AU2002222583A1 - Radiation-sensitive composition changing in refractive index and method of changing refractive index - Google Patents

Radiation-sensitive composition changing in refractive index and method of changing refractive index

Info

Publication number
AU2002222583A1
AU2002222583A1 AU2002222583A AU2002222583A AU2002222583A1 AU 2002222583 A1 AU2002222583 A1 AU 2002222583A1 AU 2002222583 A AU2002222583 A AU 2002222583A AU 2002222583 A AU2002222583 A AU 2002222583A AU 2002222583 A1 AU2002222583 A1 AU 2002222583A1
Authority
AU
Australia
Prior art keywords
refractive index
changing
radiation
sensitive composition
composition changing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
AU2002222583A
Other versions
AU2002222583B2 (en
Inventor
Nobuo Bessho
Atsushi Kumano
Isao Nishimura
Tsutomu Shimokawa
Kenji Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
JSR Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JSR Corp filed Critical JSR Corp
Priority claimed from PCT/JP2001/010695 external-priority patent/WO2002048264A1/en
Publication of AU2002222583A1 publication Critical patent/AU2002222583A1/en
Application granted granted Critical
Publication of AU2002222583B2 publication Critical patent/AU2002222583B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

AU2002222583A 2000-12-11 2001-12-06 Radiation-sensitive composition changing in refractive index and method of changing refractive index Ceased AU2002222583B2 (en)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP2000-375523 2000-12-11
JP2000375523 2000-12-11
JP2001-007554 2001-01-16
JP2001007554 2001-01-16
JP2001029226 2001-02-06
JP2001-029226 2001-02-06
JP2001-034028 2001-02-09
JP2001034028 2001-02-09
PCT/JP2001/010695 WO2002048264A1 (en) 2000-12-11 2001-12-06 Radiation-sensitive composition changing in refractive index and method of changing refractive index

Publications (2)

Publication Number Publication Date
AU2002222583A1 true AU2002222583A1 (en) 2002-08-29
AU2002222583B2 AU2002222583B2 (en) 2006-06-15

Family

ID=27481858

Family Applications (2)

Application Number Title Priority Date Filing Date
AU2258302A Pending AU2258302A (en) 2000-12-11 2001-12-06 Radiation-sensitive composition changing in refractive index and method of changing refractive index
AU2002222583A Ceased AU2002222583B2 (en) 2000-12-11 2001-12-06 Radiation-sensitive composition changing in refractive index and method of changing refractive index

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AU2258302A Pending AU2258302A (en) 2000-12-11 2001-12-06 Radiation-sensitive composition changing in refractive index and method of changing refractive index

Country Status (8)

Country Link
US (1) US7108954B2 (en)
EP (1) EP1350814A4 (en)
KR (1) KR100789583B1 (en)
CN (1) CN1245664C (en)
AU (2) AU2258302A (en)
CA (1) CA2431358A1 (en)
TW (1) TW565591B (en)
WO (1) WO2002048264A1 (en)

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