CA2165069A1 - Device for Coating Substrates in Semiconductor Manufacture - Google Patents
Device for Coating Substrates in Semiconductor ManufactureInfo
- Publication number
- CA2165069A1 CA2165069A1 CA2165069A CA2165069A CA2165069A1 CA 2165069 A1 CA2165069 A1 CA 2165069A1 CA 2165069 A CA2165069 A CA 2165069A CA 2165069 A CA2165069 A CA 2165069A CA 2165069 A1 CA2165069 A1 CA 2165069A1
- Authority
- CA
- Canada
- Prior art keywords
- coating substrates
- semiconductor manufacture
- coating
- substrates
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/105—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material by capillary action, e.g. using wicks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
- B05C9/12—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed after the application
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Manufacturing Optical Record Carriers (AREA)
Abstract
The invention concerns a device for coating substrates (20). The coating material is first applied to the substrate (20) by means of a capillary slit (21), and in a subsequent centrifuging operation the film is made uniform and reduced in thickness.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/DE1993/000778 WO1995005901A1 (en) | 1993-08-26 | 1993-08-26 | Device for coating substrates in semiconductor manufacture |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2165069A1 true CA2165069A1 (en) | 1995-03-02 |
CA2165069C CA2165069C (en) | 1999-06-01 |
Family
ID=6888393
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002165069A Expired - Lifetime CA2165069C (en) | 1993-08-26 | 1993-08-26 | Device for coating substrates in semiconductor manufacture |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR0159247B1 (en) |
CA (1) | CA2165069C (en) |
TW (1) | TW335507B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114472090A (en) * | 2022-02-10 | 2022-05-13 | 华能新能源股份有限公司 | Film layer growth equipment and film layer growth method |
-
1993
- 1993-08-26 CA CA002165069A patent/CA2165069C/en not_active Expired - Lifetime
- 1993-08-26 KR KR1019960700938A patent/KR0159247B1/en not_active IP Right Cessation
- 1993-09-21 TW TW082107765A patent/TW335507B/en not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114472090A (en) * | 2022-02-10 | 2022-05-13 | 华能新能源股份有限公司 | Film layer growth equipment and film layer growth method |
CN114472090B (en) * | 2022-02-10 | 2023-06-02 | 华能新能源股份有限公司 | Film growth equipment and film growth method |
Also Published As
Publication number | Publication date |
---|---|
KR960703684A (en) | 1996-08-31 |
KR0159247B1 (en) | 1998-11-16 |
CA2165069C (en) | 1999-06-01 |
TW335507B (en) | 1998-07-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request |