	1998-06-17	2003-12-08	アルプス電気株式会社	液晶表示装置
US6295164B1 (en) *	1998-09-08	2001-09-25	Nikon Corporation	Multi-layered mirror
JP2000206548A (ja)	1999-01-08	2000-07-28	Matsushita Electric Ind Co Ltd	液晶表示装置およびその製造方法
US6193378B1 (en) *	1999-06-25	2001-02-27	Gentex Corporation	Electrochromic device having a self-cleaning hydrophilic coating
US7064882B2 (en) *	2002-09-30	2006-06-20	Gentex Corporation	Electrochromic devices having no positional offset between substrates
FR2802488B1 (fr) *	1999-12-20	2002-03-08	Valeo Climatisation	Preconditionnement de l'habitacle d'un vehicule a l'arret
DE10023459A1 (de) *	2000-05-12	2001-11-15	Balzers Process Systems Gmbh	Indium-Zinn-Oxid (ITO)-Schicht und Verfahren zur Herstellung derselben
US6924919B2 (en) *	2000-10-17	2005-08-02	Ppg Industries Ohio, Inc.	Polymeric electrochromic devices
JP2002339084A (ja) *	2001-03-13	2002-11-27	Kiyousera Opt Kk	金属膜および金属膜被覆部材
JP2003107500A (ja)	2001-09-26	2003-04-09	Seiko Epson Corp	電気光学装置、電子機器、および電気光学装置の製造方法
EP1620763B1 (fr) *	2003-05-06	2012-07-25	Gentex Corporation	Retroviseurs pour vehicules
JP4314065B2 (ja) *	2003-05-19	2009-08-12	株式会社神戸製鋼所	Ａｇ合金積層膜、光反射体、光情報記録媒体、フラットパネルディスプレイ素子およびリフレクター
US20060285213A1 (en)	2003-05-26	2006-12-21	Nippon Soda Co., Ltd.	Light transmitting substrate with transparent conductive film
JP2005026013A (ja) *	2003-06-30	2005-01-27	Nippon Sheet Glass Co Ltd	透明電極膜付基板および透明電極膜付基板を有するエレクトロルミネッセンス素子
WO2005034070A2 (fr) *	2003-10-01	2005-04-14	Board Of Regents The University Of Texas System	Compositions, procedes et systemes de realisation et d'utilisation de papier electronique
EP1766469B1 (fr) *	2004-02-27	2012-08-15	Gentex Corporation	Appareil éléctrochromique pour refléchir de la lumière

2007
- 2007-03-02 MX MX2008011009A patent/MX2008011009A/es active IP Right Grant
- 2007-03-02 CN CN201310509360.XA patent/CN103838050B/zh active Active
- 2007-03-02 EP EP07752210A patent/EP2035886A4/fr not_active Withdrawn
- 2007-03-02 CN CN201010298163.4A patent/CN101976009B/zh active Active
- 2007-03-02 KR KR1020087024293A patent/KR101278371B1/ko active IP Right Grant
- 2007-03-02 KR KR1020127005055A patent/KR101275450B1/ko active IP Right Grant
- 2007-03-02 JP JP2008558324A patent/JP5570730B2/ja active Active
- 2007-03-02 WO PCT/US2007/005494 patent/WO2007100921A2/fr active Application Filing
- 2007-03-02 CA CA2644218A patent/CA2644218C/fr active Active
2013
- 2013-10-10 JP JP2013212935A patent/JP5855623B2/ja active Active

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US11130195B2 (en)	2014-07-29	2021-09-28	Gentex Corporation	Laser ablation with reduced visual effects
EP3200951A4 (fr) *	2014-10-03	2017-10-25	Gentex Corporation	Ablation laser de seconde surface
US10610975B2 (en)	2014-10-03	2020-04-07	Gentex Corporation	Second surface laser ablation
US10185198B2 (en)	2015-06-19	2019-01-22	Gentex Corporation	Second surface laser ablation
US11275285B2 (en)	2015-06-19	2022-03-15	Gentex Corporation	Second surface laser ablation
US11009760B2 (en)	2017-05-05	2021-05-18	Gentex Corporation	Interleaving laser ablation

Also Published As

Publication number	Publication date
CN101976009B (zh)	2015-07-22
CN103838050A (zh)	2014-06-04
EP2035886A2 (fr)	2009-03-18
MX2008011009A (es)	2008-09-05
EP2035886A4 (fr)	2010-11-03
CA2644218C (fr)	2014-12-02
JP5855623B2 (ja)	2016-02-09
WO2007100921A2 (fr)	2007-09-07
KR101278371B1 (ko)	2013-06-25
CN103838050B (zh)	2017-04-26
JP2009529150A (ja)	2009-08-13
KR20080106963A (ko)	2008-12-09
JP5570730B2 (ja)	2014-08-13
KR20120035222A (ko)	2012-04-13
JP2014029556A (ja)	2014-02-13
CN101976009A (zh)	2011-02-16
WO2007100921A3 (fr)	2008-05-08
KR101275450B1 (ko)	2013-06-17

Legal Events

Date	Code	Title	Description
2009-05-14	EEER	Examination request

Publication	Publication Date	Title
CA2644218C (fr)	2014-12-02	Revetements a couche mince ameliores, elements electro-optiques et ensembles comprenant ces elements
CA2693306C (fr)	2011-04-19	Revetements de film mince ameliores, elements electro-optiques et ensembles integrant de tels elements
US11486033B2 (en)	2022-11-01	Drive circuit for controlling electro-optic mirror
US9529214B2 (en)	2016-12-27	Thin-film coatings, electro-optic elements and assemblies incorporating these elements
US7688495B2 (en)	2010-03-30	Thin-film coatings, electro-optic elements and assemblies incorporating these elements
US8274729B2 (en)	2012-09-25	Thin-film coatings, electro-optic elements and assemblies incorporating these elements
EP2426552A1 (fr)	2012-03-07	Éléments électro-optiques incorporant des revêtements améliorés à couche mince
JP2009529150A6 (ja)	2009-12-24	改良薄膜コーティング、電気光学要素、及びこれらの要素を組み込んだアセンブリ
CN101395521B (zh)	2010-09-29	改进的薄膜涂层、光电元件和包含这些元件的组件
US8169684B2 (en)	2012-05-01	Vehicular rearview mirror elements and assemblies incorporating these elements